• Title/Summary/Keyword: degree distribution

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Velocity and Friction Force Distribution in Rotary CMP Equipment (회전형 CMP장비의 속도 및 마찰력 분포 해석)

  • 김형재;정해도;이응숙;신영재
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.5
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    • pp.29-38
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    • 2003
  • As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

IMPROVEMENT OF DISTRIBUTION OF COERCIVITY IN CO-CR FILMS DEPOSSSITED BY FACING TARGETS SPUTTERING

  • Takayama, Seiryu;Nakagawa, Shigeki;Kim, Kyung-Hwan;Naoe, Masahiko
    • Journal of Surface Science and Engineering
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    • v.29 no.6
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    • pp.644-647
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    • 1996
  • The distribution of coercivity in the thickness direction were investigated by using Kerr hysteresis loop tracer for the Co-Cr films deposited by Facing Targets Sputtering apparatus. It was found that the difference between the coercivities of surface layer and initial growth layer H$_c$$\bot$(S)-H$_c$$\bot$(I) correlated strongly with $\Delta$H$_o$, shich represents the degree of distribution of coercivity. Furthermore, the Cr content was varied in order to improve the coercivity of imitial growth layer H$_c$$\bot$(I) and distribution of coercivity. H$_c$$\bot$(I) took a maximum value of 750 Oe and the distribution of coercivity became sharper at the Cr content of 25at. %.

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A Study on the Reliability of Electric Power Distribution System (배전시스템의 신뢰도에 관한 연구)

  • 김경철;최홍규;원진희
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.16 no.3
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    • pp.61-66
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    • 2002
  • Electric power distribution networks are prime examples of systems where a very high degree of reliability is expected. Reliability is the probability of a device or system performing its function adequately for the period of time intended and intented operating conditions intented. This paper shows that a better meshed distribution configuration over the case study of radial configuration distribution system was selected by comparing the indices obtained from EDSA\`s reliability worth assessment of distribution systems program.

Influence of fracture characters on flow distribution under different Reynold numbers

  • Wang, Jing;Li, Shu-Cai;Li, Li-Ping;Gao, Cheng-Lu
    • Geomechanics and Engineering
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    • v.14 no.2
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    • pp.187-193
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    • 2018
  • Water inrush through the destruction of water resisting rock mass structure was divided into direct water inrush, key block water inrush and splitting water inrush. In the direct water inrush, the Reynolds numbers has a significant effect on the distribution of the water flow and vortex occurred in the large Reynolds numbers. The permeability coefficient of the fracture is much larger than the rock, and the difference is between 104 and 107 times. The traditional theory and methods are not considering the effect of inertia force. In the position of the cross fracture, the distribution of water flow can only be linearly distributed according to the fracture opening degree. With the increase of Reynolds number, the relationship between water flow distribution and fracture opening is studied by Semtex.

A Study of Technology Trends for Effective Process Control under Non-Normal Distribution (비정규분포하에서의 효과적 공정관리를 위한 기술체계동향 연구)

  • Kim, Jong-Gurl;Um, Sang-Joon;Kim, Young-Sub;Ko, Jae-Kyu
    • Proceedings of the Safety Management and Science Conference
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    • 2008.11a
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    • pp.599-610
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    • 2008
  • It is an important and urgent issue to improve process capability in quality control. Process capability refers to the uniformity of the process. The variability in the process is a measure of the uniformity of output. A simple, quantitative way to express process capability, the degree of variability from target in specification is defined by process capability index(PCI). Almost process capability indices are defined under normal distribution. However, these indices can not be applied to the process of non-normal distribution including reliability. We investigate current research on the process of non-normal distribution, and advanced method and technology for developing more reliable and efficient PCI. Finally we suggest the perspective for future study.

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Effect of Solvent Content on Morphology and Rubber Particle Size Distribution of High Impact Polystyrene (용매 함량이 내충격성 폴리스티렌의 형태구조 및 고무 입도분포에 미치는 영향)

  • 정한균;박정신;장대석;이성재
    • Polymer(Korea)
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    • v.26 no.3
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    • pp.307-315
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    • 2002
  • Major factors affecting the impact resistance of high impact polystyrene (HIPS), the rubber-toughened grade of polystyrene, are rubber-phase particle size and size distribution, molecular weight, morphology, and degree of grafting. Accordingly, it is important to control or investigate these factors. In this study, the effect of solvent content was analyzed by the morphology and particle size distribution of rubber phase, and final properties in bulk-solution polymerization of HIPS. The prepolymerization time was, first, determined by measuring the evolution of particle size distribution of dispersed phase to explain the phase inversion with time. As the solvent content increased, the size of rubber particle increased and then gradually decreased. Rubber-phase morphology was likely to have higher degree of grafting as the solvent content increased. Rheological and mechanical properties decreased as the solvent content increased because of the decrease of matrix molecular weight due to the chain transfer reaction to solvent and the existence of residual solvent. Nevertheless, the impact resistance seemed to increase when the rubber particle size increased.

Simple Sequence Repeat (SSR) and GC Distribution in the Arabidopsis thaliana Genome

  • Mortimer Jennifer C;Batley Jacqueline;Love Christopher G;Logan Erica;Edwards David
    • Journal of Plant Biotechnology
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    • v.7 no.1
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    • pp.17-25
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    • 2005
  • We have mined each of the five A. thaliana chromosomes for the presence of simple sequence repeats (SSRs) and developed custom perl scripts to examine their distribution and abundance in relation to genomic position, local G/C content and location within and around transcribed sequences. The distribution of repeats and G/C content with respect to genomic regions (exons, UTRs, introns, intergenic regions and proximity to expressed genes) are shown. SSRs show a non-random distribution across the genome and a strong association within and around transcribed sequences, while G/C density is associated specifically with the coding portions of transcribed sequences. SSR motif repeat number shows a high degree of variation for each SSR type and a high degree of motif sequence bias reflecting local genome sequence composition. PCR primers suitable for the amplification of identified SSRs have been designed where possible, and are available for further studies.

A Study on the Pattern Distribution of Yin-Yang Ren [음양인] (Used on Questionnaire) (음양인 유형분류에 관한 연구 (설문지를 중심으로))

  • 이상범;최경미;박영배
    • The Journal of Korean Medicine
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    • v.25 no.1
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    • pp.1-20
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    • 2004
  • Objectives : Based on the analysis of Yin-Yang[음양] characteristics and symptoms, each person is classified into Yin-Yang. Also the validity of the result is statistically analized. Methods : From Feb. to May. 2003, the data were collected through a questionnaire given to 690 patients. The questionnaire was composed of 34 items which were about personality, habit, sweat, response to coldness, thirst, bowel, urine, physical shape, and menstruation for women only. SD(Semantic Differential Technique) used for each item, each item is measured as a contrast of two opposite symptoms. Reliability analysis was used to select items and categories. Based on means of items in each category the Yin-Yang index was developed. The validity of Yin-Yang index was investigated using classification and clustering analysis. In statistical analysis, SPSS V10.0.7 PC was used. Results : The obtained results are summarized as follows: 1) We constructed Yin-Yang index based on the middle point of the sum of categorical means. Then we classified each person into Yin or Yang. 2) To investigate the validity of the distribution of personal Yin-Yang degree, the crosstabulation of results from clustering and classification was used. The hit ratio for classification was much higher than Maximum Chance Criterion($C_{max}$), and concurrence in crosstabulation was successful. Therefore we can infer that the distribution of Yin-Yang was valid. Conclusions : Based on Yin-Yang characteristics and symptoms, we was analyzed personal degree of Yin-Yang, and confirmed the validity of its distribution. Therefore this index can be used further for Bian-Zheng [변증] and classification of the constitution.

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Response transformation factors and hysteretic energy distribution of reinforced concrete braced frames

  • Herian A. Leyva;Eden Bojorquez;Juan Bojorquez;Alfredo Reyes;Fabrizio Mollaioli;Omar Payan;Leonardo Palemon;Manual A. Barraza
    • Structural Engineering and Mechanics
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    • v.90 no.3
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    • pp.313-323
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    • 2024
  • Most of existing buildings in Mexico City are made of reinforced concrete (RC), however, it has been shown that they are very susceptible to narrow-band long duration ground motions. In recent years, the use of dual systems composed by Buckling Restrained Braces (BRB) has increased due to its high energy dissipation capacity under reversible cyclical loads. Therefore, in this work the behavior of RC buildings with BRB is studied in order to know their performance, specifically, the energy distribution through height and response transformation factors between the RC and simplified systems are estimated. For this propose, seven RC buildings with different heights were designed according to the Mexico City Seismic Design Provisions (MCSDP), in addition, equivalent single degree of freedom (SDOF) systems were obtained. Incremental dynamic analyses on the buildings under 30 narrow-band ground motions in order to compute the relationship between normalized hysteretic energy, maximum inter-story drift and roof displacement demands were performed. The results shown that the entire structural frames participate in energy dissipation and their distribution is independent of the global ductility. The results let propose energy distribution equations through height. Finally, response transformation factors between the SDOF and multi degree of freedom (MDOF) systems were developed aimed to propose a new energy-based approach of BRB reinforced concrete buildings.

Effects of Temperatures on Development and Distribution of Mulberry scale, Pseudaulacaspis pentagona, within Tree (온도조건이 뽕나무깍지벌레의 발육 및 수내분포에 미치는 영향)

  • 박종대;김규진
    • Korean journal of applied entomology
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    • v.29 no.4
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    • pp.238-243
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    • 1990
  • These studies were conduced to investigate the effects of temperatures on development of each stage and distribution within tree and overwintering of mulberry scale, Pseudaulacaspis pentagona Tar. & Tozz. Growth ratio of each stage with different temperatures was not significant within range of optimum temperatures of growth. Developmental threshold and effective temperatures of each stage were $12.3^{\circ}C$ and 46.9 degree day in eggs, $10.8^{\circ}C$, and 183.8 degree day in first nymph, $9.8^{\circ}C$ and 188.2 degree day in second nymph, $10.3^{\circ}C$ and 383.0 degree day in gross nymphal stage, respectively. Longevity of female adults were 39.6 days in $18^{\circ}C$, 28.4 days in $22^{\circ}C$, 18.1 days in$26^{\circ}C$, and 15.7 days in$30^{\circ}C$. Average number of eggs in ovary and laid by individual female were 83.3 and 75.7, respectively. Optimum temperatures of growth were $22^{\circ}C$-$26^{\circ}C$ but all the eggs were not hatched at $35^{\circ}C$. Distribution of each stage within tree in summer was great at lower part of branch and overwintering adults was dominantly located in NE-SE followed by SE-SW, SW-NW and NW-NE. Percent mortality due to cold weather was 36.2.

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