• Journal of the Semiconductor & Display Technology
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• v.23 no.1
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• pp.52-55
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• 2024

In this paper, a state change study was conducted through Frequency Domain Reflectometry (FDR) technology for the process chamber of plasma equipment for semiconductor manufacturing. In the experiment, by direct connecting the network analyzer to the RF matcher input of the 300 mm plasma enhanced chemical vapor deposition (PECVD) chamber, S11 was measured in a situation where plasma was not applied, and the frequency domain reacting to the chamber state change was searched. Response factors to changes in the status, such as temperature, spacing of the heating chuck, internal pressure difference, and process gas supply state were confirmed. Through this, the frequency domain in which a change in the reflection value was detected through repeated experiments. The reliability of the measured micro-displacement was verified through reproducibility experiments.

• Journal of the Korean Geotechnical Society
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• v.40 no.3
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• pp.41-54
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• 2024

Regular monitoring plays a crucial role in ensuring the safety of geotechnical structures. Currently, nondestructive methods are employed to monitor such structures to minimize the impact, e.g., sensor-based accelerometers, displacement meters, image-based lasers, and drone imaging. These technologies can observe surface changes; however, they frequently suffer difficulties in terms of identifying changes in internal properties. To monitor changes in internal properties, in situ geotechnical investigations can be employed. A nondestructive test that can be used for this purpose is the spectral analysis of surface wave (SASW) test using geophones. The SASW test is a nondestructive method; however, due to the time required for data interpretation and the difficulty in analyzing the data, it is challenging to use the SASW test for monitoring applications that require frequent observations. However, it is possible to apply the first-step analysis, which yields the dispersion curve, for monitoring rather than the complete SASW analysis, which yields the shear wave velocity. Thus, this paper presents a fundamental study on the phase difference that derives the dispersion curve to utilize the SASW test for monitoring. The reliability of each phase difference interval is examined to determine the boundary to the subjected monitor. The study used phase difference data obtained using a geophone from a single-layered, homogeneous ground site to evaluate reliable boundaries. The findings of this study are expected to improve the utility of monitoring by identifying the ideal boundary for phase difference data.

• Journal of the Korean earth science society
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• v.34 no.3
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• pp.195-208
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• 2013

We employed electrical resistivity and optical borehole imaging methods to identify underground cavities and determine ground subsidence rate at the study area affected by land subsidence due to abandoned underground mines. At the study site 1, the anomalous zones of low resistivity ranging between 100 ohm-meter and 150 ohm-meter were observed and confirmed as an abandoned underground mine by subsequent borehole drilling and optical borehole imaging. Although the electrical resistivity survey was unavailable due to the paved surface of the study site 2, we were able to locate another abandoned underground mine with the collapsed mine shaft based on the distribution of the ore veins and confirmed it with borehole drilling. In addition, we measured vertical displacements of underground features indicating underground subsidence by conducting optical borehole imaging 6 times over a period of 43 days at the study site 2. The displacement magnitude at the deep segment caused by subsidence appeared to be 3 times larger than those at the shallow segment. Similarly, the displacement duration at the deep segment was 4 times longer than those at the shallow segment. Therefore, the combination of electrical resistivity and optical borehole imaging methods can be effectively applicable to detect and monitor ground subsidence caused by underground cavities.

• The Journal of Engineering Geology
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• v.20 no.2
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• pp.191-202
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• 2010

In this study, the relationship between the settlements and the horizontal displacements according to embankment was analyzed at the marine sedimentary grounds for preparation of a site, and then the empirical equations of both the settlement and the horizontal displacement considering the embankment load and the thickness were proposed. To do this, the field and laboratory tests were performed at the improvement section where the pre-loading method was applied, and the field monitoring was performed using various sensors. Based on the results of the tests and monitoring, the ground deposits, soil characteristics and engineering properties were analyzed and the settlements and lateral movements were estimated by the Regression analysis. The ground deposits from the ground surface were composed of reclaimed soils, sedimentary soils and based rocks. The thickness of clay in the sedimentary soils layer was ranged from 3.9 m to 44.5 m. The embankment heights to improve the ground during pre-loading were constructed from 4.7 m to 7.8 m in each section. The settlements during embankment were ranged from 0.959 m to 2.217 m and the lateral movements were ranged from 0.048 m to 0.313 m. As the result of regression analysis, the equations of settlements and horizontal displacements according to embankments may be proposed as $s=0.02h^2+0.11h$ and ${\delta}=0.01e^{0.37h}$, respectively. The proposed empirical equations of the settlements and the horizontal displacements according to embankment on the marine sedimentary ground may be applied to the site where has a similar condition of study area.

• Journal of Conservation Science
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• v.37 no.6
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• pp.626-637
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• 2021

The tomb complex of the royal family from the period of the Ungjin Baekje Kingdom (475 to 538 AD) in Gongju, Korea, contains the tomb of King Muryeong and other royal tombs. After the excavation of the tomb of King Muryeong in 1971, these tombs were opened up to the public, without the establishment of systems for their safety, conservation and management. The tombs have consequently experienced rapid environmental changes and suffered various damages. In this study, specific vulnerable parts inside the tombs were selected for deviation analysis using 3D scanning, and 3D image models were constructed on this basis. Progressive displacement was identified in tomb No. 5, and basic data for future investigations was acquired from tomb No. 6 and the tomb of King Muryeong. In the deviation analysis for the southern plastered wall of tomb No. 5, the damage was not found to exceed the ranges of ±18 mm and ±2 mm. However, the lintel stone was found to be sagging by 0.32 mm on average, and the distance between the walls to have increased by 0.36 mm on average. Direct water seepage occurring in tomb No. 5 is considered to be increasing the damage within the tomb, such as the dropping and sagging of the lintel. The 3D image models constructed in this study will play an important role as baseline data for future research, and can be used to discuss a secure conservation scheme for the tombs through cross-validation with precise measurement monitoring.

• Journal of Korean Tunnelling and Underground Space Association
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• v.6 no.1
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• pp.71-83
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• 2004

The purpose of this study is to present an analysis method for the prediction of the changes m ground conditions. To this end, three dimensional convergence displacements are analyzed in several ways to estimate the trend of displacement changes. Three-dimensional arching effect is occurred around the unsupported excavation surface including tunnel face when a tunnel is excavated in a stable rock mass. If the ground condition ahead of tunnel face changes or a weak zone exists, a diagnostic trend of displacement change is observed by the 3 dimensional measurement and numerical analysis. Therefore, the change of ground condition and the existence of a weak zone ahead of tunnel face can be predicted by monitoring 3-dimensional absolute displacements during excavation, and applying the methodology (the ratio of L/C, $C/C_o$, etc.) presented in this study.

• Proceedings of the Korean Geotechical Society Conference
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• 2006.03a
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• pp.219-228
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• 2006

In urban areas, tunnelling induced ground deformations, particularly ground settlements should be considered in order to minimize the damage of adjacent structures. Therefore, an appropriate monitoring system for the tunnel construction should be setup at the planning or design stage. A number of studies on ground settlements due to tunnelling in soft ground have been carried out so far. However, most studies have focused on clay soil rather than sand soil. In particular, a few studies on behaviour of subsurface deformations in granular material have been reported. In this study, two-dimensional laboratory model test with aluminium rods regarded as continuum granular material and close range photogrammetric technique, and numerical analysis were carried out in order to identify the behaviour of subsurface deformations due to shallow tunnelling. Direction and magnitude of displacement vectors from the model test was identical to the numerical analysis. In particular, the vector direction was appeared to be toward a point below the tunnel invert level. A narrow 'chimney or tulip like' pattern of vertical displacement was confirmed by both the model test and numerical analysis. This is consistent with the field data. In addition to the qualitative comparison, the quantitative comparison of subsurface settlements according to 2D volume loss showed good agreement between the model test and numerical analysis. Therefore, close range photogrammetric technique applied in the model test may be used to validate the result from the continuum numerical analysis.

• Journal of the Korea Concrete Institute
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• v.19 no.4
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• pp.433-439
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• 2007

The main objective of the paper is to investigate the static behavior of a prestressed concrete (PSC) girder that has been spliced with precast box segments. A 20 m long full-scale spliced PSC girder is fabricated and tested to compare its static performance against a monolithic girder. The monolithic girder has the same geometric and material properties with respect to the spliced girder. This includes infernal strain, deflections, neutral axis position, and crack patterns for both girders. The test also consists of monitoring relative displacements occurring across the joints. Both the horizontal displacement (gap) and vertical displacement (sliding) are measured throughout the loading procedure. All results have been compared to those obtained from the monolithic girder. It has been demonstrated that the spliced girder offers close behavior with respect to the monolithic girder up to the crack load. Both girders exhibits ductile flexural failure rather than abrupt shear failure at joints.

• Journal of the Korean Geotechnical Society
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• v.31 no.10
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• pp.29-36
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• 2015

This paper deals with inspecting and monitoring cracks developed on a subway tunnel liner during the construction of temporary supports and excavation. The cracks have developed near a enlarged part of the tunnel. Several measurements, crack gauge, internal displacement measurement, 3-D laser scanner have been conducted to monitor the progress of cracks and effects of them on the tunnel. Local measurement, additional propagation of cracks and deformation of liner, have been conducted by crack gauge and internal displacement measurement. Global inspection has been conducted by 3-D laser scanner. From the scanned data, occurrence of global deformation of tunnel and rail has been evaluated. Because of limited sequence of construction at the ground, no apparent deformation of crack propagation has been measured. As presented in this paper, deformation of tunnel liner and effects of rail need to be investigated in view of local and global aspects.

• Journal of the Korean Society of Safety
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• v.28 no.4
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• pp.26-32
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• 2013

A digital image correlation(DIC) method is a whole-field measurement technique that acquires surface displacements and strains from images information which characterized a random speckle as intensity grey levels. Recently years, this DIC method is being developed and used increasingly in various research. In this study, we tried to apply to aluminum alloy(Al 6061-T6) using DIC method and strain gauge. DIC results demonstrated the usefulness and ability to determine a strain. The test specimen used in this study was an aluminum alloy(Al 6061-T6, thickness 1 mm). For a strain measurement, a strain gauge was attached at the center of a specimen. A specimen was lightly sprayed with a white paint and a black dot pattern was sprayed on its fully dried white surface to obtain a random speckle. The experimental apparatus used to perform the tensile test consisted of universal dynamic tester(5 kN; T.O. Co.) under displacement speed of 0.5, 1.0 and 3.0 mm/min. A Model 5100 B Scanner(V. Co.) used to obtain a strain. A CCD camera connected to a PC uses to record the images of the specimen surface. After acquisition, the images were transferred to PC where the DIC software was implemented. An acquired image was evaluated by the DIC program. DIC method for displacement and strain was suggests and it results show a good consistent remarkably. DIC results demonstrated the usefulness and ability to determine surface strain was better than by using classical measurements. The strain field measurement using a DIC is so useful that it can be applied to map strain distributions at a full area. DIC method can evaluate a strain change so it can predict a location of fracture. The findings of the investigation suggest that the DIC method is an efficient and reliable tool for full-field monitoring and detailed damage characterization of materials.