• 한국전기화학회:학술대회논문집
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• 2001.04a
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• pp.17-17
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• 2001

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.1-5
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• 2019

This study has been focused on properties of surface technology for large diameter upper electrode using in high density plasma process as like semi-conductor manufacturing process. The experimental studies have been carried out to get mirror surface for upper electrode. For a formation of high surface quality upper electrode, single crystal silicon upper electrode has been mechanical and chemical machining worked. Mechanical machining work of the upper electrode is carried out with varying mesh type using diamond wheel. In case of chemical machining work, upper electrode surface roughness was observed to be strongly dependent upon the etchant. The different surface roughness characteristics were observed according to etchant. The machining result of the surface roughness and surface morphology have been analyzed by use of surface roughness tester, laser microscope and ICP-MS.

• Journal of the Korean institute of surface engineering
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• v.53 no.5
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• pp.241-248
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• 2020

The change of the deposition behavior of diamond through a pretreatment process of the base metal prior to diamond deposition using HFCVD was investigated. To improve the specific surface area of the base material, sanding was performed using sandblasting first, and chemical etching treatment was performed to further improve the uniform specific surface area. Chemical etching was performed by immersing the base material in HCl solutions with various etching time. Thereafter, seeding was performed by immersing the sanded and etched base material in a diamond seeding solution. Diamond deposition according to all pretreatment conditions was performed under the same conditions. Methane was used as the carbon source and hydrogen was used as the reaction gas. The most optimal conditions were found by analyzing the improvement of the specific surface area and uniformity, and the optimal diamond seeding solution concentration and immersion time were also obtained for the diamond particle seeding method. As a result, the sandblasted base material was immersed in 20% HCl for 60 minutes at 100 ℃ and chemically etched, and then immersed in a diamond seeding solution of 5 g/L and seeded using ultrasonic waves for 30 minutes. It was possible to obtain optimized economical diamond film growth rates.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.434-434
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• 2011

Electrochemical method have been employed in this work to modify the chemical vapour deposited nitrogen doped hydrogen amorphous diamond-like carbon (N-DLC) film to fabricate nickel and copper nano particle modified N-DLC electrodes. The electrochemical behaviour of the metal nano particle modified N-DLC electrodes have been characterized at the presence of glucose in electrolyte. Meanwhile, the N-DLC film structure and the morphology of metal nano particles on the N-DLC surface have been investigated using micro-Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. The nickel nano particle modified N-DLC electrode exhibits a high catalytic activity and low background current, while the advantage of copper modified N-DLC electrode is drawn back by copper oxidizations at anodic potentials. The results show that metal nano particle modification of N-DLC surface could be a promising method for controlling the electrochemical properties of N-DLC electrodes.

• Corrosion Science and Technology
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• v.14 no.5
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• pp.218-225
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• 2015

The electrochemical behaviors of various metals with and without diamond-like-carbon (DLC) coating in 3.5 wt% NaCl solution were investigated. The effect of hydrodynamic conditions was focused by employing a rotating disc electrode (RDE). The experimental results showed that each bare metal had a more positive corrosion potential and a higher corrosion rate due to enhanced oxygen transport at the higher rotating speed of the RDE. DLC coating caused a substantial increase in the corrosion resistance of all metals studied. However, localized corrosion was still found in the DLC-coated metal at sites where deposition defects existed. Surface morphology examination was performed after the electrochemical test to confirm the roles of hydrodynamic conditions and DLC coating.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.72-72
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• 1999

• Journal of the Korean institute of surface engineering
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• v.52 no.2
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• pp.53-57
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• 2019

Stability and activity of boron doped diamond (BDD) electrode are key factors for water treatment. In this study, BDD electrodes were prepared on various substrates such as Nb, Si, Ti, and $TiN_x/Ti$ by hot filament chemical vapor deposition (HFCVD) method. BDD/Ti film showed the delamination between BDD and Ti substrate due to the formation of TiC layer caused by diffusion of carbon. On the other hand, $BDD/TiN_x/Ti$ showed remarkably improved stability, compared to BDD/Ti. It was confirmed that $TiN_x$ intermediate layer act as barrier layer for diffusion of carbon. High potential window of 2.8 eV was maintained on the $BDD/TiN_x/Ti$ electrode and, better wastewater treatment capability and longer electrode working life than BDD/Nb, BDD/Si and BDD/Ti were obtained.

• Korean Journal of Materials Research
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• v.29 no.1
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• pp.16-22
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• 2019

Indirect oxidation using chlorine species oxidizing agents is often effective in wastewater treatment using an electrochemical oxidation process. When chlorine ions are contained in the wastewater, oxidizing agents of various chlorine species are produced during electrolysis. In a ballast water management system, it is also used to treat ballast water by electrolyzing seawater to produce a chlorine species oxidizer. However, ballast water in the brackish zone and some wastewater has a low chlorine ion concentration. Therefore, it is necessary to study the chlorine generation current efficiency at various chlorine concentration conditions. In this study, the chlorine generating current efficiency of a boron-doped diamond(BDD) electrode and insoluble electrodes are compared with various chloride ion concentrations. The results of this study show that the current efficiency of the BDD electrode is better than that of the insoluble electrodes. The chlorine generation current efficiency is better in the order of BDD, MMO(mixed metal oxide), $Ti/RuO_2$, and $Ti/IrO_2$ electrodes. In particular, when the concentration of sodium chloride is 10 g/L or less, the current efficiency of the BDD electrode is excellent.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.607-610
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• 2003

Ozonic use of sterilization and heat treatment of raw material to extend the conservation period of food recently is increased by hard vegetable or microorganism sterilization purpose of fruit. If ozone can create as is easy comparatively because do air or oxygen by raw material and schedule period passes, there is advantage that do not leave the second contaminant because being gotten restored by oxygen. Also, because the effect is big to decolorization beside disinfection effect about microorganism, deodorization, disjointing of venomousness hazardous substance, food save, Indoor air purge, good hand processing, hydrospace agricultural chemicals processing etc. the use extent is wide. This research ran parallel a sterilization experiment of E.coli colitis germs by ozone that manufacture ozonizer that use doped diamond maund electrode (BDD) by boron and searched special quality electrochemistry enemy of the ozonizer and is created. After cultivate E.coli colitis germs during 37C 1 day is LB ship, after do ozonation, was sterilized more than 90% by ozone as result that examine disinfection effect by substance microscope and could confirm excellency of diamond electrode.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.69-69
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• 2017

For several decades, industrial processes consume a huge amount of raw water for various objects that consequently results in the generation of large amounts of wastewater. There effluents are mainly treated by conventional technologies such are aerobic, anaerobic treatment and chemical coagulation. But, there processes are not suitable for eliminating all hazardous chemical compounds form wastewater and generate a large amount of toxic sludge. Therefore, other processes have been studied and applied together with these techniques to enhance purification results. These techniques include photocatalysis, absorption, advanced oxidation processes, and ozonation, but also have their own drawbacks. In recent years, electrochemical techniques have received attention as wastewater treatment process that show higher purification results and low toxic sludge. There are many kinds of electrode materials for electrochemical process, among them, boron doped diamond (BDD) attracts attention due to good chemical and electrochemical stability, long lifetime and wide potential window that necessary properties for anode electrode. So, there are many researches about high quality BDD, among them, researches are focused BDD on Si substrate. But, Si substrate is hard to apply electrode application due to the brittleness and low life time. And other substrates are also not suitable for wastewater treatment electrode due to high cost. To solve these problems, Ti has been candidate as substrate in consideration of cost and properties. But there are critical issues about adhesion that must be overcome to apply Ti as substrate. In this study, to overcome this problem, TiN interlayer is introduced between BDD and Ti substrate. TiN has higher electrical and thermal conductivity, melting point, and similar crystalline structure with diamond. The TiN interlayer was deposited by reactive DC magnetron sputtering (DCMS) with thickness of 50 nm, $1{\mu}m$. The microstructure of BDD films with TiN interlayer were estimated by FE-SEM and XRD. There are no significant differences in surface grain size despite of various interlayer. In wastewater treatment results, the BDD electrode with TiN (50nm) showed the highest electrolysis speed at livestock wastewater treatment experiments. It is thought to be that TiN with thickness of 50 nm successfully suppressed formation of TiC that harmful to adhesion. And TiN with thickness of $1{\mu}m$ cannot suppress TiC formation.