• 제목/요약/키워드: dissolved ozone

검색결과 81건 처리시간 0.029초

반도체 웨이퍼의 오존 수(水) 세정을 위한 고농도 오존발생장치 특성 연구 (A Study on the Characteristics of the High Concentration Ozone Generator for the Semiconductor Wafer Cleaning with the Ozone Dissolved De-ionized Water)

  • 손영수;함상용;문세호
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권12호
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    • pp.579-585
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

오존산화를 이용한 폐광산배수 내 용존 중금속 제거에 관한 연구 (Removal of Dissolved Heavy Metals in Abandoned Mine Drainage by Ozone Oxidation System)

  • 서석호;안광호;이정규;김건중;주경훈;라영현;고광백
    • 한국물환경학회지
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    • 제26권5호
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    • pp.725-731
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    • 2010
  • This study was to evaluate the ozone oxidation of dissolved Fe, Mn, $SO{_4}^{2-}$ ions and color in abandoned mining drainage by conducting a bench-scale operation at various reaction times in an ozone reactor. The influent was collected from an abandoned mine drainage (AMD) near the J Mine in Jungsungun, Kangwon Province. The ozone reactor was operated at ozone reaction times of 10, 20 and 30 min with ozone doses of 0.0 and $2.4g\;O_3/hr$. Samples from each effluent from subsequent sand filtration were regularly collected and analyzed for pH, Fe, Mn, Al, Cr, Hg, $SO{_4}^{2-}$, alkalinity, color, ORP, TDS and EC. The effluent concentrations of Fe and Mn from the sand filter were less than 0.1 mg/L, which were below the concentrations on Korean drinking water quality standards (Fe, Mn < 0.30 mg/L). The influent $SO{_4}^{2-}$, concentrations were not noticeably changed during this ozone oxidation. Cr and Hg in the raw wastewater from the abandoned mining drainage were not detected in this study. The experimental result shows that the ozone oxidation of dissolved heavy metals and subsequent sand filtration of metal precipitates are desirable alternative for removing heavy metals in AMD.

오존/활성탄 공정을 이용한 용존 오존 및 페놀의 분해에 관한 연구 (A Study on the Decomposition of Dissolved Ozone and Phenol using Ozone/Activated Carbon Process)

  • 최재원;이학성
    • 공업화학
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    • 제23권5호
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    • pp.490-495
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    • 2012
  • 오존/활성탄 공정을 이용하여 페놀을 처리 할 경우, 활성탄에 의해 나타나는 촉매효과에 관한 연구를 수행하였다. 오존 단독공정에 활성탄을 추가할 경우, 활성탄 투입량이 증가할수록 용존 오존 및 페놀의 분해효율이 증가하는 것으로 나타났다. 이는 활성탄에 의해서 용존 오존이 분해되어 생성된 수산화 라디칼이 페놀 제거에 영향을 미쳤으며, 본 연구에서는 활성탄의 촉매효과([$\Delta$phenol] / $[{\Delta}O_{3}]_{AC}$)로 나타내었다. 활성탄 10~40 g/L 투입 시, 모든 활성탄의 최대 촉매효과 값은 $2.0\;{\pm}\;0.1$로 나타났지만, 10 g/L와 20 g/L를 투입한 경우, 40 min 경과 후 최대 촉매효과에 근접한 반면, 활성탄 30 g/L와 40 g/L를 투입한 경우, 반응 20 min 경과 후 최대 촉매효과에 도달하였다. 또한 Total Organic Carbon (TOC, 총유기탄소)의 제거율은 오존 단독공정에서 0.23으로 나타났으며, 오존/활성탄 공정에서는 0.63으로 나타났다.

DOF(Dissolved Ozone Flotation) 시스템을 이용한 하수처리장 방류수의 고도처리에 대한 연구 (Advanced Secondary Wastewater Treatment Using the DOF (Dissolved Ozone Flotation) System)

  • 이병호;김상희
    • 상하수도학회지
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    • 제19권6호
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    • pp.767-774
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    • 2005
  • The DOF (Dissolved Ozone Flotation) system was used to treat the effluent of the secondary wastewater treatment plant. The DOF system uses ozone instead of air, while DAF (Dissolved Air Flotation) uses air. Moreover, since the solubility of ozone is higher than air, the DOF system produces larger volume of micro-bubbles than the DAF system does. Thus, the DOF system performs better than the DAF system in floating ability. The DOF system could remove 70% of turbidity to an average of 0.59NTU in effluent from 2.31NTU in influent. The removal efficiency of absorbance measured with UV-254 in the effluent of the DOF system was 63%, while only 19% was removed by the DAF system. the DOF system removed 84% of the color from 25~26CU to 4CU, while DAF system removed 42% of the color to 15 CU. The CODMn removal efficiency of the DOF system was 34%, 6.8mg/l of effluent $COD_{Mn}$ concentratin, while it was 20%, 8.3mg/L of effluent $COD_{Mn}$ concentratin, to use the DAF system. Microbial bacteria such as coliform bacteria, and heterotrophic bacteria were removed over 99% by the DOF system, and 42~45% by the DAF system. That is, Microbial bacteria were almost completely destroyed by the DOF system. To sum up with, the DOF system was found to be very effective to treat effluent of the wastewater treatment plant.

초미세기포-용존오존부상(DOF)공정을 이용한 염색폐수 처리수의 재이용 (Reclamation of Effluent Textile Wastewater Using Micro/nano Bubbles-Dissolved Ozone Flotation Process)

  • 정병길;이기형;정진희;장성호;조도현;성낙창
    • 한국환경과학회지
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    • 제20권3호
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    • pp.291-299
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    • 2011
  • The main objectives of this research are to investigate characteristics of ozone solubility due to low solubility of conventional bubbles-ozone generators, evaluate the treatment characteristics of reclaiming textile wastewater for industrial water by means of micro/nano bubbles-dissolved ozone flotation(MNB-DOF) process. The textile wastewater used in this research was obtained from final effluent of the textile wastewater in B city. There is a 400L reactor which consists of a micro-nano bubble system and a ozone generator for experiments. As a result of generating micro-nano bubbles (below $0.5{\mu}m$) by using of MNB-DOF process, it improved ozone solubility due to higher ozone transfer rates. Consequently, the shorter ozonation time clearly indicates the lower power costs. The reported results clearly indicated that MNB-DOF process can be effectively and inexpensively. Results of the experiments through MNB-DOF process in this study satisfy all reclaiming standards as industrial water: pH 6.5~8.5, SS 10 mg/L or below, $BOD_5$) 6 mg/L or below, turbidity 10 NTU or below, Coliforms 1,000/100 mL or below. Therefore there is a possibility of the reclaiming of the textile wastewater as industrial water.

오존산화에 의한 정수장의 Microcystin제거 특성에 관한 연구 (A Study on the Removal Characteristics of Microcystin in the Water Treatement Plant by Ozonation)

  • 김민규;권재현;조영하;이진애;권오섭
    • 한국환경보건학회지
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    • 제29권1호
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    • pp.74-83
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    • 2003
  • Microcystin, stable compounds with circular heptapeptides, is presented inside cyanobacterial cell. So far, over 30 types have been known to exist and microcystin-LR, RR among them are the most potent toxin compound. By this reason, a strong oxidant, ozone was used in this study to remove the microcystins produced by cyanobacteria. Removal efficiency of microcystin at M water treatment plant was also evaluated. Microcystin concentration was determined by protein phosphatase inhibition assay. The results showed that dissolved microcystin in raw water detected in the range of 0.011-0.028 ㎍ Microcystin-RR equivalent/l. Above 98% of microcystin was removed through overall treatment system. Therefore, the water treatability of M treatment plant seemed to be excellent. Removal efficiency of microcystin according to unit process varied as characteristics of raw water such as DOC, UV/sub 254/ and turbidity. Removal efficiency of microcystin by ozonation was investigated in laboratory according to contact time and ozone dose. Dissolved microcystin was increased by twice fold according to ozone contact time, but increased by fifth fold according to ozone dose. So, changing of ozone dose more affected microcystin release than changing of ozone contact time. Behavior of microcystin by ozonation was similar to that of DOC, and residual ozone concentration gave influence to removal ratio of microcystin. In conclusion, single ozone treatment wasn't effective on microcystin removal in case of water containing a lot of cells. Therefore, it's more effective to use ozonation process after the removal of cyanobacterial cells in advance.

오존 접촉조 형태 및 오존발생량에 따른 용존 특성 연구 (A study of dissolved characteristics by ozone contactor type and ozone generated quantify)

  • 조국희;김영배;김학규;이시영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.239-241
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    • 2003
  • The development of industry environment honored dust matter is diversify industry part eliminate the source of pollution besides usually life in and around pollution by livestock farming pollution matter and pollution by used agricultural medicines particular eutrophic of in and around a reservoir present of occurrence accelerate. The paper is a study of dissolved characteristics by ozone contactor type and ozone generated quantity.

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Ozoflotation 공정의 정수처리 적용에 관한 연구 (A Study on the Ozoflotation Process for Drinking Water Treatment)

  • 강태희;오병수;이훈;변규식;권순범;손병용;안효원;강준원
    • 한국물환경학회지
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    • 제21권5호
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    • pp.528-534
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    • 2005
  • Ozone, a powerful oxidant, is widely used to remove microorganisms, pesticides, taste and odor compounds effectively. Dissolved air flotation (OAF) has been known as an economical process for treating algae and low turbid water quality. An ozoflotation system, combining ozone and OAF processes, has a merit which can operate the ozonation and flotation process simultaneously in a single compartment. This study investigated the application of the ozoflotation process for advanced water treatment by carrying out the pilot-plant experiment. During the test, ozone microbubbles were generated through a OAF pump and many kinds of parameters were evaluated under several conditions, such as raw water flow rate and ozone dose. As a result of the test, the optimum operating conditions of ozoflotation were decided to be 1.2 mg/L ozone dose and about 34 minute Hydraulic retention time (HRT). Finally, it could be demonstrated that the ozoflotation system can effectively improve the drinking water quality.

마이크로버블 오존 산화제와 공압파쇄 장치를 연계 적용한 지중 화학적 산화법의 정화효율 평가 (Evaluation of Remediation Efficiency of In-Situ Chemical Oxidation Technology Applying Micro Bubble Ozone Oxidizer Coupled with Pneumatic Fracturing Equipment)

  • 오승택;오참뜻;김국진;석소희;김철경;임진환;유재봉;장윤영
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제17권4호
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    • pp.44-50
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    • 2012
  • A new type of chemical oxidation technology utilizing micro bubble ozone oxidizer and a pneumatic fracturing equipment was developed to enhance field applicability of a traditional chemical oxidation technology using hydrogen peroxide as an oxidizer for in-situ soil remediation. To find an efficient way to dissolve gaseous ozone into hydrogen peroxide, ozone was injected into water as micro bubble form then dissolved ozone concentration and its duration time were measured compared to those of simple aeration of gaseous ozone. As a result, dissolved ozone concentration in water increased by 31% (1.6 ppm ${\rightarrow}$ 2.1 ppm) and elapsed time for which maximum ozone concentration decreased by half lengthened from 9 min to 33 min. When the developed pneumatic fracturing technology was applied in sandy loam, cracks were developed and grown in soil for 5~30 seconds so that the radius of influence got longer by 71% from 392 cm to 671 cm. The remediation system using the micro bubble ozone oxidizer and the pneumatic fracturing equipment for field application was made and demonstrated its remediation efficiency at petroleum contaminated site. The system showed enhanced remediation capacity than the traditional chemical oxidation technology using hydrogen peroxide with reduced remediation time by about 33%.