• 제목/요약/키워드: diamond

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Hot-filament법에 의한 Diamond 박막증착 (Deposition of Diamond Thin Film Prepared by Hot-filament Chemical Vapor Deposition)

  • 윤석근;한상목;소명기
    • 한국세라믹학회지
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    • 제28권10호
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    • pp.777-784
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    • 1991
  • Diamond films have been growth by the hot-filament chemical vapor deposition (HFCVD) using CH4 and H2 gaseous mixture on the Si substrate. The experimental results indicated that the deposits were pure diamond and contained no amount of non-diamond phases such as amorphous carbon or graphite. The diamond films were deposited well at the conditions: the filament temperature of 210$0^{\circ}C$, the substrate temperature of 77$0^{\circ}C$, the CH4 concentration of 1.76%, the reactor pressure of 30 torr, and the deposition time of 7 hr. At this growth condition, the maximum deposition rate was 2 ${\mu}{\textrm}{m}$/hr. X-ray diffraction patterns and texture coefficient results showed that preferred orientation of the diamond films was {111} orientation under all experimental conditions.

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전해복합에 의한 미세절삭가공 특성연구 (A Study on the Characteristics of Compounding Electrolytic Machining in micro-cutting)

  • 손민기;손성민;안중환
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집C
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    • pp.502-506
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    • 2001
  • This paper presents a new method for cutting steel with a diamond tool using electrolysis. The electrolysis is adopted in the diamond cutting to prevent the high chemical activity between a diamond tool and an iron-based workpiece. The basic principle of the method is to oxdize a thin substrate of the workpiece by electrolysis ahead of the diamond tool which cuts the oxidized layer. A desired shape can be obtained by repeating this process. The cutting force is reduced because the diamond tool removes only the weakened material by electroysis. The reduction of the cutting force suppresses the excessive wear of the diamond tool. The oxidization penetrates several micrometers in depth along the previously formed shape. The corrosion rates depend on current density and make suggestions on the optimum cutting conditions.

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고주파-마이크로파 2단계 공정에 의한 다이아몬드 막의 성장 (Growth of diamond films by RF-MW two step process)

  • 박상현;우복만;박재윤;이상희;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1533-1536
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    • 2001
  • To grow the diamond films by using RF-MW two step process, at first, diamond seeds were deposited on silicon substrate by RF plasma CVD, and then a diamond layer grown by MW plasma CVD on the seeds. The grain-size of diamond films deposited by using RF-MW two step process was smaller and denser and also, crystallity of diamond film was better than those of the MW plasma CVD process. The deposited diamond films were analyzed by SEM(scanning electron microscophy), XRD (x-ray diffraction), and Raman spectroscopy.

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MWPECVD법에 의한 Diamond박막 성장에 있어서 방전전력과 압력의 영향 (Effect of discharge power and pressure in deposition of diamond thin films by MWPECVD)

  • 노세열;최종규;박상현;박재윤;고희석
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1992년도 추계학술대회 논문집
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    • pp.132-135
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    • 1992
  • Diamond thin films by MWPECVD in methane-hydrogen mixed gas were studied, with emphasis on the investigation of the effect of discharge power and pressure. As a result, the growth rate of diamond thin films was affected by discharge power and the surface morphology of diamond thin films was affected by pressure. The growth rate of diamond films was about 1.65 ${\mu}m$/hr under the condition of MW power: 900W, pressure: 60torr, $H_2$ flow rate: 60sccm, $CH_4$ concentration: 1 % and deposition time: 5hr. The deposited diamond films were identified by SEM, XRD and Raman spectrophotometer.

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붕소가 도핑된 다이아몬드전극을 이용한 오존발생기의 전기화학적 특성 (Eletrochemical Characteristics of Ozone Generator using Boron-doped Diamond Electrode)

  • 오원균;김규식;;;박수길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.585-588
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    • 2001
  • Thin. Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped conducting diamond films were used as anode for generating ozone gas by electrolysis of acidic solution. In this work, we have studied ozone generating system using Boron-doped Diamond electrode. Electrochemical cell and ozone generating system were designed for decreasing the temperature of the system. which was elevated during the reaction. by circulation of electrolyte in the system. In order to determine the ozone generation properties of diamond electrode. experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

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Patterned free-standing diamond field emitters for iarge area field emission display applications

  • Kim, Sung-Hoon
    • Journal of Korean Vacuum Science & Technology
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    • 제3권1호
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    • pp.10-15
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    • 1999
  • Using micro-wells on the Mo substrate, we could obtain various tubular-volcano-types of free-standing diamond field emitters by depositing a diamond film detaching the film and turning the film upside down. The field emission characteristics of these structures were investigated as a function of size, shape and the number density of the tubular-volcano-type diamond field emitters. The field emission characteristics, especially the current density, were greatly enhanced with increasing the number density of the tubular-volcano-type diamond field emitters on the Mo substrate. Based on these results, we suggest that the reduction of the well size can give better field emission characteristics by the increase in the number density of the tubular-volcano-type diamond field emitters. Finally, we suggest the feasibility of fabricating a large-area field emission display using our patterned tubular-volcano-type free-standing diamond field emitters.

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Study on Improvement of Diamond Deposition on Al2O3 Ceramic Substrates by a DC Arc Plasmatron

  • Kang, In-Je;Joa, Sang-Beom;Chun, Se-Min;Lee, Heon-Ju
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.457-457
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    • 2012
  • We presented plasma processing using a DC Arc Plasmatron for diamond deposition on Al2O3 ceramic substrates. Plasma surface treatments were conducted to improve deposition condition before processing for diamond deposition. The Al2O3 ceramic substrates deposited, $5{\times}15mm^2$, were investigated by Scanning Electron Microscopy (SEM), Fourier Transform Infrared Spectroscopy (FTIR) and X-ray Diffraction (XRD). Properties of diamond (111), (220) and (311) peaks were shown in XRD. We identified nanocrystalline diamond films on substrates. The results showed that deposition rate was approximately $2.2{\mu}m/h$ after plasma surface treatments. Comparing the above result with a common processing, deposition rate was improved. Also, the surface condition was improved more than a common processing for diamond deposition on Al2O3 ceramic substrates.

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Cemented Carbide기판의 레이저 표면 개질이 다이아몬드 박막의 접합력에 미치는 영향 (Effect of Laser Surface Modification of Cemented Carbide Substrates on the Adhesion of Diamond Films)

  • 이동구
    • 열처리공학회지
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    • 제13권3호
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    • pp.170-176
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    • 2000
  • A novel method for improving the adhesion of diamond films on cemented carbide tool inserts has been investigated. This method is based on the formation of a compositionally graded interface by developing a microrough surface structure using a pulsed laser process. Residual stresses of diamond films deposited on laser modified cemented carbides were measured as a function of substrate roughness using micro-Raman spectroscopy. The surface morphology and roughness of diamond films and cemented carbides were also investigated at different laser modification conditions. It was found that the increasing interface roughness reduced the average residual stress of diamond films, resulting in improved adhesion of diamond films on cemented carbides.

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Effect of Filler Metal Powder on Microstructure and Polishing Characteristics of the Brazing Diamond

  • Kim, Hoon-Dong;An, Jung-Soo
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1138-1139
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    • 2006
  • The present study has shown that the effect of boron and phosphorus in Ni-Cr-Si-X alloy to interfacial reactions and bonding strength of diamond-steel substrate, and the influence of various construction parameters on the formation of the topography of the tool. And these factors are required to making a good brazed tool. The microstructures and phase change of the brazed region were analyzed into SEM, EDS. According to the electron probe microanalysis, while brazing, the chromium present in the brazing alloy segregated preferentially to the surface of the diamond to form a chromium rich reaction product, which was readily wetted by the alloy.

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원형 다이아몬드 톱의 세그먼트 표면에서의 다이아몬드 입자 분포의 확률적인 해석 (Stochastic Analysis of the Diamond Particle Distribution on the Surface of Circular Diamond Saw Blade)

  • 이현우;변서봉;정기정;김용석
    • 한국분말재료학회지
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    • 제10권3호
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    • pp.201-208
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    • 2003
  • Distributions of diamond particles protruding on the surface of worn diamond segments in circular saw has been investigated. Scanning electron microscope was used to examine the worn ,surface and radial saw blade wear and grinding ratio was measured. The number of protruded diamond particle was approximately 50% of the total number of particles, and that was independent of diamond particle concentration and table speed. It was also noted that the inter-particle distance did not follow a symmetric function like Gaussian distribution function, instead it fitted well with a probability density function based on gamma function. The distribution of inter-particle spacing, therefore, was analyzed using a gamma function model.