• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.70-73
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• 2002

Using zirconium ceramics makes the ferrule, which is the part of optical communications. The quality of optical communications is directly affected by the concentricity of the optic ferrule. The products of optic ferrule should be meet the following general conditions which are the outer diameter of 2.5mm and the inner diameter of 0.125mm, and high quality conditions which are the concentricity of 0.1~$0.3\mu\textrm{m}$, the form accuracy of $0.2\mu\textrm{m}$, the roundness and the cylindricity of $0.1\mu\textrm{m}$ and the surface roughness of 10nm. Generally, the diamond wheel is used for the high efficiency and precision grinding of the materials. It is good for keeping the shape as it has little wear. Because of the loading phenomena, however, it is difficult to keep the fresh surface of the wheel. In grinding process, grinding fragments resemble fine powders rather than chips. It can easily get attached to the wheel surface and thus cause a loading. The loading takes place, in which the impurities stick to the wheel surface, and the grinding characteristics of wheel is deteriorated. To prevent all of these, a suitable dressing method should be used for the wheel. In this research, the dressing system fur co-axial grinding machine was designed and produced for the machining of ferrule, which is a high performance part. The performance of the developed dressing system was evaluated by measuring the form accuracy of ferrule, which is machined by the dressed wheel in developed dressing system.

• 한국산학기술학회논문지
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• 제7권5호
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• pp.817-822
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• 2006

다이아몬드는 산업적으로도 보석으로서도 경제적으로 매우 유용한 소재이다. 최근의 소형 고압고온 처리기의 발달로 저급한 갈색의 보석용 천연다이아몬드를 쉽게 고부가가치의 보석인 무색 또는 팬시칼라의 다이아몬드로 향상시키는 처리기술이 가능하게 되었다. 이러한 처리 다이아몬드는 천연의 무색, 팬시칼라 다이아몬드와 물성이 동일하여 기존의 보석감정 방안으로는 구별이 어려워서, 처리 다이아몬드를 경제적이고, 신속하고, 비파괴적으로 천연다이아몬드로부터 감별해 낼 필요성이 생겼다 기존의 광학적인 확대분석으로는 천연석과 처리석의 감별이 불가능하였다. 마이크로 라만 분석기를 이용하여 다이아몬드의 고유피크가 고압고온 처리시의 잔류응력에 의해 이동되는 현상으로 처리석의 감별 가능성을 확인하였다. Type I 다이아몬드는 처리에 의해 $10^4$ 정도의 압축스트레인이, Type II는 인장 잔류 스트레인이 존재하였다. 따라서 적절한 처리전의 기준시료가 있다면 이러한 잔류응력을 확인하는 것이 가능하였다.

• 한국생산제조학회지
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• 제22권1호
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• pp.85-91
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• 2013

The machinability of wear-resistible tungsten carbides and the tool wear behavior in machining of V30 and V50 tungsten carbides using PCD (Poly Crystalline Diamond) cutting tool was investigated to understand machining characteristics. This material is one of the difficult-to-cut materials in present, but their usage has been already broadened to every commercial applications such as mining tools, and impact resistant tools etc. Summary of the results are as follows. (1) Tool wear progression of PCD tools in turning of wear-resistible tungsten carbides were observed specially fast in primary cutting distance within 10m. (2) Three components of cutting resistance in this research were different in balance from the ordinary cutting such as that cutting of steel or cast iron. Those were expressed large value by order of thrust force, principal force, feed force. (3) If presume from viewpoint of high efficient cutting within this research, a proper cutting speed was 15m/min and a proper feed rate was 0.1mm/rev. In this case, it was found that the tool life of PCD tool was cutting distance until 230m approximately. (4) In cutting of wear-resistible tungsten carbides such as V30 and V50, it was recognized that the tool wear rate of V30 was very fast as compared with V50. (5) When the depth of cut was 0.1mm, there was no influence of the feed rate on the feed force. And the feed force tended to decrease as the cutting distance was long, because the tool was worn and the tool edge retreated. (6) It was observed that the tungsten carbides were adhered to the flank.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1507-1510
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• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국전기전자재료학회논문지
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• 제30권5호
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• pp.301-306
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• 2017

Wire electrical discharge machining (WEDM) process was evaluated to slice Silicon (Si) for various applications. Specifically, various Si workpieces with various resistances, such as single and multi crystalline Si bricks and wafers were used. As conventional slicing processes, such as slurry-on or diamond-on wire slicing, are based on mechanical abrasions between Si and abrasive, there is a limitation to decrease the wafer thickness as well as kerf-loss. Especially, when the wafer thickness is less than $150{\mu}m$, wafer breakage increases dramatically during the slicing process. Single crystalline P-type Si bricks and wafers were successively sliced with considerable slicing speed regardless of its growth direction. Also, typical defects, such as microcracks, craters, microholes, and debris, were introduced when Si was sliced by electrical discharge. Also, it was found that defect type is also dependent on resistance of Si. Consequently, this study confirmed the feasibility of slicing single crystalline Si by WEDM.

• 한국정밀공학회지
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• 제30권12호
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• pp.1303-1312
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• 2013

We report an ultra-precision lathe designed to machine micron-scale features on a large-area roll mold. The lathe can machine rolls up to 600 mm in diameter and 2,500 mm in length. All axes use hydrostatic oil bearings to exploit the high-precision, stiffness, and damping characteristics. The headstock spindle and rotary tooling table are driven by frameless direct drive motors, while coreless linear motors are used for the two linear axes. Finite element method modeling reveals that the effects of structural deformation on the machining accuracy are less than $1{\mu}m$. The results of thermal testing show that the maximum temperature rise at the spindle outer surface is approximately $0.5^{\circ}C$. Finally, performance evaluations of the error motion, micro-positioning capability, and fine-pitch machining demonstrate that the lathe is capable of producing optical-quality surfaces with micron-scale patterns with feature sizes as small as $20{\mu}m$ on a large-area roll mold.

• 한국세라믹학회지
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• 제49권6호
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• pp.581-585
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• 2012

Machinability is important in engineering applications, especially in the current micro-electronics industry. Most ceramic components have complex shapes and hence require machining generally with diamond tools, which incurs a high production cost. Recently, h-BN-containing machinable ceramics have been developed, but these materials are very expensive due to the high raw materials and production costs. Therefore, the development of low-cost machinable ceramics is necessary. In this study, inexpensive $Al_2TiO_5$ was studied as a replacement for h-BN. $Al_2O_3$, $TiO_2$ and partially stabilized $ZrO_2$(PSZ) powders were mixed with various mole ratios and were sintered at $1500^{\circ}C$ for 1 h. The density, hardness and strength were then measured. The phase analysis and microstructures were observed by XRD and SEM, respectively. The machinability of each specimen was tested by micro-hole machining. The results of this research showed that the produced composites could be used as low-cost machinable ceramics.

• 한국정밀공학회지
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• 제23권8호
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• pp.171-177
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• 2006

This study was performed as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-{\mu}m$-deep indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.51 GPa and 104 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$ ) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46- 0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined are a during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 천문학회보
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• 제40권1호
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• pp.82.3-83
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• 2015

비축 반사경의 DTM (Diamond Turning Machine) 가공을 하기 전에는 시간 및 비용의 절감을 위해 CNC(Computerized Numerically Controlled Machine Tools)를 이용하여 비축면의 곡률반경과 가장 유사한 형태의 구면으로 1차 가공 후 3축 이상을 제어할 수 있는 MC (Machining Center)를 이용하여 근사한 비축면을 먼저 가공한다. 이후 DTM으로 광학계에서 요구하는 형상 정밀도 및 표면 조도를 만족하는 비축면을 완성한다. 하지만 비축면을 가공하는 경우, 일반적인 축 대칭 광학계와 달리 가공장비에 장착된 기상계측기를 사용할 수 없기 때문에 외부 장비를 이용하여 반사경 표면을 측정해야한다. 이때 측정과 가공 단계 사이에서 정렬오차가 발생하여 반사경의 형상 정밀도 향상을 위한 보상가공에 어려움이 있다. 본 연구에서는 비축면 반사경의 가공과 측정 과정 사이에 발생하는 정렬오차를 최소화 할 수 있는 DTM 가공용 지그를 설계 및 제작하였다. 또, DTM으로 가공한 반사경의 측정값과 설계값을 비교하여 알루미늄 반사경의 광학 성능을 평가하였다. 이러한 성능 평가 결과는 비축면 반사경의 형상 보상가공을 위한 모델링 방법을 고안하는데에 있어 핵심 자료가 될 것이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.818-821
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• 2004

With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.