• Title/Summary/Keyword: distortion inspection

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Effective Construction Method of Defect Size Distribution Using AOI Data: Application for Semiconductor and LCD Manufacturing (AOI 데이터를 이용한 효과적인 Defect Size Distribution 구축방법: 반도체와 LCD생산 응용)

  • Ha, Chung-Hun
    • IE interfaces
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    • v.21 no.2
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    • pp.151-160
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    • 2008
  • Defect size distribution is a probability density function for the defects that occur on wafers or glasses during semiconductor/LCD fabrication. It is one of the most important information to estimate manufacturing yield using well-known statistical estimation methods. The defects are detected by automatic optical inspection (AOI) facilities. However, the data that is provided from AOI is not accurate due to resolution of AOI and its defect detection mechanism. It causes distortion of defect size distribution and results in wrong estimation of the manufacturing yield. In this paper, I suggest a size conversion method and a maximum likelihood estimator to overcome the vague defect size information of AOI. The methods are verified by the Monte Carlo simulation that is constructed as similar as real situation.

Defect Detection Method using Human Visual System and MMTF (MMTF와 인간지각 특성을 이용한 결함성분 추출기법)

  • Huh, Kyung-Moo;Joo, Young-Bok
    • Journal of Institute of Control, Robotics and Systems
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    • v.19 no.12
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    • pp.1094-1098
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    • 2013
  • AVI (Automatic Vision Inspection) systems automatically detect defect features and measure their sizes via camera vision. Defect detection is not an easy process because of noises from various sources and optical distortion. In this paper the acquired images from a TFT panel are enhanced with the adoption of an HVS (Human Visual System). A human visual system is more sensitive on the defect area than the illumination components because it has greater sensitivity to variations of intensity. In this paper we modified an MTF (Modulation Transfer Function) in the Wavelet domain and utilized the characteristics of an HVS. The proposed algorithm flattens the inner illumination components while preserving the defect information intact.

Defect Inspection of TFT-LCD Panel using 3D Modeling and Periodic Comparison (3차원 모델링과 반복비교를 통한 TFT-LCD 패널의 결점 검출)

  • Lee, Kyong-Min;Chang, Moon-Soo;Park, Poo-Gyeon
    • Proceedings of the KIEE Conference
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    • 2007.10a
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    • pp.149-150
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    • 2007
  • In this paper, we propose a novel defects inspection algorithm for TFT-LCD panels. We first compensate the distorted image caused by the camera distortion and the uneven illumination environment using the least squares method and the bezier surface. We find a starting point of each pattern. The reference frame, made by subtract method using several clean patterns, is compared to each pattern to find defects. The simulation example shows that our algorithm not only inspects the defects well, but also is robust to the 1-pixel error.

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Real Time Engine Quality Inspection System by Image Processing (영상처리기법에 의한 실시간 엔진 품질검사시스템)

  • Jung, Won;Shin, Hyun-Myung
    • Journal of Korean Institute of Industrial Engineers
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    • v.24 no.3
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    • pp.397-406
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    • 1998
  • The purpose of this research is to develop an integrated quality inspection system using machine vision technology in the automotive engine assembly process. The system makes it possible for the inspected data to be entered directly from the machine vision system into the developed system without the need for intermediate operations. Such direct entry enables prompt corrective actions against process problems. An IVP-150 machine vision board is installed an the PC for image processing, and a template matching technology is implemented to precisely verify quality factors. The developed system is successfully installed in a manufacturing process, and it showed robustness to the problems of noise, distortion, and orientation.

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Aberration Extraction Algorithm for LCD Defect Detection (대면적 LCD 결함검출을 위한 수차량 추출 알고리즘)

  • Ko, Jung-Hwan;Lee, Jung-Suk;Won, Young-Jin
    • 전자공학회논문지 IE
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    • v.48 no.4
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    • pp.1-6
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    • 2011
  • In this paper we show the LCD simulator for defect inspection using image processing algorithm and neural network. The defect inspection algorithm of the LCD consists of preprocessing, feature extraction and defect classification. Preprocess removes noise from LCD image, using morphology operator and neural network is used for the defect classification. Sample images with scratch, pinhole, and spot from real LCD color filter image are used. From some experiments results, the proposed algorithms show that defect detected and classified in the ratio of 92.3% and 94.5 respectively. Accordingly, in this paper, a possibility of practical implementation of the LCD defect inspection system is finally suggested.

Automatic Focusing Vision System for Inspection of Size and Shape of Small Hole (소형(1mm이하) hole의 형태 및 크기 측정을 위한 자동초점 비젼검사기)

  • Han, Moon-Yong;Han, Hern-Soo
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.10
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    • pp.80-86
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    • 1999
  • Since the quality of the coated wires is in various applications dependant on the coating depth, accuracy of hole size of dies used for coating wires must be maintained precisely, in general within one micron. This paper proposes a new vision system which measures automatically the size and shape of small holes having diameters less than 1mm within an error limit of 1 micron. To quickly obtain the focused image, this paper proposes an estimation method of the camera position using only a couple of defocused hole images. It measures the distributions of light intensity around the image boundary and decides the direction and distance of a camera motion. The proposed system measures the size, shape distortion, inclination of the hole against the axis of the dies structure, to decides the acceptability of the dies for use. The proposed algorithm has been implemented using a cheap 640${\times}$480 image system and has shown an average size error of 1micron when measuring the dieses having 0.1mm to 1.0mm diameters. It can be applied to the inspection of the size and position of holes in PCB, too.

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A study on development of screen inspection system to detect damages, bowing, and foreign materials of nuclear fuel assembly for reactor in nuclear power plants (원전 연료집합체의 손상, 변형 및 이물질 검사시스템 개발에 관한 연구)

  • Park, Ki-Tae;Lho, Tae-Jung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.8
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    • pp.3617-3624
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    • 2013
  • Screen inspection system applied vision and laser scan technology which detect foreign materials caused fuel rod to be damaged, and which inspect fuel rod damage, bowing, distortion and grid damages, was developed to secure reliability and reproductivity of inspection method for nuclear fuel assembly during outage. In further, datum of inspection results will be continuously monitored and given understand the pattern of bowing and distorting for fuel assembly in reactor. Understanding of the pattern will be key technical information to avoid grid demage might be happened during refueling outage and provides important data base for safe operation of nuclear power plant in Korea and world wide.

The Research for the Wide-Angle Lens Distortion Correction by Photogrammetry Techniques (사진측량 기법을 사용한 광각렌즈 왜곡보정에 관한 연구)

  • Kang, Jin-A;Park, Jae-Min;Kim, Byung-Guk
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.26 no.2
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    • pp.103-110
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    • 2008
  • General lens, widely using in Photogrammetry, has narrow view, and have to adjust "Image-Registration Method" after obtain images and it need cost; economic, period of time. Recent days, there is various study that use wide-angle lens, usually for robotics field, put to practical use in photogrammetry instead of general lens. In this studies, distortion tendency of wide-angle lens and utilize the correction techniques suitable to wide-angle lens by the existing photographic survey methods. After carrying out the calibration of the wide-angle lens, we calculated the correction parameters, and then developed the method that convert the original image-point to new image-point correcting distortion. For authorization the developed algorithm, we had inspection about shape and position; there are approximately 2D RMSE of 3 pixel, cx = 2, and cy = 3 different.

Implementation of PLC-Based Multi-modem for Process Automation of Non-destructive Inspection (비파괴검사 공정자동화를 위한 전력선통신 기반 복합통신장치의 구현)

  • Jung, Jun Hwan;Jun, Ho Ik;Kim, Hyun-Sik;Kang, Seog Geun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.17 no.4
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    • pp.822-828
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    • 2013
  • In this paper, a multi-modem for process automation of non-destructive inspection (NDI) which possibly generates various kinds of data is implemented and verified. Here, a variety of data such as control signals, text data, image data generated by inspection devices, sensors, computers are transmitted to the multi-modem via serial, Ethernet, and coaxial cable. We exploit a communication network in which powerlines are used as backbone transmission media. Thus, the implemented multi-modem has various ports and corresponding interfaces for data transmission. As a result of practical experiments, the multi-modem maintains almost constant data rate with little waveform distortion. In addition, the experiments confirm that the modem operates normally under extreme variation of temperature. It is, therefore, considered that the multi-modem can contribute significantly to implement powerline communication (PLC)-based process automation for NDI in which various kinds of data are practically generated.

Usefulness estimating of Time of flight(TOF) during Carotid angio inspection including Aortic arch (Aortic arch를 포함한 Carotid angio 검사 시 Time of flight(TOF)의 유용성 평가)

  • Yoo, Yeong-Jun
    • Korean Journal of Digital Imaging in Medicine
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    • v.15 no.1
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    • pp.1-7
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    • 2013
  • Purpose : The Carotid Angio inspection including Aortic arch applied to wide area is conducted as the Contrast Enhance MR Angiography(CEA) which is using a contrast medium. However it is a burden not only for someone such as infants, pregnant women and patients suffering from kidney failure but continuous use of contrast medium also can be a burden for patients who has been taken follow up inspection since diagnose lesion already. The purpose of this study is to estimate a usefulness of the Time of Flight (TOF) by comparing with CEA. Materials and methods : 10 patients with an average age of 58 (from 45 to 75) who had MRA inspection in our hospital were studied using 3.0 Tesla Aachieva (Philips, Netherland) MRI system and Sense Neuro-Vascular 16 Channels Coil. The same patient was inspected both TOF and CEA simultaneously. The TOF inspection included from Aortic arch to Willis Circle by connecting 3 TOF stacks and so did CEA inspection. The quantitative analysis was conducted through signal to noise ratio(SNR) and contrast to noise ratio(CNR) with soft tissue by setting up an area of interest on CCA bifurcatoin, ICA, ECA, MCA and VA concerning obtained image. In case of qualitative analysis, 3 radiological technologists and 1 radiologist evaluated 4 items (1: Visibility of the blood vessel, 2: Image distortion measure, 3: Overlapping measure with vein, 4: Peripheral blood vessel description measure) into five points scale (1: Very bad, 2: Bad, 3: Normal 4: Good, 5: Very good). Results : Results for the quantitative analysis was obtained by calculating the average of 5 ROIs in case of SNR and CNR separately. Results of SNR, TOF were generally measured higher than CEA (In case of TOF were 166.1, 205.2, 154.39, 172.23, 161.95, and CEA were 92.05, 95.43, 84.76, 73.69, 88.3). But according to the result of CNR, both TOF and CEA were measured similarly as 67.62, 106.71, 55.9, 73.74, 63.46 for TOF and 67.82, 71.19, 60.52, 49.45, 64.07 for CEA. Throughout every results of each ROI, SNR showed statistically meaningful consequence (0.050.05). In case of qualitative analysis the average of each evaluated item was 4.2points and 4.28points in the item1, 2.93points and 4.55points in the item2, 4.6points and 3.13points in the item3, 2.88points and 4.6points in the item4. According to the results TOF was measured higher in the item3 while in the item2 and item4 CEA was higher and in case of the item1, both CEA and TOF were similar. To sum up statistically meaningful results (p<0.05) were shown in the item2, item3 and item4 but not in the item1 (p>0.05). Conclusions : Both TOF and CEA are complementary because each inspection has pros and cons, but when inspect wide area including Aortic arch normally CEA is conducted. But TOF inspection also can be considered as alternative in terms of patients who has difficulty in the contrast medium such as infants, pregnant women and patients suffering from kidney failure and patients during follow up.

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