• Title/Summary/Keyword: double-angle evaporation

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Fabrication of Sub-Micron Size $Al-AlO_x-Al$ Tunnel Junction using Electron-Beam Lithography and Double-Angle Shadow Evaporation Technique (전자빔 패터닝과 double-angle 그림자 증착법을 이용한 sub-micron 크기의 $Al-AlO_x-Al$ 터널접합 제작공정개발)

  • Rehmana, M.;Choi, J.W.;Ryu, S.J.;Park, J.H.;Ryu, S.W.;Khim, Z.G.;Song, W.;Chong, Y.
    • Progress in Superconductivity
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    • v.10 no.2
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    • pp.99-102
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    • 2009
  • We report our development of the fabrication process of sub-micron scale $Al-AlO_x-Al$ tunnel junction by using electron-beam lithography and double-angle shadow evaporation technique. We used double-layer resist to construct a suspended bridge structure, and double-angle electron-beam evaporation to form a sub-micron scale overlapped junction. We adopted an e-beam insensitive resist as a bottom sacrificing layer. Tunnel barrier was formed by oxidation of the bottom aluminum layer between the bottom and top electrode deposition, which was done in a separate load-lock chamber. The junction resistance is designed and controlled to be 50 $\Omega$ to match the impedance of the transmission line. The junctions will be used in the broadband shot noise thermometry experiment, which will serve as a link between the electrical unit and the thermodynamic unit.

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Condensation and evaporation heat transfer characteristics of HFC-134a in a horizontal smooth and a micro-finned tube (수평 평활관과 마이크로핀 관내에서 HFC-134a의 응축 및 증발열전달 특성)

  • Lee, Sang-Cheon;Park, Byeong-Deok;Han, Un-Hyeok;Lee, Jae-Hui
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.5
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    • pp.1725-1734
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    • 1996
  • Experimental condensation and evaporation heat transfer coefficients were measured in a horizontal smooth tube and a horizontal micro-finned tube with HFC-134a. The test sections are straight, horizontal tubes with have a 9.52mm outside diameter and about 5000mm long. The micro-finned tube had 60 fins with a height of 0.12mm and a spiral angle of 25.deg.. The condensation test section was a double-pipe type with counter flow configuration. The evaporation test section employed an electic heating method. Enhancement factors which is defined as a ratio of the heat transfer coefficient for micro-finned tube to that for smooth tube, varied from 1.3 to 1.6(mass flux:110~190kg/m$^{2}$s) for condensation and 1.2 to 1.5 (mass flux:70~160kg/m$^{2}$s) for evaporation. The experimental data of condensation and evaporation heat transfer coefficients were compared to several empirical correlations. Based on these comparisons, modified correlations of the condensation and evaporation heat transfer coefficient for both smooth and micro-finned tubes were proposed.

Oscillation of Critical Current by Gate Voltage in Cooper Pair Transistor (Cooper pair transistor에서 gate voltage에 의한 임계전류의 진동)

  • Song, W.;Chong, Y.;Kim, N.
    • Progress in Superconductivity
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    • v.11 no.2
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    • pp.158-161
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    • 2010
  • We measured the critical current of a Cooper pair transistor consisting of two Josephson junctions and a gate electrode. The Cooper pair transistors were fabricated by using electron-beam lithography and double-angle evaporation technique. The Gate voltage dependence of critical current was measured by observing voltage jumps at various gate voltages while sweeping bias current. The observed oscillation was 2e-periodic, which shows the Cooper pair transistor had low level of quasiparticle poisoning.

Realization of Primary Thermometer from Electrical Shot Noise in a Metal-Insulator-Metal Tunnel Junction (Metal-Insulator-Metal 터널접합의 산탄잡음을 이용한 일차 온도계 구현)

  • Park, J.H.;Rehman, M.;Choi, J.S.;Khim, Z.G.;Ryu, S.W.;Song, W.;Chong, Y.
    • Progress in Superconductivity
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    • v.11 no.2
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    • pp.96-99
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    • 2010
  • We measured electrical shot noise in a metal-insulator-metal tunnel junction, which was made by using electron-beam lithography and double-angle evaporation technique. Since the dependence of the shot noise on bias voltage and temperature is theoretically well known, we can determine the temperature of the junction by measuring the noise as the voltage across the junction is changed. A cryogenic low noise amplifier was used to amplify the noise signal in the frequency range of 600-800 MHz, which enabled fast measurement of noise signal and thus temperature. With further study, this method could be useful for primary thermometry in cryogenic temperatures.