• 제목/요약/키워드: discharge measurement method

검색결과 365건 처리시간 0.032초

탐침법에 의한 $$CF_4$ 가스 프라즈마제량의 예정과 에칭 특성 (Characteristics of Plasma Etching and Plasma Diagnostics of $$CF_4$ Gas with Electric Probe)

  • 성영권;신동렬;최복길;권광호
    • 대한전자공학회논문지
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    • 제23권6호
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    • pp.916-922
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    • 1986
  • In this paper, the measurement of RF discharge plasma parameters is studied both analytically and experimentally by the electric probe method. In the measurement using an electric probe, we measure the parameters of plasma in CF4 etching gas and discuss the relations of the results and Si wafer etching. Also, we show that the electric probe method is attractive for various applications.

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Measurement of electron density of atmospheric pressure Ar plasma jet by using Michelson interferometer

  • Lim, Jun-Sup;Hong, Young June;Choi, Eun Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.195.1-195.1
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    • 2016
  • Currently, as Plasma application is expanded to the industrial and medical industrial, low temperature plasma applications became important. Especially in medical and biology, many researchers have studied about generated radical species in atmospheric pressure low temperature plasma directly adapted to human body. Therefore, so measurement their plasma parameter is very important work and is widely studied all around world. One of the plasma parameters is electron density and it is closely relative to radical production through the plasma source. some kinds of method to measuring the electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods have very expensive cost and complex configuration to composed of experiment system. We selected Michelson interferometer system which is very cheap and simple to setting up, so we tried to measuring electron density by laser interferometer with laser beam chopping module for measurement of temporal phase difference in plasma jet. To measuring electron density at atmospheric pressure Ar plasma jet, we obtained the temporal phase shift signal of interferometer. Phase difference of interferometer can occur because of change by refractive index of electron density in plasma jet. The electron density was able to estimate with this phase difference values by using physical formula about refractive index change of external electromagnetic wave in plasma. Our guiding laser used Helium-Neon laser of the centered wavelength of 632 nm. We installed chopper module which can make a 4kHz pulse laser signal at the laser front side. In this experiment, we obtained more exact synchronized phase difference between with and without plasma jet than reported data at last year. Especially, we found the phase difference between time range of discharge current. Electron density is changed from Townsend discharge's electron bombardment, so we observed the phase difference phenomenon and calculated the temporal electron density by using phase shift. In our result, we suggest that the electron density have approximately range between 1014~ 1015 cm-3 in atmospheric pressure Ar plasma jet.

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$LiMn_{2-y}M_{y}O_{4}$ 정극 활물질의 전기화학적 특성. III. $LiMn_{2-y}M_{y}O_{4}$의 충방전 특성과 AC 임피던스의 온도 의존성 (The Electrochemical Characterization of $LiMn_{2-y}M_{y}O_{4}$ Cathode Material. III. The Effect of Temperature on the Charge-discharge Property and AC Impedance of $LiMn_{2-y}M_{y}O_{4}$)

  • 정인성;구할본;김종욱;손명모;이헌수
    • 한국전기전자재료학회논문지
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    • 제14권8호
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    • pp.663-669
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    • 2001
  • Spinel LiM $n_2$ $O_4$ and LiM $n_{1.9}$M $g_{0.1}$ $O_4$ power was synthesized with solid-state method by calcining the mixture of LiOH.$H_2O$, Mn $O_2$ and MgO at 80$0^{\circ}C$ for 36 h in an air atmosphere. To investigate the effect of temperature on he cycle performance of cathode material during cycling, charge-discharge experiments and ac impedance measurement were performed. Initial discharge capacity was gradually increased with the increase of charge-discharge temperature. Discharge capacity at high temperature was suddenly decreased during cycling. On the other hand, discharge capacity at low temperature was almost constant during cycling. It confirmed that Mn dissolution is serious at high temperature than at low temperature. LiM $n_2$ $O_4$ and LiM $n_{1.9}$M $g_{0.1}$ $O_4$ showed the best capacity and stability at room temperature.ure.ure.

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퇴원시 간호정보제공이 개심수술 환자의 지식과 일상활동에 미치는 효과 (The Effects of Nursing Information at Discharge on Level of Knowledge and Daily Activities of Open Heart Surgery Patient)

  • 김금순;하양숙;유경희
    • 한국보건간호학회지
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    • 제4권1호
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    • pp.25-35
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    • 1990
  • This study examined the evaluation of the information effects of the teaching on knowledge and daily activities of open heart surgery patients between 2 and 6 weeks after discharge. The subject was 29 patients being taught with teaching materials at discharge as experimental group, 20 patients who received no education as control group among the patients who had undergone open heart surgery in S.N.U.H. And research method was non-equivalent control group non-synchronized quasi-experimental design. As the tool of this study, 30 items of knowledge measurement scale which was extracted among the content of teaching materials to evaluate the effect of education and 28 items of which were designed to measure the daily activities of patients with myocardial infarction for the estimation of the degree of observance in daily activities were used. For data analysis, frequency, t-test, Pearson's correlation coefficient and Cronbach's $\alpha$ were used. The result were as follows; 1. Informations given through teaching materials were effective for increasing the knowledge of the patient with open heart surgery. The knowledge of patients increased to the top level (p<0.05) in 2 weeks after discharge. In control group, the knowledge level of patients did not increase after discharge. 2. The knowledge level daily activity of the experimental group was somewat higher than that of the control group, but there was no significant difference. The score .of the experimental group was 69.66 in 6 weeks after discharge much less than the top level score 112. 3. The correlation between knowledge and daily activities was not significant, suggesting the fact that the increase of knowledge did not influence the daily activities significantly. Recommendation was suggested that; 1) Further studies might be .needed with the increasing numbers of the subjects. 2) Daily activities of the patients with open heart surgery should be investigated for long term period until they recovered normal activities.

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흡입공기량 간접계측방식의 전자제어화 Motorcycle 엔진 출력 특성 (Output Characteristics Using Indirect Measurement of Air Flow in a Motorcycle Engine)

  • 정태균;채재우
    • 한국자동차공학회논문집
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    • 제13권3호
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    • pp.87-95
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    • 2005
  • Most of the motorcycle engines have used carburetors in the fuel system, because of its simple structure and reliability but the fuel economy and the emissions of those engines are bad when we compared with automobile engines .To meet with the tighten emission regulations and the higher requirements for fuel economy, the application of the carburetor on the motorcycle engines would be limited. Therefore, it is important to develope a ECU control system for motorcycle engines. Since the fuel injection system is expensive, it is necessary to decrease the cost of ECU system for motorcycle engines, but the accuracy of the ECU control system should be increased as high as possible. In this paper, we studied about the AFS characteristics of motorcycle engine controled by indirect method.

가변속 왕복동형 압축기 본체의 동적 거동 해석 (Dynamic Behavior Analysis of a Reciprocating Compressor Body with Variable Rotating Speed)

  • 김태종
    • 한국소음진동공학회논문집
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    • 제11권8호
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    • pp.374-383
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    • 2001
  • A reciprocating compressor unit with variable rotating speed driven by BLDC motor is mounted Inside hermetic chamber on an internal suspension composed of 4 roil springs and a discharge pipe. A method for predicting the dynamic behavior of compressor body is required for a reduction of transmitted vibrations. The mechanical characteristics of spring and discharge pipe stiffness properties have been obtained from experimental tests and mass moment of inertia of the compressor body iron CAD. To confirm the vibration model for the compressor body, free vibration analyses are performed with theoretical and experimental methods. results for analytical investigations on the dynamic behavior of the compressor body and the transmitted forces to the hermetic chamber through the suspension elements are Presented.

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신회유동을 갖는 압력식 분무기의 분무특성에 관한 연구 (An Experimental Study on the Spray Characteristics of the Pressure Swirl Atomizer)

  • 조대진;윤석주
    • 한국분무공학회지
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    • 제2권1호
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    • pp.46-51
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    • 1997
  • In this study, spray characteristics of the pressure swirl atomizer have teen investigated. Four atomizers with the different orifice diameter and five tangential ports with the different inlet number were fabricated. For the purpose of the measurement of the mean drop sine, Malvern particle sizer was used. And also discharge coefficient was measured and spray cone angle was measured by using shadow graphy method. As a result when the injection pressure was increased, mean drop size was decreased. And the dominant factor which influence on the spray characteristics of pressure swirl atomizer was orifice diameter.

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가변속 왕복동형 압축기 본체의 동적 거동 해석 (Dynamic Behavior Analysis of Reciprocating Compressor Frame with Variable Rotating Speed)

  • 김태종;이상민;박찬수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2001년도 춘계학술대회논문집
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    • pp.362-367
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    • 2001
  • A reciprocating compressor unit with variable rotating speed driven by BLDC motor is mounted inside hermetic chamber on an internal suspension composed of 4 coil springs and a discharge pipe. A method for predicting the dynamic behavior of compressor frame is required to reduce the transmitted vibration level. Mechanical characteristics such as mass, spring and discharge pipe stiffness properties are obtained with experimentation. To confirm the vibration model for compressor frame, free vibration analyses are performed with theoretical and experimental methods. Results for analytical and experimental investigations on dynamic behavior of the compressor frame are presented, and the agreement between measured and predicted results are satisfactory.

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高硬質재료 放電加工部의 피로파괴특성 (Fatigue fracture characteristics at a electro discharge machined surface in high strength steel)

  • 김민건;지정근;태원필
    • 대한기계학회논문집
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    • 제17권1호
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    • pp.21-26
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    • 1993
  • 본 연구에서는 방전가공면에서의 미시조직의 변화, 잔류응력의 분포등을 주된 연구대상으로 하여, 이들이 피로균열의 발생, 성장거동에 미칠 특이한 영향에 대하여 고찰하고자 한다.

Improving Breakdown Voltage Characteristics of GDAs using Trigger Voltage

  • Lee, Sei-Hyun
    • Journal of Electrical Engineering and Technology
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    • 제5권4호
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    • pp.646-652
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    • 2010
  • This paper investigates a method to improve the breakdown voltage characteristics of a gas discharge arrester (GDA) for a surge suppressor. The middle electrode is inserted between two terminal electrodes. Voltage application to the electrode synchronized and amplified by the impulse voltage decreases spark overvoltage from 45% to 57.6%. The decrease is caused by higher voltage slope, as opposed to applied impulse voltage (by 5.5 to 6.2 times). In addition, the GDA model using ATP-Draw was used to analyze the operation characteristics of GDAs. The test and simulation results agree to within 2% when the trigger source was used.