• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.198-201
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• 2006

In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

• Journal of Mechanical Science and Technology
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• 제16권6호
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• pp.776-784
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• 2002

We have performed experimental studies for the improvements of pneumatic brake systems of freight trains. Currently, most of the freight trains operated by the Korean National Railroad have either empty-load or diaphragm type brake systems. In this study, appropriate methods that the air pressure characteristics in both type of brake systems are in accordance with each other have been investigated. We have also performed running tests using a 30 car-train set to design optimum capacity of a quick release valve. The test results show that the quick release valve is considerably effective in shortening the release time of the diaphragm type brake system. In the case of a normal brake application, the diaphragm type brake system with the quick release valve reduces the release time to 34% of that of the system without the quick release valve. This release time is almost equivalent to that of the empty-load type brake system. Accordance of braking performance in different types of brake systems in a train set is expected to prevent wheel flats and to reduce maintenance costs.

• 한국재료학회지
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• 제21권7호
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• pp.403-409
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• 2011

Micro speakers are used to reproduce sound in small electric and information and communications devices, such as cellular phones, PMPs, and MP3 players. The acoustical properties and sound quality, which are changed due to the decreased size of the speaker, are often adjusted varying the type and thickness of the diaphragm. The most widely used diaphragm material is thin polymer. It was previously reported by the author of this paper that the resonance frequency of a micro speaker is changed by the type and thickness of a polymer diaphragm. In this paper, the frequency response near the resonance frequency of a micro speaker was studied as functions of the type and thickness of the polymer diaphragm. While $R_{max}$ and $R_{DC}$ were affected by the type and thickness, an analysis of the electrical impedance curve revealed that $R_o(= R_{max}/R_{DC})$ and ${\Delta}f$ were not changed. Thus, $Q_{TS}$ which was function of $R_o$, ${\Delta}f$, and the resonance frequency, is only related to the resonance frequency. The increase of the resonance frequency led to a proportional rise of $Q_{TS}$. The change of the frequency response near the resonance frequency was not dependent on the type or thickness of the polymer diaphragm, but was affected by the resonance frequency.

• 마이크로전자및패키징학회지
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• 제25권3호
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• pp.55-59
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• 2018

본 연구에서는 Si/$SiO_2$/Si-sub 구조의 SDB (silicon-direct-bonding) 웨어퍼 상에 형성된 다이아프램(diaphragm)에 제조된 전단응력형 압전저항 특성을 분석하였다. 다이아프램은 MEMS (Microelectromechanical System) 기술을 이용해 형성하였다. TMAH 수용액을 이용해 웨이퍼 후면을 식각하여 형성된 다이아프램 구조는 각종 센서제작에 활용할 수 있다. 본 연구에서는 다이아프램 상에 형성시킨 전단응력형 압전저항의 최적의 형상조건을 ANSYS 시뮬레이션을 통하여 찾고 실제 반도체 미세가공기술을 이용해 다이아프램 구조를 형성시키고 이에 붕소(boron)을 주입하여 형성시킨 전단응력형 압전저항의 특성을 시뮬레이션 결과와 비교 분석하였다. 압력감지 다이아프램은 정방형으로 제조되었다. 다이아프램의 모서리의 중심부에서 동일한 압력에 대한 최대 전단응력은 구조물이 정방형일 때 발생한다는 것을 실험으로 확인할 수 있었다. 따라서 압전저항은 다이아프램의 가장자리 중앙에 위치시켰다. 제조된 전단응력형 압전저항은 시뮬레이션 결과와 잘 일치하였고 $2200{\mu}m{\times}2200{\mu}m$ 크기의 다이아프램에 형성된 압전저항의 감도는 $183.7{\mu}V/kPa$로 나타났으며 0~100 kPa 범위의 압력에서 1.3%FS의 선형성을 가졌으며 감도의 대칭성 또한 우수하게 나타났다.

• 항공우주기술
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• 제13권2호
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• pp.160-166
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• 2014

액체로켓 엔진용 개폐밸브는 파일럿 공압으로 포핏을 열고 스프링 힘에 의해 닫음으로써 로켓엔진의 추진제 유량을 제어한다. 현재 개발 중인 엔진용 개폐밸브는 다이어프램 액추에이터에서 압력을 제거하면 닫히도록 설계되어 있다. 다이어프램을 설계하고 개발하기 위해 밸브가 열리고 닫히는 특성에 따라 수명을 분석할 필요가 있다. 밸브가 닫히기 시작하는 시점의 작동 유체의 압력을 결정하고, 포핏이 열리는 시점의 압력을 결정되어 힘평형이 설계되어 있다. 수명시험은 상온 유동에서 다이어프램부의 크랙에 의한 누설은 용접 부위에서 발생했다. 다이어프램 액추에이터의 작동 수명은 헬륨 파일럿 압력의 22 MPa 시험에서 61회이다.

• E2M - 전기 전자와 첨단 소재
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• 제10권10호
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• pp.1022-1028
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• 1997

In this paper we present the construction details and output characteristics of a diaphragm-type pressure sensor with Cu-Ni(53:47) thin-film strain gauges. In order to improve the sensitivity and the temperature compensation two circumferential gauges are placed near the center of the diaphragm and two radial gauges are located near the edge. For all the gauges the relative change in resistance ΔR/R with pressure is of the order 10$^{-3}$ for the maximum pressure. The output is found to be linear over the entire pressure range(0-30kfg/cm$^2$)and the output sensitivity obtained is 1.6mV/V. The maximum nonlinearity observed in output characteristics is 0.35%FS for 5V excitation and the hysteresis is less than 0.1%FS.

• 한국정밀공학회지
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• 제7권2호
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• pp.58-64
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• 1990

As the miniature load cells have small inner space and sensing elements of which are thin and very sensitive to manufacturing conditions, it is very difficult to predict the rated outputs and control them by using the compensation resistor. The very useful equation has been derived for calculation of theoretical rated outputs for diaphragm type miniature load cells when commercial diaphragm strain gages are used. Four diaphragm type miniature load cells of which capacities are from 300 N to 1, 000 N and outer diameters are 20 mm and 26.5 mm are manufactured. The differences between calculating results and actural ones are less than 5%. According to numerical analysis the decrease of rated outputs caused to main error is examined in existence of loading button.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.513-514
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• 2009

• 한국안전학회지
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• 제21권1호
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• pp.114-119
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• 2006

In this study, laminated composite umbrella type roofs structures such as stadium, exhibition, auditorium and museum are analyzed. These structures have not been dealt with so far because of the difficulty in modeling. These have been analyzed mostly by a simplified method or a grid analysis in design. In this study, better results can be obtained by using shell element. The behavior of umbrella type shell roof under self weight is analyzed for various parameters such as the influence of diaphragm, diaphragm type, ${\gamma}-angle$ type, height/chord ratio of segment, slope of roofs, number of conical segment and subtended angle.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2010년도 춘계 학술발표회
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• pp.14-25
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• 2010

The Yi Sun-Sin grand bridge is the suspension bridge which connects Myodo and Gwangyang. It is over the main navigation channel of Gwangyang Harbor. South anchorage(AN1, Myodo side) of the bridge is designed as rock anchored type. It sustains using the resistance of the underground rock's mass in Myodo. As this type of anchorage can minimize the exposure of the structure, It is economically efficient and environmentally friendly. North anchorage (AN2, Gwangyang side) is designed as the gravity type. This anchorage is 68 meters in diameter and use its own weight to support. Instead of normal rectangular diaphragm wall, the circular shape diaphragm wall is adopted to the north anchorage. It doesn't need to use internal temporary facilities, so it can significantly improve the constructability of the structure.