• 제목/요약/키워드: discharge pressure

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Gas-Jet-assisted Glow Discharge에서 전류, 가스 흐름 속도, 압력에 따른 영향 연구 (Current, flow rate and pressure effects in a Gas-Jet-assisted Glow Discharge source)

  • 이계호;김동수;김은희;강성식;박민춘;송혜란;김하석;김효진
    • 분석과학
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    • 제7권4호
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    • pp.483-492
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    • 1994
  • Glow Discharge를 이용한 고체 시료의 극미량 원소분석은 흡광, 방출, 형광 그리고 질량 분석 방법들이 특히 금속 시료들의 분석을 위해 많이 연구되어지고 있다. 본 연구에서는 자체 제작한 Gas-Jet-assisted Glow Discharge(GJGD)를 이용하여 각 실험변수에 따른 영향을 비교하여 보았다. 제작한 글로우 방전의 특성화 실험에 사용한 실험 변수로는 전류, 방전 가스의 흐름 속도, 압력 등이었고 시료는 황동을 사용하였다. 시료의 주원소인 구리(Cu)와 아연(Zn)의 방출선세기와 방전가스인 아르곤(Ar)의 상대적인 세기를 비교하여 보았는데, 대체적으로 전류의 증가는 튕겨나옴(Sputtering) 현상을 촉진시켜 방출선의 세기가 증가하였고 가스 흐름 속도는 플라즈마 속으로의 수송과 확산에 관여하여 증가될수록 방출선의 세기를 감소시켰다. 글로우 방전 내의 압력의 증가는 튕겨나옴 현상을 감소시킴과 더불어 시료 표면으로의 재부착을 증가시켜 방출선의 세기가 급격히 감소함을 보여 주었다.

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플라즈마 아크 방전법으로 제조된 Fe 나노분말의 미세조직에 미치는 챔버압력 영향 (Effect of Chamber Pressure on the Microstructure of Fe Nano Powders Synthesized by Plasma Arc Discharge Process)

  • 박우영;윤철수;김성덕;유지훈;오영우;최철진
    • 한국분말재료학회지
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    • 제11권4호
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    • pp.328-332
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    • 2004
  • Fe nanopowders were successfully synthesized by plasma arc discharge (PAD) process using Fe rod. The influence of chamber pressure on the microstructure was investigated by means of X-ray Diffraction (XRD), Field Emission Scanning Electron Microscope (FE-SEM), Transmission Electron Microscopy (TEM) and X-ray Photoelectron Spectroscopy (XPS). The prepared particles had nearly spherical shapes and consisted of metallic cores (a-Fe) and oxide shells (Fe$_{3}$O$_{4}$), The powder size increased with increasing chamber pressure due to the higher dissolution and ejection rate of H$_2$ and gas density in the molten metal.

유도결합형 Ar 플라즈마의 압력에 따른 전기적 특성분석 (Analysis of Electrical Property on Inductively Coupled Ar Plasma for Gas Pressure)

  • 조주웅;이영환;김광수;허인성;최용성;박대희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제53권3호
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    • pp.133-136
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    • 2004
  • Low-Pressure inductively coupled RF discharge sources have important industrial applications mainly because they can provide a high-density electrodeless plasma source with low ion energy and low power loss. In an inductive discharge, the RF power is coupled to the plasma by an electromagnetic interaction with the current flowing in a coil. In this paper, the experiments have been focussed on the electric characteristic and carried out using a single Langmuir probe. The internal electric characteristics of inductively coupled Ar RF discharge at 13.56(MHz) have been measured over a wide range of power at gas pressure ranging from 1∼70(mTorr).

AC 플라즈마 디스플레이패널의 방전개시전압에 모델과 실험의 비교에 관한 연구 (Comparision Study Between Modeling and Experiment of the Breakdown Voltage for AC Plasma Display Panel)

  • 박장식
    • 한국전기전자재료학회논문지
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    • 제13권12호
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    • pp.1039-1044
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    • 2000
  • Breakdown voltage model and expertiments are compared for discharge cells of AC plasma display panel. In the model, discharge paths are assumed to be initial electric field lines and the one-dimensional continuity equation is applied to the charged particle transport at each field line. The comparisons are performed in the wide range of gas pressure (50-600torr), Xe partial pressure over total pressure (1-6%), sustain electrode gap(100-1000$\mu\textrm{m}$), wall height(130, 300$\mu\textrm{m}$), and voltage pulse width(2-6${\mu}$s). The presented breakdown voltage model well agree with experiments in the above wide range. The increase of breakdown voltage with the decrease of the width(L) of protruding electrode is also described by the model.

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Segmental Wedge를 이용한 차압식 유량측정 방법 (Flow rate Measurement Using Segmental Wedge as a Restriction Device for Differential Pressure)

  • 윤준용;성낙원
    • 한국유체기계학회 논문집
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    • 제9권3호
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    • pp.22-28
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    • 2006
  • The discharge coefficient in segmental wedge haying ninety degrees yeller angle for the five kinds of opening ratio with differential pressure taps located at both upstream and downstream of one diameter of pipe was measured. Main purpose of this work is placed on specifying the characteristic of discharge coefficient of a segmental wedge used as a primary element of flow metering devices, and suggestion for the fixed location of pressure taps useful. Although the range of the opening ratio over this work is more expanded than previous studies. The opening ratios of segmental wedge, namely 0.3, 0.4, 0.5, 0.6 and 0.7 were investigated. The Reynolds number based on the spool inside diameter ranges from 12,000 to 380,000.

Application of Conformal Mapping in Analysis the Parallel Stripline Resonator

  • Tran, T.H.;You, S.J.;Kim, J.H.;Seong, D.J.;Jeong, J.R.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.180-180
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    • 2012
  • A microplasma system source based on microwave parallel stripline resonator (MPSR) was developed for the generation of microplasmas in a wide range of pressure from some torr to 760 torr. This source was operated at its resonance frequency that much depends upon not only its discharge gap size but also operated pressure. This paper applied a simple circuit model to analyze the effects of discharge gap size and pressure to resonance frequency and impedance of MPSR in the cases with and without plasma exist inside the discharge gap. In the process of calculating, the conformal mapping method was used to estimate the capacitance of the MPSR. The calculating results by using circuit model agree well with the simulation results that using commercial CST microwave studio software.

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점화에너지 방전특성이 희박연소한계에 미치는 영향 (Effects of Ignition Energy Discharge Characteristics on the Lean Flammability Limit)

  • 이중순;김진영;이종승;정성식;하종률
    • 한국자동차공학회논문집
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    • 제6권4호
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    • pp.47-55
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    • 1998
  • A new ignition system concept was developed to improve ignition performance, accuracy of control and the reliability of the ignition system. The new ignition system has ho호 frequency discharge characteristics with 1.5-2.0 ms discharge duration, in place of the usual solitary longer duration event. We applied the system to a commercial engine to study its influence on the maximum combustion pressure attained during the cycle, when this peak pressure occurred, imep, variation rate of the engine speed and the flammability limit of a lean mixture. In this study, we clarified that the new ignition system had a beneficial effect of the lean mixture flammability limit. Also for a given mixture strength we found that the mew ignition system gave a higher peak cylinder pressure than in the case of the conventional ignition system.

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정적연소에서 점화에너지와 당량비와 유동과의 관계 (Relations Among Discharge Energy, Equivalence Ratio and Turbulent Intensity at a Constant Volume Combustion)

  • 이중순;이태원;이상석;하종률
    • 대한기계학회논문집
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    • 제19권9호
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    • pp.2308-2315
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    • 1995
  • We studied the effects on the ignitability of mixture, the combustion duration, and the maximum combustion pressure, of various initial combustion factors such as temperature, pressure, and each equivalence ratio in order to identify the combustion characteristics of lean mixture and improve ignitability through the proper control of the ignition energy. It is concluded that there is an optimum turbulent intensity that enables the combustion to have the best ignitability and the shortest duration under each equivalent ratio, and the combustion duration is only dependent upon the distribution and magnitude of discharge energy within the limit of inflammability.

Atmospheric Pressure Plasma Ashing of Photoresist Using Pin to Plate Dielectric Barrier Discharge

  • Park, Jae-Beom;Oh, Jong-Sik;Yeom, Geun-Young
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1500-1503
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    • 2009
  • In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

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