• Title/Summary/Keyword: deposition parameter

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Effect of Deposition Parameters on the Properties of Pyrolytic Carbon Deposited by Fluidized-Bed Chemical Vapor Deposition (유동층 화학증착법을 이용하여 증착한 열분해 탄소의 특성에 미치는 증착조건의 영향)

  • Park, Jeong-Nam;Kim, Weon-Ju;Park, Jong-Hoon;Cho, Moon-Sung;Lee, Chae-Hyun;Park, Ji-Yeon
    • Korean Journal of Materials Research
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    • v.18 no.8
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    • pp.406-410
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    • 2008
  • The properties of pyrolytic carbon (PyC) deposited from $C_2H_2$ and a mixture of $C_2H_2/C_3H_6$ on $ZrO_2$ particles in a fluidized bed reactor were studied by adjusting the deposition temperature, reactant concentration, and the total gas flow rate. The effect of the deposition parameters on the properties of PyC was investigated by analyzing the microstructure and density change. The density could be varied from $1.0\;g/cm^3$ to $2.2\;g/cm^3$ by controlling the deposition parameters. The density decreased and the deposition rate increased as the deposition temperature and reactant concentration increased. The PyC density was largely dependent on the deposition rate irrespective of the type of the reactant gas used.

Atomic Layer Deposition of TiO2 using Titanium Isopropoxide and H2O: Operational Principle of Equipment and Parameter Setting

  • Cho, Karam;Park, Jung-Dong;Shin, Changhwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.3
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    • pp.346-351
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    • 2016
  • Titanium dioxide ($TiO_2$) films are deposited by atomic layer deposition (ALD) using titanium isopropoxide (TTIP) and $H_2O$ as precursors. The operating instructions for the ALD equipment are described in detail, along with the settings for relevant parameters. The thickness of the $TiO_2$ film is measured, and thereby, the deposition rate is quantitatively estimated to verify the linearity of the deposition rate.

A Study on Characteristics of Borophosphosilicate Gloss deposited by At.ospheri, Pressure Chemical Vapor Deposition (APCVD에 의란 BPSG 막질특성에 관란 연구)

  • Kim, Eui-Song;Lee, Chul-Jin;Rhieu, Ji-Hyo;Song, Sung-Hae
    • Proceedings of the KIEE Conference
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    • 1987.07a
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    • pp.561-564
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    • 1987
  • The deposition and reflow properties or BPSG film deposited by APCVD was characterized by variation of each process parameter. As deposition temperature is increased higher, deposition rate is decreased. Maximum deposition rate of BPSG film is obtained in higher 02/Hyride ratio than CVD Oxide or PSG. BPSG film shows stable dielectric properties and we obtained good planarization effect at lower reflow temperature in case of BPSG film than PSG film.

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Numerical Study on the Thermophoretic Deposition Characteristics of Soot Particles for Wall Temperature of Burner and Surrounding Air Temperature in Combustion Duct (버너의 벽면온도와 연소실내 주위공기온도에 따른 매연입자의 열영동 부착 특성에 관한 수치적 연구)

  • Choi, Jae-Hyuk;Han, Won-Hui;Yoon, Doo-Ho;Yoon, Seok-Hun;Chung, Suk-Ho
    • Journal of Advanced Marine Engineering and Technology
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    • v.32 no.1
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    • pp.57-65
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    • 2008
  • The characteristics of soot deposition on the cold wall in laminar diffusion flames have been numerically analyzed with a two-dimension with the FDS (Fire Dynamics Simulator). In particular, the effects of surrounding air temperature and wall temperature have been discussed. The fuel for the flame is an ethylene ($C_2H_4$). The surrounding oxygen concentration is 35%. Surrounding air temperatures are 300K, 600K, 900K and 1200K. Wall temperatures are 300K, 600K and 1200K. The soot deposition length defined as the relative approach distance to the wall per a given axial distance is newly introduced as a parameter to evaluate the soot deposition tendency on the wall. The result shows that soot deposition length is increased with increasing the surrounding air temperatures and with decreasing the wall temperature. And the numerical results led to the conclusion that it is essential to consider the thermophoretic effect for understanding the soot deposition on the cold wall properly.

A Preliminary Study on the Lamination Characteristics of Inconel 718 Superalloy on S45C Structural Steel using LENS Process (LENS 공정을 이용한 Inconel 718 초합금의 S45C 구조용강 위 적층 특성 고찰에 관한 기초 연구)

  • Kim, Hyun-Sik;Lee, Hyub;Ahn, Dong-Gyu
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.1
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    • pp.16-24
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    • 2021
  • A laser-engineered net shaping (LENS) process is a representative directed energy deposition process. Deposition characteristics of the LENS process are greatly dependent on the process parameters. The present paper preliminarily investigates deposition characteristics of Inconel 718 superalloy on S45C structural steel using a LENS process. The influence of process parameters, including the laser power and powder feed rate, on the characteristics of the bead formation and the dilution in the vicinity of the deposited region is examined through repeated experiments. A processing map and feasible deposition conditions are estimated from viewpoints of the aspect ratio, defect formation, and the dilution rate of the deposited bead. Finally, an appropriate deposition condition considering side angle, deposition ratio, and buy-to-fly (BTF) is predicted.

Influence of Deposition Temperature on the Film Growth Behavior and Mechanical Properties of Chromium Aluminum Nitride Coatings Prepared by Cathodic Arc Evaporation Technique

  • Heo, Sungbo;Kim, Wang Ryeol
    • Journal of Surface Science and Engineering
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    • v.54 no.3
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    • pp.139-143
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    • 2021
  • Cr-Al-N coatings were deposited onto WC-Co substrates using a cathodic arc evaporation (CAE) system. CAE technique is recognized to be a very useful process for hard coatings because it has many advantages such as high packing density and good adhesion to metallic substrates. In this study, the influence of deposition temperature as a key process parameter on film growth behavior and mechanical properties of Cr-Al-N coatings were systematically investigated and correlated with microstructural changes. From various analyses, the Cr-Al-N coatings prepared at deposition temperature of 450℃ in the CAE process showed excellent mechanical properties with higher deposition rate. The Cr-Al-N coatings with deposition temperature around 450℃ exhibited the highest hardness of about 35 GPa and elastic modulus of 442 GPa. The resistance to elastic strain to failure (H/E ratio) and the index of plastic deformation (H3/E2 ratio) were also good values of 0.079 and 0.221 GPa, respectively, at the deposition temperature of 450℃. Based on the XRD, SEM and TEM analyses, the Cr-Al-N coatings exhibited a dense columnar structure with f.c.c. (Cr,Al)N multi-oriented phases in which crystallites showed irregular shapes (50~100nm in size) with many edge dislocations and lattice mismatches.

Intragastrically Applicated CCl4-Thiopental Sodium Enhanced Lipid Peroxidation and Liver Fibrosis (Cirrhosis) in Rat: Malonedialdehyde as a Parameter of Lipid Peroxidation Correlated with Hydroxyproline as a Parameter of Collagen Synthesis (Deposition)

  • Kim, Ki-Young;Cho, Syung-Eun;Yu, Byung-Soo
    • Toxicological Research
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    • v.25 no.2
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    • pp.71-78
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    • 2009
  • We investigated the pathogenesis of liver tissue damage during the lipid peroxidation and fibrogenesis with the observation of correlations between the parameters of collagen synthesis (and deposition) and lipid peroxidation in liver fibrosis (cirrhosis) rats. Rats were randomly divided into two groups, normal and $CCl_4$-thiopental sod. intoxicated group. And the one group was treated intragastrically with the mixture of $CCl_4$-thiopental sod. 3 times per week for 3 weeks. The liver tissue and sera were used for the measurement of hydroxyproline (HYP), malonedialdehyde (MDA) and superoxide dismutase (SOD). Biochemical parameters such as aspartate transaminase (AST), alanine transaminase (ALT), alkaline phosphatase (ALP), total-bilirubin and blood urea nitrogen (BUN) were measured. Additionally, the expression of collagen ${\alpha}1$(III) and $\beta$-actin mRNA was observed by RTPCR. The histological change in liver tissue was also observed by Masson's trichrome and H&E staining. Correlation analysis was carried by Spearman's rho method. All biochemical parameters except total-bilirubin were significantly higher in the $CCl_4$-thiopental sod. treated group than that of the normal group (p < 0.01). In the $CCl_4$-thiopental sod. treated group, Hyp as a parameter of collagen synthesis (deposition) and MDA as a metabolite of lipid peroxidation, were significantly elevated by 1.98 and 2.11 times higher than that of the normal group (p < 0.001) respectively. The activity of SOD in the $CCl_4$-thiopental sod. treated group is decreased significantly by 44.8% (p < 0.001). And collagen ${\alpha}1$(III) mRNA was more expressed in the $CCl_4$-thiopental sod. treated group than that of the normal group. However, the expression of $\beta$-actin mRNA is showed similar in both of groups. A good correlation was observed between the content of hyp and MDA concentration (r = 0.70, n = 40) in the two groups. And the correlation between the levels of hyp and SOD (r = -0.71, n = 25) is also reliable. However, no correlation were observed between MDA concentration and SOD (r = -0.40, n = 25) in the two groups. Elevated levels of MDA in $CCl_4$-thiopental sod. treated rats indicated enhancement of lipid peroxidation, which is accompanied by a decrease in SOD activity. Moreover, we could confirm that the parameters of collagen synthesis (and deposition) is in good correlation with the metabolite of lipid peroxidation (MDA) and the lipid peroxidation antagonizing enzyme (SOD). Hence, we propose that (1) lipid peroxidation and collagen synthesis (and deposition) could be enhanced by intragastrically application of $CCl_4$-thiopental sod. during a short terms. And (2) the intoxication of $CCl_4$-thiopental sod. could be used for monitoring of lipid peroxidation and collagen synthesis (and deposition) for test of antioxidant and antifibrotic agent.

Structural Characteristisrics and Adhesion of Chemicaly Vapor Deposited TiN Films on Stainless Steels (화학증착된 TiN 박막의 구조적 특성 및 결합력에 관한 연구)

  • 이민섭;이성래;백영현
    • Journal of Surface Science and Engineering
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    • v.22 no.1
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    • pp.17-25
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    • 1989
  • The structural Charactesties and adhesion of chemically vapor deposited TiN film on stain less steels have been investated as functions of deposition temperature, surface roughness of sub state, and types of substrates. The grain zine and the lattice parameter of TiN film decreased with decreasing roughness of substates. The(200) preferred orientation was developed dominatly and the lattlice parameter decreased as temperature intereased reardless of the surdless roughnessand type of the substrates used. The surface morphology of TiN film changed from bushed crystal to a plate and then to pyamidal dense crystals with an increase in the deposition temperature. The adhesion of TiN films increased with coating thinkness and decreased with surface roughness in general. The calculations using a Bejamin & Weaver's model have been compard. Maximum valuse of adhesion energy calculated using Laguier's model were W304=331Jm-2,w410=113Jm-2,andW430=107jm-2

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Parameter Estimation for Debris Flow Deposition Model Using Artificial Neural Networks (인공 신경망을 이용한 토석류 퇴적 모델 파라미터 추정)

  • Heo, Gyeongyong;Park, Choong-Shik;Lee, Chang-Woo;Youn, Ho-Joong
    • Proceedings of the Korean Society of Computer Information Conference
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    • 2012.07a
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    • pp.33-34
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    • 2012
  • 토석류 퇴적 모델은 토석류에 의한 피해지 예측을 위해 그 효용성이 입증된 모델이지만 이를 이용하기 위해서는 몇 가지 파라미터를 필요로 한다. 파라미터를 자동으로 추정하기 위한 방법은 여러 가지가 있지만 토석류에 의한 피해지 예측을 위한 데이터는 충분히 양을 확보하기가 어려우므로 기존의 학습 기법을 적용하는데 어려움이 있다. 본 논문에서는 인공 신경망을 학습시키는 과정에서 기존 샘플로부터 의사 샘플을 생성하고 이를 학습에 사용함으로써 보다 안정적인 학습이 가능한 의사 샘플 신경망을 제안하였다. 제안한 의사 샘플 신경망은 해공간을 평탄화시킴으로써 잘못된 국부 최적해에 빠질 확률을 줄여주고 따라서 보다 안정적인 파라미터 추정이 가능하다는 사실을 실험을 통해 확인할 수 있다.

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