• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1025-1028
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• 2002

In this paper, a micro-turning lathe is introduced for micro machining of aluminum rod. To give feed motion, stepwise motion[2] actuators are used instead of the conventional inchworm mechanism. These are consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The guide is V-form. The linearity and positional accuracy of the actuators is good enough far high precision motion. Since the system is more compact than the conventional system using three Piezoelectric ceramics, it is applicable for the micro-machine or MEMS unit. To fabricate the lathe, a small spindle unit with ball bearings of diameter of 10 millimeter is built-up on the top the slider. The motion is feed backed with miniaturized linear encoder attached each axis slider. The diamond tool bite is used for cutting tool. The machining is tried to make small diameter rod. The possible diameter that can be machined in this machine is presented as well as chip formation, surface roughness, and machinability.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.202-205
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• 2002

The micro-extruding die is a die for manufacturing of fine-wire by extruding process. The fine-wire made from the micro-extruding can be effectively applied to fields of semiconductor parts and medical parts etc. It is predicted that the demand of fine-wire in industry is more and more increasing. In this study $\Phi$ 50${\mu}{\textrm}{m}$ micro-drill which is coated with diamond is used for drilling of super micro-hole sues. For the machining of taper parts of entrance and exit, drill having $\Phi$ 9mm inclination angle 20$^{\circ}$ is used. This is useful for anti tool-breakage in drilling process. After micro-drilling, the polishing process by abrasive is carried out for increasing surface roughness.

• 한국공작기계학회논문집
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• 제18권1호
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• pp.76-82
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• 2009

To obtain the surface roughness with nano order, we need a ultra-precision machine, cutting condition, and materials. In this paper, the cutting condition for getting nano order smooth surface of core have been examined experimentally by the ultra-precision machine and diamond wheels. The effects of the cutting velocity, the feed rate and depth of cut on the surface roughness were studied. And also, the surface roughness was measured by the Form Talysurf series PGI 840. The champion data of developed core was surface roughness Rmax 24.6nm, figure accuracy Rmax 68.9nm.

• 반도체디스플레이기술학회지
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• 제10권3호
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• pp.35-42
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• 2011

This paper describes the characteristics of high speed grinding and the influence of wheel surface speed V and a grindability of the grinding materials. The various fine ceramics pieces was ground by metal and vitrified bonded diamond wheel. The surface roughness of fine ceramics(Zirconia($ZrO_2$), Silicon Carbide(SiC), Silicon Nitride($Si_3N_4$), Alumina($Al_2O_3$)) decreases from $0.05{\mu}m(R_{max})$ to $0.025{\mu}m(R_{max})$ when the wheel speed at grinding point increases the wheel speed. Relation between the temperature at grinding point and surface roughness was linear. Abrasive jet machining(AJM), a specialized from of shot blasting, is considered one of the most helpful micro machining methods for hard and brittle materials such as glasses and ceramics by constant pressure grinding.

• International Journal of Precision Engineering and Manufacturing-Green Technology
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• 제5권5호
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• pp.571-581
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• 2018

In the present study, monitoring of elliptical vibration cutting process by utilizing internal data in the ultrasonic elliptical vibration device without external sensors such as a dynamometer and displacement sensor is investigated. The internal data utilized here is the change of excitation frequency, i.e. resonant frequency of the device, voltages applied to the piezoelectric actuators composing the device, and electric currents flowing through the actuators. These internal data change automatically in the elliptical vibration control system in order to keep a constant elliptical vibration against the change of the cutting process. Correlativity between the process and the internal data is described by using a vibration model of ultrasonic elliptical vibration cutting and verified by several experiments, i.e. planing and mirror surface finishing of hardened die steel carried out with single crystalline diamond tools. As a result, it is proved that it is possible to estimate the elements of elliptical vibration cutting process, e.g. tool wear and machining load, which are important for stable cutting in such precision machining.

• 대한금속재료학회지
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• 제49권7호
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• pp.522-529
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• 2011

Carbon fiber reinforced plastics (CFRP), which have been developed for their high mechanical properties, are insufficient to secure machinery. This paper investigates the use of magnetic abrasive finishing methods and the characteristics of surface roughness for mirror machining of CFRP. The cylindrical surface of CFRP was ground using a diamond paste with sizes of 0.1, 0.5, 1 and 6${\mu}m$. Consequently, an effective surface roughness of 0.03${\mu}m(R_a)$ could be obtained via a paste size of 0.5${\mu}m$. The surface roughness was not improved due to epoxy abrasion between the carbon fiber and the epoxy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.233-234
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• 2013

• 한국정밀공학회지
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• 제23권6호
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• pp.7-13
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.685-686
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• 2010

• 한국정밀공학회지
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• 제21권4호
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• pp.24-31
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• 2004

The objective of this work is to suggest a mastless pattern fabrication technique using the combination of machining by Nanoindenter(equation omitted) XP and HF wet etching. Sample line patterns were machined on a borosilicate surface by constant load scratch (CLS) of the Nanoindenter(equation omitted) XP with a Berkovich diamond tip, and they were etched in HF solution to investigate chemical characteristics of the machined borosilicate surface. All morphological data of scratch traces were scanned using atomic force microscope (AFM).