Structural, Electrical, and Optical Properties of AZO Thin Films Subjected to Rapid Thermal Annealing Temperature (급속 열처리 온도 변화에 따른 AZO 박막의 구조, 전기 및 광학적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.23 no.4
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- pp.280-286
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- 2010