• Title/Summary/Keyword: drain layer

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The recess gate structure for the improvement of breakdown characteristics of GaAs MESFET (GaAs MESFET의 파괴특성 향상을 위한 recess게이트 구조)

  • 장윤영;송정근
    • Electrical & Electronic Materials
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    • v.7 no.5
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    • pp.376-382
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    • 1994
  • In this study we developed a program(DEVSIM) to simulate the two dimensional distribution of the electrostatic potential and the electric field of the arbitrary structure consisting of GaAs/AlGaAs semiconductor and metal as well as dielectric. By the comparision of the electric field distribution of GaAs MESFETs with the various recess gates we proposed a suitable device structure to improve the breakdown characteristics of MESFET. According to the results of simulation the breakdown characteristics were improved as the thickness of the active epitaxial layer was decreased. And the planar structure, which had the highly doped layer under the drain for the ohmic contact, was the worst because the highly doped layer prevented the space charge layer below the gate from extending to the drain, which produced the narrow spaced distribution of the electrostatic potential contours resulting in the high electric field near the drain end. Instead of the planar structure with the highly doped drain the recess gate structure having the highly doped epitaxial drain layer show the better breakdown characteristics by allowing the extention of the space charge layer to the drain. Especially, the structure in which the part of the drain epitaxial layer near the gate show the more improvement of the breakdown characteristics.

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An Amorphous Silicon Local Interconnection (ASLI) CMOS with Self-Aligned Source/Drain and Its Electrical Characteristics

  • Yoon, Yong-Sun;Baek, Kyu-Ha;Park, Jong-Moon;Nam, Kee-Soo
    • ETRI Journal
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    • v.19 no.4
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    • pp.402-413
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    • 1997
  • A CMOS device which has an extended heavily-doped amorphous silicon source/drain layer on the field oxide and an amorphous silicon local interconnection (ASLI) layer in the self-aligned source/drain region has been studied. The ASLI layer has some important roles of the local interconnections from the extended source/drain to the bulk source/drain and the path of the dopant diffusion sources to the bulk. The junction depth and the area of the source/drain can be controlled easily by the ASLI layer thickness. The device in this paper not only has very small area of source/drain junctions, but has very shallow junction depths than those of the conventional CMOS device. An operating speed, however, is enhanced significantly compared with the conventional ones, because the junction capacitance of the source/drain is reduced remarkably due to the very small area of source/drain junctions. For a 71-stage unloaded CMOS ring oscillator, 128 ps/gate has been obtained at power supply voltage of 3.3V. Utilizing this proposed structure, a buried channel PMOS device for the deep submicron regime, known to be difficult to implement, can be fabricated easily.

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Reduction of Drain Leakage Current by AlGaAs buffer layer in GaAs MESFET (GaAs MESFET에서 AlGaAs buffer layer에 의한 Drain 누설전류 차단)

  • Park, Jun;Jo, Jung-Yol
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1321-1323
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    • 1998
  • We investigated drain leakage current in GaAs power MESFET. The device we studied by 20 simulation has a $1000{\AA}$ thick AlGaAs buffer layer under n-GaAs active layer. The calculation shows that the leakage current through GaAs substrate is significantly reduced by the buffer layer.

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Geotextiles Horizontal Drain between Earth Fills and Natural Soft Ground (토목섬유를 사용한 무처리 연약지반과 성토사이의 수평배수층)

  • Lee, Hyoung-Kyu;Kong, Kil-Yong;Kim, Hyun-Tae
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.44 no.4
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    • pp.129-138
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    • 2002
  • This paper presents a study on the discharge capacity of geotextiles as a horizontal drain layer placed between the layers of earth fill and natural soft ground. Required discharge capacity of geotextiles as drain layers estimated by consolidation analysis is proportional to the consolidation coefficient of the ground soils and the width of the earth fills. The field discharge capacity of the geotextiles are measured by the hydraulic transmissivity test. And the results show wide variation according to the material characteristics of geotextiles, water content of the soils, vertical pressure, and etc. For the short horizontal drain length, geotextile filter mat can be used for the horizontal drain layer. And f3r the long drain($25{\sim}55m$), it is used for the drain together with Bord Drain.

A Study on Improvement of a-Si:H TFT Operating Speed

  • Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • v.5 no.1
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    • pp.42-44
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    • 2007
  • The a-Si:H TFTs decreasing parasitic capacitance of source-drain is fabricated on glass. The structure of a-Si:H TFTs is inverted staggered. The gate electrode is formed by patterning with length of $8{\mu}m{\sim}16{\mu}m$ and width of $80{\sim}200{\mu}m$ after depositing with gate electrode (Cr) $1500{\AA}$ under coming 7059 glass substrate. We have fabricated a-SiN:H, conductor, etch-stopper and photoresistor on gate electrode in sequence, respectively. The thickness of these, thin films is formed with a-SiN:H ($2000{\mu}m$), a-Si:H($2000{\mu}m$) and $n^+a-Si:H$ ($500{\mu}m$). We have deposited $n^+a-Si:H$, NPR(Negative Photo Resister) layer after forming pattern of Cr gate electrode by etch-stopper pattern. The NPR layer by inverting pattern of upper gate electrode is patterned and the $n^+a-Si:H$ layer is etched by the NPR pattern. The NPR layer is removed. After Cr layer is deposited and patterned, the source-drain electrode is formed. The a-Si:H TFTs decreasing parasitic capacitance of source-drain show drain current of $8{\mu}A$ at 20 gate voltages, $I_{on}/I_{off}$ ratio of ${\sim}10^8$ and $V_{th}$ of 4 volts.

Simulation Study on the Breakdown Enhancement for InAlAs/InGaAs/GaAs MHEMTs with an InP-Etchstop Layer (InP 식각정지층을 갖는 InAlAs/InGaAs/GaAs MHEMT 소자의 항복 전압 개선에 관한 연구)

  • Son, Myung Sik
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.3
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    • pp.23-27
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    • 2013
  • This paper is for enhancing the breakdown voltage of MHEMTs with an InP-etchstop layer. Gate-recess structures has been simulated and analyzed for the breakdown of the devices with the InP-etchstop layer. The fully removed recess structure in the drain side of MHEMT shows that the breakdown voltage enhances from 2V to almost 4V and that the saturation current at gate voltage of 0V is reduced from 90mA to 60mA at drain voltage of 2V. This is because the electron-captured negatively fixed charges at the drain-side interface between the InAlAs barrier layer and the $Si_3N_4$ passivation layer deplete the InGaAs channel layer more and thus decreases the electron current passing the channel layer. In the paper, the fully-recessed asymmetric gate-recess structure at the drain side shows the on-breakdown voltage enhancement from 2V to 4V in the MHEMTs.

The Fabrication of a-Si:H TFT Improving Parasitic Capacitance of Source-Drain (소오스-드레인 기생용량을 개선한 박막트랜지스터 제조공정)

  • 허창우
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.8 no.4
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    • pp.821-825
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    • 2004
  • The a-Si:H TFTs decreasing parasitic capacitance of source-drain is fabricated on glass. The structure of a-Si:H TFTs is inverted staggered. The gate electrode is formed by patterning with length of 8 ${\mu}m∼16 ${\mu}m. and width of 80∼200 ${\mu}m after depositing with gate electrode (Cr) 1500 under coming 7059 glass substrate. We have fabricated a-SiN:H, conductor, etch-stopper and photoresistor on gate electrode in sequence, respectively. The thickness of these thin films is formed with a-SiN:H (2000 ), a-Si:H(2000 ) and n+a-Si:H (500). We have deposited n+a-Si:H ,NPR(Negative Photo Resister) layer after forming pattern of Cr gate electrode by etch-stopper pattern. The NPR layer by inverting pattern of upper gate electrode is patterned and the n+a-Si:H layer is etched by the NPR pattern. The NPR layer is removed. After Cr layer is deposited and patterned, the source-drain electrode is formed. The a-Si:H TFTs decreasing parasitic capacitance of source-drain has channel length of 8 ~20 ${\mu}m and channel width of 80∼200 ${\mu}m. And it shows drain current of 8 ${\mu}A at 20 gate voltages, Ion/Ioff ratio of 108 and Vth of 4 volts.

A Study on Utilization of Recycled Aggregates as Lateral Drain for Soft Ground Improvemnet (연약지반 개량을 위한 수평배수층 재료로 순환골재의 적용 방안에 대한 연구)

  • Lee, Jong-Yoon;Chun, Hae-Pyo;Jeong, Woo-Chul;Lim, Hae-Sic
    • Journal of the Korean Geotechnical Society
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    • v.24 no.10
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    • pp.5-15
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    • 2008
  • The purpose of this study is to examine the validity of recycled aggregates (RAs) as a substitute for Sand-Mat material for soft ground improvement in the housing site development. To evaluate the possibility of RAs as a substitute for sand mat material, first of all, the criteria and regulations related with the quality of lateral drain layer were collected and checked. Secondly, both of the properties of RAs were compared with the properties of natural sand for the lateral drain layer. The material properties related to coefficient of permeability, pressure at-rest state and so on satisfied most standards. On the basis of the test results, RAs were used to the construction site as lateral drain layer. Accordingly, if the quality of RAs can be managed well, the application of these RAs as lateral drain layer to replace natural sand was highly effective. Also, based on cost analysis of two materials, RAs are proved to be very competitive.

A New Two-Dimensional Model for the Drain-Induced Barrier Lowering of Fully Depleted Short-Channel SOI-MESFET's

  • Jit, S.;Pandey, Prashant;Pal, B.B.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.3 no.4
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    • pp.217-222
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    • 2003
  • A new two-dimensional analytical model for the potential distribution and drain-induced barrier lowering (DIBL) effect of fully depleted short-channel Silicon-on-insulator (SOI)-MESFET's has been presented in this paper. The two dimensional potential distribution functions in the active layer of the device is approximated as a simple parabolic function and the two-dimensional Poisson's equation has been solved with suitable boundary conditions to obtain the bottom potential at the Si/oxide layer interface. It is observed that for the SOI-MESFET's, as the gate-length is decreased below a certain limit, the bottom potential is increased and thus the channel barrier between the drain and source is reduced. The similar effect may also be observed by increasing the drain-source voltage if the device is operated in the near threshold or sub-threshold region. This is an electrostatic effect known as the drain-induced barrier lowering (DIBL) in the short-gate SOI-MESFET's. The model has been verified by comparing the results with that of the simulated one obtained by solving the 2-D Poisson's equation numerically by using the pde toolbox of the widely used software MATLAB.

Switching Characteristics of Amorphous GeSe TFT for Switching Device Application

  • Nam, Gi-Hyeon;Kim, Jang-Han;Jo, Won-Ju;Jeong, Hong-Bae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.403-404
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    • 2012
  • We fabricated TFT devices with the GeSe channel. A single device consists of a Pt source and drain, a Ti glue layer and a GeSe chalcogenide channel layer on SiO2/Si substrate which worked as the gate. We confirmed the drain current with variations of gate bias and channel size. The I-V curves of the switching device are shown in Fig. 1. The channel of the device always contains amorphous state, but can be programmed into two states with different threshold voltages (Vth). In each state, the device shows a normal Ovonic switching behavior. Below Vth (OFF state), the current is low, but once the biasing voltage is greater than Vth (ON state), the current increases dramatically and the ON-OFF ratio is high. Based on the experiments, we draw the conclusion that the gate voltage can enhance the drain current, and the electric field by the drain voltage affects the amorphous-amorphous transition. The switching device always contains the amorphous state and never exhibits the Ohmic behavior of the crystalline state.

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