• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.10
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• pp.1754-1761
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• 2003

The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.55-62
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• 2003

This paper investigates the micro-cutting of cemented carbides using PCD (polycrystalline diamond) and PCBN (polycrystalline cubic boron nitride) cutting tools are performed with SEM direct observation method. The purpose of this study is to make clear the cutting mechanism of cemented carbides and the fracture of WC particles at the plastic deformation zone in orthogonal micro-cutting. And also to achieve systematic understanding, the effect of machining parameter on chip formation and machined surface was studied, including cutting speed, depth of cut and various tool rake angle. Summary of the results are shown below. (1) Three type of chip formation process have been proposed by the results of the direct observation in orthogonal micro-cutting of cemented carbide materials. (2) From the whole observation of chip formation, primary WC particles are crushed and/or fine grained in the shearing deformation zone. A part of them are observed to collide directly with a cutting edge of tool by following the micro-cutting. (3) Surface finish, surface morphology and surface integrity is good to obtain by cutting with PCD cutting tool compared with PCBN. (4) The machined surface has the best quality near the low cutting speed of 10${\mu}m$/sec with a cutting depth of 10 ${\mu}m$ using 0$^\circ$ rake angle and 3$^\circ$ flank angle in this condition, but it was found that excessively low speed, for example the extent of 1 ${\mu}m$/sec, is not good enough to select for various reason.

• Tribology and Lubricants
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• v.27 no.1
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• pp.13-18
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• 2011

The ultra-precision products which recently experienced high in demands had included the large areas of most updated technologies, for example, the semiconductor, the computer, the aerospace, the media information, the precision machining. For early 21st century, it was expected that the ultra-precision technologies would be distributed more throughout the market and required securing more nation-wise advancements. Furthermore, there seemed to be increasing in demand of the single crystal diamond tool which was capable of the ultra-precision machining for parts requiring a high degree of complicated details which were more than just simple wrapping and policing. Moreover, the highest degree of precision is currently at 50 nm for some precision parts but not in all. The machining system and technology should be at very high performed level in order to accomplish this degree of the ultra-precision.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.103.1-103.1
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• 2016

플라즈마 코팅은 진공 및 진공에서 발생된 플라즈마 대기압 플라즈마를 이용하여 기판에 코팅하는 기술을 의미하는 것으로 최근 다양한 코팅 소스 및 물질계가 개발되면서 그 응용을 넓혀가고 있다. 플라즈마 코팅은 물리증착 및 화학증착에서 주로 이용하고 있는데 플라즈마를 이용하는 대표적인 기술로 스퍼터링과 음극아크증착, 플라즈마 화학증착 등이 있다. 스퍼터링은 기존의 마그네트론 스퍼터링에 비해 이온화율이 대폭 향상된 HIPIMS(High Power Impulse Magnetron Sputtering) 기술이 개발되면서 경질피막 제조의 신기술로 자리 잡고 있고 음극아크증착의 경우는 다양한 Filtered 아크소스가 개발되면서 후막 고경도 DLC(Diamond-like Carbon) 등 기존의 방법으로 달성할 수 없었던 코팅층의 제조가 가능하게 되었다. 최근 수명 및 물성이 크게 향상된 소재들이 다양하게 개발되었는데 이들 소재는 가공이 잘 되지 않는 난삭재가 대부분이어서 기존의 가공 Tool이 한계를 드러내고 있다. 이에 따라 난삭재 가공용 새로운 Tool에 대한 수요가 크게 증가하고 있는데 이에 대응하는 유력한 방법 중의 하나가 플라즈마를 이용한 경질코팅이다. 이렇듯 플라즈마 코팅은 난삭재가공용 Tool을 비롯하여 기계나 자동차 부품의 고경도, 저마찰 코팅, 기능성 코팅 등 다양한 분야에 응용을 확대하고 있다. 본 논문에서는 플라즈마 코팅의 최신 기술개발 동향과 그 응용에 대해 고찰하고자 한다.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.5
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• pp.38-45
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• 2004

As optical communication is being substituted for telecommunication, the demand of a large variety of fiber optic components is increasing. V-groove substrates, one of the module components, are used to connect optical fibers to optical planar circuits and to arrange fibers. Their applications are multi-channel optical connectors and optical waveguide fiber coupling, etc. Because these substrates are a critical part of the splitter in a multiplexer and a multi fiber connector, precise and reliable fabrication process is required. For precisely aligning core pitch between fibers, machined core pitch tolerance should be within sub-microns. Therefore, these are generally produced by state-of-the-art micro-fabrication like MEMS. However, most of the process equipment is very expensive. It is also difficult to change the process line for custom designs to meet specific requirements using various materials. For various design specifications such as different values of the V angle and low-priced process, the fabrication method should be flexible and low cost. To achieve this goal, we have suggested a miniaturized machine tool with high accuracy positioning system. Through this study, it is shown that this cutting process can be applied to produce V-groove subtracts. We also show the possibility of using a miniaturized machining system for producing small parts.

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.770-779
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• 2004

This paper describes the micro cutting of wear resistant tungsten carbides using PCD (Poly-Crystalline Diamond) cutting tools in performance with SEM (Scanning Electron Microscope) direct observation method. Turning experiments were also carried out on this alloy (V50) using a PCD cutting tool. One of the purposes of this study is to describe clearly the cutting mechanism of tungsten carbides and the behavior of WC particles in the deformation zone in orthogonal micro cutting. Other purposes are to achieve a systematic understanding of machining characteristics and the effects of machining parameters on cutting force, machined surface and tool wear rates by the outer turning of this alloy carried out using the PCD cutting tool during these various cutting conditions. A summary of the results are as follows: (1) From the SEM direct observation in cutting the tungsten carbide, WC particles are broken and come into contact with the tool edge directly. This causes tool wear in which portions scrape the tool in a strong manner. (2) There are two chip formation types. One is where the shear angle is comparatively small and the crack of the shear plane becomes wide. The other is a type where the shear angle is above 45 degrees and the crack of the shear plane does not widen. These differences are caused by the stress condition which gives rise to the friction at the shear plane. (3) The thrust cutting forces tend to increase more rapidly than the principal forces, as the depth of cut and the cutting speed are increased preferably in the orthogonal micro cutting. (4) The tool wear on the flank face was larger than that on the rake face in the orthogonal micro cutting. (5) Three components of cutting force in the conventional turning experiments were different in balance from ordinary cutting such as the cutting of steel or cast iron. Those expressed a large value of thrust force, principal force, and feed force. (6) From the viewpoint of high efficient cutting found within this research, a proper cutting speed was 15 m/min and a proper feed rate was 0.1 mm/rev. In this case, it was found that the tool life of a PCD tool was limited to a distance of approximately 230 m. (7) When the depth of cut was 0.1 mm, there was no influence of the feed rate on the feed force. The feed force tended to decrease, as the cutting distance was long, because the tool was worn and the tool edge retreated. (8) The main tool wear of a PCD tool in this research was due to the flank wear within the maximum value of $V_{max}$ being about 260 $\mu\textrm{m}$.

• Design & Manufacturing
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• v.1 no.1
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• pp.7-11
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• 2007

The fabrication of precision optical components by deterministic CNC grinding is an area of great current interest. Replacement of the traditional, craftsman driven, optical fabrication process is essential to reduce costs and increase process flexibility and reliability. Moreover, CNC grinding is well suited to the fabrication of complex shapes such as aspheres, making it possible to design optical systems with fewer components and reduced weight. Current technology is capable of producing surfaces with less than 2 microns peak to valley error, 50 nm rms surface roughness, and less than 1 micron subsurface damage. Bound abrasive tools, in which the abrasive particles are fixed in a second (matrix) material, play an important part in achieving this performance. In this paper, the factors affecting the ultra-fine surface roughness and profile accuracy of machined surfaces of aspheric parts has been analyzed experimentally and theoretically and on ultra-precision aspheric grinding system and precise adjusting mechanism have been designed and manufactured. In the paper we report the results of experiments and modeling performed to examine the effects of machinability, occurring during grinding of optical surfaces, on the tool surface profile. Profiles of machined surface were measured by using SEM. In order to optimize grinding conditions of aspheric lens processing, we performed experiments by design of experiments.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.68-75
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• 2000

This paper presents the construction of an ultra-precision machining system and machining experiments using the developed system. The system is composed of air bearing system, granite bed, air pad, and linear feeding mechanism. The cutting conditions have great effect on the surface quality in ultra-precision machining. the ultra-precision machining is mainly processed by several ${\mu}{\textrm}{m}$ depth of cut and feed rate. For this, tools with sharper cutting edge and less tool wear are needed. To satisfy these requirement, diamond is generally used as a tool material for ultra-precision machining. In order to evaluate the cutting characteristics of the PCD and MCD tools on the aluminum alloy, the machining experiments performed using the developed system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.818-821
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• 2004

With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.2
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• pp.31-36
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• 2005

Machining technique for optical crystals with single point diamond turning tool is reported in this paper. The main factors influencing the machined surface quality are studied and regularities of machining process are drawn. Optical crystals have been known to more and more important applications in the field of modern optics. Ge is more brittle material of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimum machining conditions for ductile cutting of Ge and apply the SPDTM technique to the manufacturing of ultra precision optical components of Ge. As a result, the surface roughness is the best when cutting speed is 180m/min, feed rate is 2mm/min, depth of cut is $0.5{\mu}m$ and nose radius of tool is 0.8mm.