• Title/Summary/Keyword: die bonding

검색결과 138건 처리시간 0.028초

Wafer-Level Three-Dimensional Monolithic Integration for Intelligent Wireless Terminals

  • Gutmann, R.J.;Zeng, A.Y.;Devarajan, S.;Lu, J.Q.;Rose, K.
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제4권3호
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    • pp.196-203
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    • 2004
  • A three-dimensional (3D) IC technology platform is presented for high-performance, low-cost heterogeneous integration of silicon ICs. The platform uses dielectric adhesive bonding of fully-processed wafer-to-wafer aligned ICs, followed by a three-step thinning process and copper damascene patterning to form inter-wafer interconnects. Daisy-chain inter-wafer via test structures and compatibility of the process steps with 130 nm CMOS sal devices and circuits indicate the viability of the process flow. Such 3D integration with through-die vias enables high functionality in intelligent wireless terminals, as vertical integration of processor, large memory, image sensors and RF/microwave transceivers can be achieved with silicon-based ICs (Si CMOS and/or SiGe BiCMOS). Two examples of such capability are highlighted: memory-intensive Si CMOS digital processors with large L2 caches and SiGe BiCMOS pipelined A/D converters. A comparison of wafer-level 3D integration 'lith system-on-a-chip (SoC) and system-in-a-package (SiP) implementations is presented.

고속 충돌 시 발생하는 평면 충격파를 이용한 산화 나노 분말의 치밀화 및 기계적 특성 평가 (Planar Shock Wave Compaction of Oxidized Copper Nano Powders using High Speed Collision and Its Mechanical Properties)

  • 안동현;김우열;박이주;김형섭
    • 한국분말재료학회지
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    • 제21권1호
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    • pp.39-43
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    • 2014
  • Bulk nanostructured copper was fabricated by a shock compaction method using the planar shock wave generated by a single gas gun system. Nano sized powders, average diameter of 100 nm, were compacted into the capsule and target die, which were designed to eliminate the effect of undesired shock wave, and then impacted with an aluminum alloy target at 400 m/s. Microstructure and mechanical properties of the shock compact specimen were analyzed using an optical microscope (OM), scanning electron microscope (SEM), and micro indentation. Hardness results showed low values (approximately 45~80 Hv) similar or slightly higher than those of conventional coarse grained commercial purity copper. This result indicates the poor quality of bonding between particles. Images from OM and SEM also confirmed that no strong bonding was achieved between them due to the insufficient energy and surface oxygen layer of the powders.

압저항형 압력센서를 이용한 초소형 하중센서의 개발 (Development of miniature weight sensor using piezoresistive pressure sensor)

  • 김우정;조용수;강현재;최시영
    • 센서학회지
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    • 제14권4호
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    • pp.237-243
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    • 2005
  • Strain gauge type load cell is used widely as weight sensor. However, it has problems such as noise, power consumption, high cost and big size. Semiconductor type piezoresistive pressure sensor is practically used in recent for low hysteresis, good linearity, small size, light weight and strong on vibration. In this paper, we have fabricated the piezoresistive pressure sensor and packaged the miniature weight sensor. We packaged the miniature weight sensor by flip-chip bonding between die and PCB for durability, because the weight sensor is directly contacted on a physical solid distinct from air and oil pressure. We measured the characteristics of the weight sensor, which had the output of $10{\sim}80$ mV on the weight range of $0{\sim}2$ kg. In the result, we could fabricate the weight sensor with an accuracy of 3 %FSO linearity.

Wide-bandgap 전력반도체 패키징을 위한 Ag 소결 다이접합 기술 (Ag Sintering Die Attach Technology for Wide-bandgap Power Semiconductor Packaging)

  • 김민수;김동진
    • 마이크로전자및패키징학회지
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    • 제30권1호
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    • pp.1-16
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    • 2023
  • 전기차용 전력변환모듈의 성능향상 요구와 종래의 Si 전력반도체의 한계 극복을 위해 차세대 전력반도체인 wide-bandgap (WBG) 기반 전력반도체로의 전환이 가속화되고 있다. WBG 전력반도체로의 전환을 위해 전력변환모듈 패키징 소재 역시 높은 고온 내구성을 요구받고 있다. 전력변환모듈 패키징 공정 중 하나인 Ag 소결 다이접합 기술은 종래의 고온용 Pb 솔더링의 대체 기술로 주목받고 있다. 본 논문에서는 Ag 소결 다이접합 기술 관련 최신 연구동향에 대해 소개하고자 한다. 소결 다이접합 공정 조건에 따른 접합부 특성을 비교하고 Ag 소결층의 3차원 이미지 구현에 따른 다공성 Ag 소결 접합부의 물성 측정 방법론에 대해 고찰하였다. 또한 열충격 및 파워사이클 신뢰성 평가 연구동향을 분석하였다.

Wire bonding 자동 전단력 검사를 위한 wire의 3차원 위치 측정 시스템 개발 (3D Measurement System of Wire for Automatic Pull Test of Wire Bonding)

  • 고국원;김동현;이지연;이상준
    • 제어로봇시스템학회논문지
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    • 제21권12호
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    • pp.1130-1135
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    • 2015
  • The bond pull test is the most widely used technique for the evaluation and control of wire bond quality. The wire being tested is pulled upward until the wire or bond to the die or substrate breaks. The inspector test strength of wire by manually and it takes around 3 minutes to perform the test. In this paper, we develop a 3D vision system to measure 3D position of wire. It gives 3D position data of wire to move a hook into wires. The 3D measurement method to use here is a confocal imaging system. The conventional confocal imaging system is a spot scanning method which has a high resolution and good illumination efficiency. However, a conventional confocal systems has a disadvantage to perform XY axis scanning in order to achieve 3D data in given FOV (Field of View) through spot scanning. We propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array to remove XY scan. 2D imaging system can detect 2D location of wire and it can reduce time to measure 3D position of wire. In the experimental results, the proposed system can measure 3D position of wire with reasonable accuracy.

The Use of Finite Element Method to Predict the Hot Shear-Welding Process of Two Aluminum Plates

  • Shang, Li-Dong;Lee, Kyeng-Kook;Jin, In-Tai
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2008년도 추계학술대회 논문집
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    • pp.426-430
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    • 2008
  • Hot shear-welding is a process of bonding two plates together by using shearing stress in a controlled manner. This study dealt with the hot shear-welding process of two aluminum plates. These two plates were piles up in the shear-welding mold. Due to the shearing stress, these two plates were cut off longitudinally, and meantime they were welded together. During this process the control of the surplus material flow is very important, and it can be realized by designing the overlapping length and the shape of the cavity. The commercial software Deform-3D was employed to predict the effect of these two factors. The overlapping length and the shape of the cavity that presents the optimum design was then developed to get a good shear-welding process.

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HP LED의 열거동형상 분석을 위한 thermal simulation

  • 이승민;양종경;이현희;박대희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.191-191
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    • 2009
  • In this paper, we have confirmed the temperature of LED chip and McPCB with thermal simulation program which is CFDedign V10 for analysis the thermal flow of HP LED package. we have known that the heat from LED chip is transferred through heat slug to copper layer of McPCB. the temperature of LED chip shows 85.11 [$^{\circ}C$], which shows the temperature gap of 7.52 [$^{\circ}C$] against McPCB. the gap of temperature affect reliability of the wire bonding and die attachment. therefore, copper layer of heat slug on the McPCB should designed with the largest dimension.

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접착-성형 공정의 개선을 통한 중첩된 박판간의 결합 (Improvement of Form-joining Process with the Aid of Adhesive for Joining of a Sheet Metal Pair)

  • 정창균;김태정;양동열
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.121-124
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    • 2003
  • A new form-joining process with the aid of an adhesive is proposed in which an epoxy adhesive is applied to a sheet metal pair, and before it cures the pair is clinched to cause the geometric constraint in the form of a protrusion. In order to reduce the forming load and the height of protrusions, a new die and punch set with a very small clearance was devised to reduce the depth of drawing and the forming load. Taguchi method was employed to find the optimal values of design parameters. To implement each case of the orthogonal array, the finite element method was used. The experiments showed that on the tensile-shear test, the bonding strength of the new form-joining process with an epoxy adhesive is approximately the same as that of the resistance spot welding; and in comparison with the other two form-joining processes with an epoxy adhesive, the height of protrusions was reduced by more than 65 percent and the forming load by 50 percent.

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A New Technology for Strengthening Surface of Forging Die

  • Xin Lu;Zhongde Liu
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 The 8th Asian Symposium on Precision Forging ASPF
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    • pp.189-192
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    • 2003
  • The Electro-thermal Explosion Coating (EEC) technique is a new surface treatment technology emerged in recent years. It uses an electrical discharge (with very high voltage from 5 to 30 kV or more) to produce a pulse current with large density inside the material to be deposited, the metal wire undergo the heating, melting, vaporization, ionization and explosion processes in a very short time (from tens ns to several hundreds ${\mu}s$), and the melted droplets shoot at the substrate with a very high velocity (3000 - 4500 m/s), so that the coating materials can be deposited on the surface of the substrate. Coatings with nano-size grains or ultra- fine grains can be formed because of rapid solidification (cooling rate up to $10^6-10^9\;k/s$). Surface of the substrate (about $1-5{\mu}m$ in depth) can be melted rapidly and coatings with very high bonding strength can be obtained.

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Thixoforging Process에 의하여 제조한 금속복합재료 실린더라이너 부품의 기계적 특성 평가 (Mechanical Characteristics Evaluation of Metal Matrix Composites Cylinder Linear Fabricated by Thixoforging Process)

  • 허재찬;이승후;강충길
    • 한국정밀공학회지
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    • 제20권2호
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    • pp.58-65
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    • 2003
  • The conventional forming process such as squeeze casting or die casting for fabricating metal matrix composites products have a disadvantage such as non homogenous distribution of reinforcement, weak bonding between matrix and reinforcement and cost increase in parts fabrication. Thixoforming process has been accepted as a new method for fabricating the net shaped metal matrix composites with lightweight and wear resistance. In this paper, the effect of volume fraction and reinforcement sizes on mechanical properties in cylinder liner part of metal matrix composites has been investigated with processes parameters such as pressure and velocity. Moreover, the methods to obtain the thixoforged composites cylinder liner with high quality has been proposed. To evaluate the composites cylinder linear fabricated at the conditions proposed in this study, mechanical properties of fabricated composites cylinder linear were compared with those of commercial composites cylinder linear.