• Title/Summary/Keyword: dielectric barrier

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A study of properties which the diffusion barrier Ta and IMD(Inter-Metal Dielectric) metrial SiOCH for $Cu^+$ ion diffusion (구리이온의 확산에 대한 IMD(Inter-Metal Dielectric)용 Low-k 물질인 SiOCH와 diffusion barrier Ta의 특성에 관한 연구)

  • Kim, J.W.;Song, J.H.;Choi, Y.H.;Kim, J.G.;Lee, H.Y.
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1697-1699
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    • 2004
  • In this investigation, we have studied the diffusion of the $Cu^+$ ion in the Cu/Ta/SiOCH/Si and Cu/Ta/$SiO_2$/Si MIS-C structure. The Cu ions diffusion into the Ta barrier and SiOCH was examined by shift in flatband voltage of capacitance-voltage measurement and leakage current of current-voltage measurement. These evalution indicated that $Cu^+$ ion diffusion rate in Ta/SiOCH is considerably lower then the Ta/$SiO_2$ structure. And diffusion barrier Ta(50[nm]) is useful barrier against $Cu^+$ ion diffusion up to 450$^{\circ}C$.

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Comparison to Dielectric and Electrical Characteristics of Fatty Acid Organic Thin Film for Length of Alkyl Group (알킬기의 길이에 따른 지방산계 유기초박막의 유전 및 전기적 특성 비교)

  • 강기호;이준호;김도균;권영수;장정수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.343-346
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    • 1999
  • We have investigated the dielectric and electrical characteristics of palrnitic acid(PA), stearic acid(SA) and arachidic acid(AA) Langmuir-Blodgett(LB) films because these fatty acid systems have a same hydrophilic group and a different hydrophobic one(alky1 chain lqngth). The dielectric characteristics such as the capacitance-frequency(C-F) characteristics and the dielectric dispersion and absorption characteristics of PA, SA and AA through-plane were measured. In the result, the relative dielectric constants of PA, SA and AA LB films were about 3.0-4.6, 2.7-4.1 and 2.4-3.8, respectively. The relative dielectric constants were decreased in proportion to the chain length of alkyl group. Also, the dielectric dispersion and absorption of each fatty acid LB films have arisen from the dipole polarization in the range of $10^4~10^5[Hz]. And, the conductivity of PA, SA and AA LB films obtained from I-V characteristics were about $9{\times}10^{-14}, 3{\times}10^{-l4} and 5{\times}10^{-15}[S/cm], respectively. These results have shown the insulating materials and could control the conductivity by changing the length of alkyl group. Also, we have confirmed that the barrier height of fatty acid systems were about 1.32-1.40[eV] and the dielectric constant were about 3.0-4.2. These values were almost the same ones obtained from dielectric characteristics.

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A study on non-thermal plasma reactor for generation of negative ions (음이온 발생을 위한 저온 플라즈마 반응기 개발에 관한 연구)

  • Yu, Guang-Xun;Chae, Jae-Ou;Kim, Woo-Hyung;Wei, Wei;Wang, Hui
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2344-2347
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    • 2007
  • To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

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Study on the Characteristics of Dielectric Barrier Discharging System and Usability as a Disinfectant (2계면 플라즈마 방전시스템(DBD System)의 특징 및 소독제로서 방전수의 사용가능성에 대한 연구)

  • Ryu, Seungmin;Park, Heekyung;Lee, Bongju
    • Journal of Korean Society of Water and Wastewater
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    • v.18 no.4
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    • pp.529-536
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    • 2004
  • Innovated technique to inactivate microorganisms has been developed. This technique uses plasma discharge in 2-phase (Air-Water). Dielectric Barrier (two phase) Discharging system is able to produce new oxidants for microorganisms. Products from discharging are $HNO_2$, $NO_2{^-}$, $HNO_3$, $NO_3{^-}$ and ozone but many other radicals can be generated as well. DBD water has low concentration of ozone (about 0.5mg/L), $NO_2{^-}$, $NO_3{^-}$ (about 10mg-N/L, 20mg-N/L respectively) and lots of $H^+$. These products play an important role in oxidation. Oxidation power by KI titration methods is approximately equivalent to $50mg-O_3/L$. Surprisingly stored DBD water could oxidize KI and maintain stable pH (about pH3) even after several days. Stored DBD water for 5 days has also more than 4log disinfection power to E. coli. However, DBD water cannot be used for drinking water directly due to it's toxicity. Additional process to neutralize pH and decrease toxicity must be applied.

Improvement in Catalytic NOx Reduction by Using Dielectric Barrier Discharge (유전체장벽방전을 이용한 촉매공정의 질소산화물 저감성능 향상)

  • Mok, Young Sun;Nam, Chang-Mo
    • Journal of the Korean Society of Industry Convergence
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    • v.9 no.1
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    • pp.13-19
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    • 2006
  • The ozone produced by a dielectric barrier discharge device was injected into the exhaust gas to oxidize a part of NO to $NO_2$, and then the exhaust gas containing the mixture of NO and $NO_2$ was further treated in a catalytic reactor where both NO and $NO_2$ were reduced to $N_2$ in the presence of ammonia as the reducing agent. The $NO_2$ content in the mixture of NO and $NO_2$ was changed by the amount of ozone added to the exhaust gas. The experiments were primarily concerned with the effect of reaction temperature on the catalytic $NO_x$ reduction at various $NO_2$ contents. The increase in the $NO_2$ content by the ozone injection remarkably improved the performance of the catalytic $NO_x$ reduction, especially at low temperatures.

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Photolytic Characteristics of TiO2 Treated by Atmospheric Pressure Dielectric Barrier Discharge (대기압 유전체배리어 방전으로 표면처리된 TiO2 분말의 광분해 특성)

  • Kang, Jeong A;Kim, Yoon Kee
    • Korean Journal of Materials Research
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    • v.26 no.8
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    • pp.406-411
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    • 2016
  • In order to reuse the photocatalyst and enhance the photolysis efficiency, we have used atmospheric pressure dielectric barrier discharge (APDBD) to clean and activate $TiO_2$ powder. The photocatalytic activity of the $TiO_2$ powder before and after APDBD treatment was evaluated by the degradation of methylene blue (MB) in aqueous solution. The apparent reaction rate constant of photolysis of the first sample of reused $TiO_2$ cleaned by APDBD improved to a level up to 0.32h-1 higher than the 30 % value of the initial $TiO_2$ powder. As the number of photolysis reactions and APDBD cleanings increased, the apparent rate constants gradually decreased; however, the fourth photolysis reaction still showed a value that was greater than 10% of the initial value. In addition, APDBD treatment enhanced the process by which $TiO_2$ effectively adsorbed MB at every photolysis stage.

A Study on NOx Removal Efficiency Depending on Electrode Configurations of Silent Discharges (무성방전 플라즈마 전극구조에 대한 질소산화물 제거효율 연구)

  • Hyung-Taek Kim;Young-Sik Chung;Myung-Whan Whang;Elena. A. Filimonova
    • Journal of the Korean Society of Safety
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    • v.17 no.3
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    • pp.112-117
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    • 2002
  • A comparative investigation of an experimental and a simulation of chemical kinetics for NOx removal from silent(dielectric-barrier) discharges is presented. Several types of dielectric-barrier discharges were implemented depending upon the configuration of electrodes. The simulation was based on an approximate mathematical model for plasma cleaning of waste gas. The influence of non-uniform distributions of species due to the production of primary active particles in the streamer channel was taken into account. A comparison of observed experimental to the calculated removal efficiency of NOx showed acceptable agreement.

Numerical Investigation of Scattering from a Surface Dielectric Barrier Discharge Actuator under Atmospheric Pressure

  • Kim, Yuna;Kim, Sangin;Kim, Doo-Soo;Oh, Il-Young;Yook, Jong-Gwan
    • Journal of electromagnetic engineering and science
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    • v.18 no.1
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    • pp.52-57
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    • 2018
  • Surface dielectric barrier discharge (SDBD), which is widely used to control turbulence in aerodynamics, has a significant effect on the radar cross-section (RCS). A four-way linearly synthesized SDBD air plasma actuator is designed to bolster the plasma effects on electromagnetic waves. The diffraction angle is calculated to predict the RCS because of the periodic structure of staggered electrodes. The simplified plasma modeling is utilized to calculate the inhomogeneous surface plasma distribution. Monostatic RCS shows the diffraction in the plane perpendicular to the electrode array and the notable distortion by plasma. In comparison, the overall pattern is maintained in the parallel plane with minor plasma effects. The trends also appear in the bistatic RCS, which has a significant difference in the observation plane perpendicular to the electrodes. The peaks by Bragg's diffraction are shown, and the RCS is reduced by 10 dB in a certain range by the plasma effect. The diffraction caused by the actuator and the inhomogeneous air plasma should be considered in designing an SDBD actuator for a wide range of application.

Evaluation of Acceptor Binding Energy of Nitrogen-Doped Zinc Oxide Thin Films Grown by Dielectric Barrier Discharge in Pulsed Laser Deposition

  • Lee, Deuk-Hee;Chun, Yoon-Soo;Lee, Sang-Yeol;Kim, Sang-Sig
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.5
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    • pp.200-203
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    • 2011
  • In this research, nitrogen (N)-doped zinc oxide (ZnO) thin films have been grown on a sapphire substrate by dielectric barrier discharge (DBD) in pulsed laser deposition (PLD). DBD has been used as an effective way for massive in-situ generation of N-plasma under conventional PLD process conditions. Low-temperature photoluminescence spectra of N-doped ZnO thin films provided near-band-edge emission after a thermal annealing process. The emission peak was resolved by Gaussian fitting and showed a dominant acceptor-bound excitation peak ($A^{\circ}X$) that indicated acceptor doping of ZnO with N. The acceptor binding energy of the N acceptor was estimated to be approximately 145 MeV based on the results of temperature-dependent photoluminescence (PL) measurements.

Removal of Gaseous Toluene using a Plate-type Dielectric Barrier Discharge Reactor (평판형 전극으로 구성된 유전체 배리어 방전 반응기를 이용한 톨루엔 저감 특성)

  • Park, Jae-Hong;Jo, Yoon-Shin;Yoon, Ki-Young;Byeon, Jeong-Hoon;Hwang, Jung-Ho
    • Journal of Korean Society for Atmospheric Environment
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    • v.24 no.6
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    • pp.641-648
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    • 2008
  • A plate-type dielectric barrier discharge (DBD) reactor was designed and tested for removal of gaseous toluene. The DBD reactor consisted of 9 parallel plate electrodes, four of which were grounded. An AC voltage of rectangular waveform ($5{\sim}8.5kV$, $60{\sim}1,000Hz$), was applied to the other five electrodes. The gaseous toluene passed through the DBD reactor and its concentration was measured by a real-time gas analyzer. The carbon monoxide (CO) and carbon dioxide ($CO_2$) which were produced by decomposition of toluene in the DBD reactor, were sampled and analyzed by a micro gas chromatography. The maximum toluene removal efficiency was 51.4%.