• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.2
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• pp.217-229
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• 2000

Adsorption equilibrium experiments for the phenol on granular activated carbon(16~25 mesh) and powder activated carbon(325 mesh) were carried out at $25{\pm}1^{\circ}C$ and the results were expressed with Freundlich isotherm. Adsorption rate experiments were executed in batch adsorption system under the condition that can be neglecting mass transfer resistance at the external surface of the particle. The results were analysed with the Miller's method to evaluate the linear driving force(LDF) adsorption rate constant. Fixed bed adsorption experiments were performed by adopting different flow rates in the activated carbon-phenol system at $25{\pm}1^{\circ}C$. The theoretical breakthrough curves were estimated with the simple constant pattern solution. The adsorption rate constant of LDF model was not a fixed value but variable with adsorption amount. The experimental results were better agreed with the estimation of breakthrough curve using the variable adsorption rate constant than the results estimated using the average fixed adsorption rate constant.

• Transactions of the Korean Society of Automotive Engineers
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• v.24 no.2
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• pp.144-151
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• 2016

This study effect of engine oils on regulated fuel economy and emissions including particulate matter (PM) to provide basic data for management of engine oil in vehicles. Three engine oils (Group III base oil, Group III genuine oil with additive package and synthetic oil with poly alpha olefins (PAOs)) were used in one gasoline, one LPG(liquefied petroleum gas) and two diesel vehicles. In the case of diesel vehicles, one is a diesel vehicle without DPF (diesel particulate filter) other is a diesel vehicle with DPF. In this study, the US EPA emission test cycle FTP-75, representing city driving, was used. HORIBA, PIERBURG, and AVL gas analyzers were used to measure the fuel economy and regulated emissions such as CO, NOx, and THC. The number of PM was measured using a PPS (pegasor particle sensor). And, the shape of PMs was analyzed by SEM (scanning electron microscope). The effects of oil type on fuel economy, exhaust gas, and PM were not significant because engine oil consumption by evaporation and combustion in the cylinder is very tiny. Fuel and vehicle type were dominant factors in fuel economy and emissions. HC emission from gasoline vehicles was higher than that from other vehicles and NOx emission from diesel vehicles was higher than that from other vehicles. The number of PM was not affected by the engine oil, but by the driving pattern and fuel. The shapes of the PM, sampled from each vehicle using any test engine oil, were similar.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.8 no.1
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• pp.13-24
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• 1988

This paper is concentrated on the development of oxygen transfer system by U-tube deep shaft in biological fluidised bed process. The depth of the shaft is 32 m, it is composed of downcomer and riser. Not only flow pattern and oxygen transfer in the deep shaft but also oxygen limitation in biofilm and oxygen utilization in biological fluidised bed are investigated. In this investigation, driving force for liquid circulation in the deep shaft is affected by air injection depth and gas hold-up in downcomer. Flow pattern of the deep shaft is revealed to plug flow. When flow velocity in the deep shaft is maintained to 0.52 m/sec, $K_La$ value is peak at 25~30 m depth in riser. The efficiency of dissolved oxygen supply which passed from the deep shaft to biological fluidised bed is estimated to 56~81 % in the organic wastewater treatment using the deep shaft and when dissolved oxygen concentration is 9.2 mg/l and over, limiting factors of flux and substrate within biofilm are organic materials. Terefore, organic loadings could be increase without decreasing of BOD removal efficiency.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.25 no.2
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• pp.76-93
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• 2013

The hydrodynamics in the Youngsan River Estuary has changed due to coastal developments such as the estuary dam and two tidal barriers. As the freshwater discharge is artificially controlled, the circulation pattern is different from those of natural estuaries and the river-born sediment supply is restricted. 3D numerical modeling system EFDC was applied to investigate the sediment transport pattern and budget in summer with river floods. The real-time driving forces and the fluvial sediment discharges from the watershed modeling were assigned for the simulation period. The size classes of sand, silt and clay were adopted based on the grain-size distribution of bottom sediments. The modeling results were calibrated and validated with the observed tides, tidal currents and suspended sediment concentrations. The suspended sediments are transported to the offshore at surface layer, whereas upstream toward the dam at mid- and bottom layers in August 2011. The characteristic estuarine circulation induced by the freshwater discharge from the dam, causes the deposition of silt-sized sediments on the whole and the sustained suspension of clay-sized sediments.

• Journal of the Korean Society of School Health
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• v.9 no.2
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• pp.205-221
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• 1996

This study is designed to contribute to the intervention of adolescent domestic violence by understanding the experience of the victims, better. The data were collected through a series of interviews with 3 subjects singled out at each stage of research. With the permission of the subjects, the interviews were recorded and transcribed. The interviews lasted from two and a half to 8 hours. The data were analyzed in the framework of grounded theory as mapped out by Strauss & Corbin (1990). The major findings of this research are as follows : The core category was found to be the adaptation of "Jitnulim" or "Being suppressed". The sub-categories identified in the process of grounded data analysis were 'roughness', 'wildness', 'driving', 'challenging', 'being strapped', 'being pressed', 'erupting', 'being horrified', 'being hardened', 'being connected', 'being seen', 'being helpful', being led', 'sprouting', 'being off', 'being cast out', 'shaking off', 'getting out', 'covering-up', 'waiting', 'ruling', 'common placeness', 'overcoming', 'getting united', 'fa11ing behind', 'falling in', 'being mixed up', 'ruthlessness', 'estrangement', 'difficulty', 'being overwhelmed', 'feeling regreful', 'being pressed', 'hesitating', and 'shying off'. These categories were again grouped into 11 categories including 'threatening', 'straightjacketing', 'alliance', 'phenomenon', 'pattern of support', 'system of support', 'challenging', 'calming-down', 'being relieved', 'being hardened and entangled', 'being entangled'. The following four theses were confirmed on the basis of the repetitive relation: 1) If the episodes of violence are frequent and serious, with the resulting straightjacketing being stronger the victim's family relations are coherent and the subject's support pattern is highly mature. Concrete the responses to the straighjacketing resulted in a'calming-down' which gradually relieved. 2) If the episodes of violence were frequent and serious, with the resulting straightjacketing being strong the victim's family relations and incoherent and the subjects supporter is immature but strong the support type is superficial and the responses to the straightjacketing result in a bouncing-off which gets entangled with the passage of time. 3) If the episodes of the violence are frequent and serious, the straighljacketing is strong, but the family relations are and the subject's support system is mature and strong the responses to the straightjacketing result in a calming-down which gets partly relieved but partly entangled. 4) If the episodes of the violence are frequent and serious with the resulting straightiacketing being strong, the victim's family relations are incoherent, the subject's support system is immature, and the support type is immature the responses to the straightjacketing result in a 'bouncing-off' which gets entangled and partly hardened with time.

• Korean Journal of Materials Research
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• v.23 no.7
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• pp.379-384
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• 2013

In order to produce size-controllable Ag nanoparticles and a nanomesh-patterned Si substrate, we introduce a rapid thermal annealing(RTA) method and a metal assisted chemical etching(MCE) process. Ag nanoparticles were self-organized from a thin Ag film on a Si substrate through the RTA process. The mean diameter of the nanoparticles was modulated by changing the thickness of the Ag film. Furthermore, we controlled the surface energy of the Si substrate by changing the Ar or $H_2$ ambient gas during the RTA process, and the modified surface energy was evaluated through water contact angle test. A smaller mean diameter of Ag nanoparticles was obtained under $H_2$ gas at RTA, compared to that under Ar, from the same thickness of Ag thin film. This result was observed by SEM and summarized by statistical analysis. The mechanism of this result was determined by the surface energy change caused by the chemical reaction between the Si substrate and $H_2$. The change of the surface energy affected on uniformity in the MCE process using Ag nanoparticles as catalyst. The nanoparticles formed under ambient Ar, having high surface energy, randomly moved in the lateral direction on the substrate even though the etching solution consisting of 10 % HF and 0.12 % $H_2O_2$ was cooled down to $-20^{\circ}C$ to minimize thermal energy, which could act as the driving force of movement. On the other hand, the nanoparticles thermally treated under ambient $H_2$ had low surface energy as the surface of the Si substrate reacted with $H_2$. That's why the Ag nanoparticles could keep their pattern and vertically etch the Si substrate during MCE.

• Journal of the Korean Vacuum Society
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• v.18 no.1
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• pp.37-43
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• 2009

Temperature and injection current dependence of electroluminescence(EL) spectral intensity of the $In_xGa_{1-x}N$/GaN multi-quantum wells(MQW) have been studied over a wide temperature range and as a function of injection current level. It is found that a temperature-dependent variation pattern of the EL efficiency under very low and high injection currents shows a drastic difference. This unique EL efficiency variation pattern with temperature and current can be explained field effects due to the driving forward bias in presence of internal(piezo and spontaneous polarization) fields. Increase of the indium content in $In_xGa_{1-x}N$/GaN multiple quantum wells gives rise to a redshift of 80 meV and 22 meV for green and blue MQW, respectively. It can be explained by carrier localization by potential fluctuation of multiple quantum well and MQW structures also shows a keen difference owing to the different indium content in InGaN/GaN MQW.

• The Transactions of the Korea Information Processing Society
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• v.4 no.10
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• pp.2461-2469
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• 1997

Target detection and recognition problems, in which neural networks are widely used, require translation invariant and real-time processing in addition to the requirements that general pattern recognition problems need. This paper presents a novel architecture that meets the requirements and explains effective methodology to train the network. The proposed neural network is an architectural extension of the shared-weight neural network that is composed of the feature extraction stage followed by the pattern recognition stage. Its feature extraction stage performs correlational operation on the input with a weight kernel, and the entire neural network can be considered a nonlinear correlation filter. Therefore, the output of the proposed neural network is correlational plane with peak values at the location of the target. The architecture of this neural network is suitable for implementing with parallel or distributed computers, and this fact allows the application to the problems which require realtime processing. Net training methodology to overcome the problem caused by unbalance of the number of targets and non-targets is also introduced. To verify the performance, the proposed network is applied to detection and recognition problem of a specific automobile driving around in a parking lot. The results show no false alarms and fast processing enough to track a target that moves as fast as about 190 km per hour.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.16 no.1
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• pp.8-17
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• 2023

In conventional liquid crystal display(LCD) manufacturing process, Indium Tin Oxide(ITO) as transparent electrode and rubbing process of polyimide as alignment layer are essential process to apply electric field and align liquid crystal molecules. However, there are some limits that deposition of ITO requires high vacuum state, and rubbing process might damage the device with tribolectric discharge. In this paper, we made nanocomposite with PEDOT:PSS and MWNT to replace ITO and constructed alignment layer by nano imprint lithography with nano wrinkle pattern, to replace rubbing process. These replacement made that only one PEDOT:PSS/MWNT film can function as two layers of ITO and polyimide alignment layer, which means simplification of process. Transferred nano wrinkle patterns functioned well as alignment layer, and we found out lowered threshold voltage and shortened response time as MWNT content increase, which is related to increment of electric conductivity of the film. Through this study, it may able to contribute to process simplification, reducing process cost, and suggesting a solution to disadvantage of rubbing process.