• Title/Summary/Keyword: defect rate

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A Study on the Cobalt Electrodeposition of High Aspect Ratio Through-Silicon-Via (TSV) with Single Additive (단일 첨가제를 이용한 고종횡비 TSV의 코발트 전해증착에 관한 연구)

  • Kim, Yu-Jeong;Lee, Jin-Hyeon;Park, Gi-Mun;Yu, Bong-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.140-140
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    • 2018
  • The 3D interconnect technologies have been appeared, as the density of Integrated Circuit (IC) devices increases. Through Silicon Via (TSV) process is an important technology in the 3D interconnect technologies. And the process is used to form a vertically electrical connection through silicon dies. This TSV process has some advantages that short length of interconnection, high interconnection density, low electrical resistance, and low power consumption. Because of these advantages, TSVs could improve the device performance higher. The fabrication process of TSV has several steps such as TSV etching, insulator deposition, seed layer deposition, metallization, planarization, and assembly. Among them, TSV metallization (i.e. TSV filling) was core process in the fabrication process of TSV because TSV metallization determines the performance and reliability of the TSV interconnect. TSVs were commonly filled with metals by using the simple electrochemical deposition method. However, since the aspect ratio of TSVs was become a higher, it was easy to occur voids and copper filling of TSVs became more difficult. Using some additives like an accelerator, suppressor and leveler for the void-free filling of TSVs, deposition rate of bottom could be fast whereas deposition of side walls could be inhibited. The suppressor was adsorbed surface of via easily because of its higher molecular weight than the accelerator. However, for high aspect ratio TSV fillers, the growth of the top of via can be accelerated because the suppressor is replaced by an accelerator. The substitution of the accelerator and the suppressor caused the side wall growth and defect generation. The suppressor was used as Single additive electrodeposition of TSV to overcome the constraints. At the electrochemical deposition of high aspect ratio of TSVs, the suppressor as single additive could effectively suppress the growth of the top surface and the void-free bottom-up filling became possible. Generally, copper was used to fill TSVs since its low resistivity could reduce the RC delay of the interconnection. However, because of the large Coefficients of Thermal Expansion (CTE) mismatch between silicon and copper, stress was induced to the silicon around the TSVs at the annealing process. The Keep Out Zone (KOZ), the stressed area in the silicon, could affect carrier mobility and could cause degradation of the device performance. Cobalt can be used as an alternative material because the CTE of cobalt was lower than that of copper. Therefore, using cobalt could reduce KOZ and improve device performance. In this study, high-aspect ratio TSVs were filled with cobalt using the electrochemical deposition. And the filling performance was enhanced by using the suppressor as single additive. Electrochemical analysis explains the effect of suppressor in the cobalt filling bath and the effect of filling behavior at condition such as current type was investigated.

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Study on Stable Use of Stainless EAF Oxidizing Slag as Fine Aggregate of Concrete (스테인리스 전기로 산화슬래그의 콘크리트용 잔골재 활용방안 검토)

  • Cho, Bong-Suk
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.18 no.3
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    • pp.133-142
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    • 2014
  • Recently, more focus is shift to imbalances in aggregate market supply and demand and an exhaustion of natural resources. In this situation, Electric arc furnace oxidizing slag (EAF Slag) has high application possibility as aggregate for concrete due to similar property with general aggregate. In this study, We've got the plan to assure the chemical stability of EAF Slag, and then experimentally tested the mechanical performance and durability for the fine aggregate used EAF Slag. On this test result, we suggest the application plan. At the result of this study, it shows that EAF slag would reduce the surface defect such as pop-out due to natural aging for the fixed hour and adjustment the grain size of EAF Slag. And mechanical performance and durability according to the replacement rate of concrete service, were revealed more than equal or equal compare to general aggregate. Hereafter, quality control must precede not to impede the beauty of concrete surface as assure the safety for aging and processing. And, to establish the environmental resource recycling system for by-products of steel, it should be made development of various application and guideline of quality control for the EAF slag aggregate. Moreover, it must be constantly studied all kind of engineering performance and durability for related to this study.

Physiological Properties of Microbial Cells Treated by Pulsed Electric Field(PEF) (고전압 펄스 전기장 처리된 미생물 세포의 생리특성)

  • Kim, Kyung-Tack;Kim, Sung-Soo;Choi, Hee-Don;Hong, Hee-Doo;Ha, Sang-Do;Lee, Young-Chun
    • Korean Journal of Food Science and Technology
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    • v.31 no.2
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    • pp.368-374
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    • 1999
  • This study was designed to investigate effects of pulsed electric field (PEF) treatment on physiological changes of microbial cells, using domestically fabricated pilot scale PEF device. The effect of non-thermal PEF treatment on physiological characteristics of microorganisms was determined by salt resistance, the amount of UV absorbents, cell staining, recovery rate of defected cells, and changes in structure of cell membrane. Salt resistance of Escherichia coli, Bacillus subtilis and Rhodotorula minuta was examined after PEF treatment at 40 kV/cm, 84 pulse, $10{\mu}s$ pulse duration. Approximately $1\;log_{10}$ cell number of viable microorganisms was decreased by addition of salt. PEF treatment significantly increased the amount of UV absorbents at 260 and 280 nm because of leakage from damaged cell membrane by PEF treatment. Although three kinds of microorganisms treated by PEF were difficult to be observed due to their cell membrane damage, untreated cells were clearly observed by a microscope. PEF-treated R. minuta was not stained by methylene blue due to cell membrane defect. When E. coli, B. subtilis and R. minuta were cultured after PEF treatment, they showed 5, 4, and 8 hr longer lag phase, respectively, compared to control, but growth rates were not affected.

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NECROSIS OF ALVEOLAR BONE BY FORMOCRESOL : CASE REPORT (Formocresol에 의한 치조골 괴사의 치험례)

  • Park, Cheol-Hong;Lee, Chang-Seop;Lee, Sang-Ho;Lee, Nan-Young
    • Journal of the korean academy of Pediatric Dentistry
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    • v.32 no.4
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    • pp.657-661
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    • 2005
  • Various chemotherapeutic agents have been recommended for pulpotomy of primary teeth, and there are formocresol, ferric sulfate, and calcium hydroxide. Of those, formocresol has fixation effect of pulp tissue and high clinical success rate, so it is most commonly used agent. But formocresol has strong cytotoxic effects, thus many articles reported displacement and loss of permanent successor, amelogenesis imperfecta, mutation by general absorption, possibility of cancer induction. Recently, it has been reported that leakage by imperfect temporary sealing when FC-soaked cotton was inserted into the root canal caused necrosis of surrounding tissues. and that necrosis of alveolar bone related to the use of excessive formocresol. In this case, 2nd primary molar of upper left jaw was treated using formocresol in local clinic, but extracted because of lasting pain. Furthermore, symptoms didn't disappear so patient was refered to us. The patient was 8-year-old male, had foul odor from oral cavity and circular alveolar bone necrosis around the permanent successor' crown. Thus sequestrectomy was operated and observed through 19 months after operation, we found normal root development of permanent successor but no complete regeneration of alveolar bone defect and attached gingiva. Lesion of periodontal tissues by formocresol is irreversible, so we have to confirm the indication in using formocresol and pay attention to complete temporary sealing.

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Analysis on PD Pulse Distribution by Defects Depending on SF6 Pressure (SF6 압력에 따른 결함별 부분 방전 펄스의 분포 분석)

  • Kim, Sun-Jae;Jo, Hyang-Eun;Jeong, Gi-Woo;Kil, Gyung-Suk;Kim, Sung-Wook
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.1
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    • pp.40-45
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    • 2015
  • Electrode systems: a protrusion on conductor (POC), a protrusion on enclosure (POE), a crack in epoxy plate and a free particle (FP) were fabricated to simulate insulation defects in a gas insulated switchgear (GIS). $SF_6$ gas was filled in the electrode systems by 3 bar and/or 5 bar, respectively. Partial discharge (PD) pulses were detected through a $50{\Omega}$ non-inductive resistor. A calibration test was carried out according to IEC 60270, and the sensitivity was 0.25 pC/mV. PD pulses were distributed in the phase of $50^{\circ}{\sim}135^{\circ}$ and over 95% of them existed in the phase of $55^{\circ}{\sim}120^{\circ}$ for the POC. PD pulses were distributed in the phase of $230^{\circ}{\sim}310^{\circ}$ and over 90% of them existed in phase of $220^{\circ}{\sim}300^{\circ}$ for the POE. PD pulses occurred in the phase of $40^{\circ}{\sim}60^{\circ}$ and $220^{\circ}{\sim}300^{\circ}$ for the crack, and pulse counts were 25% higher in negative polarity than in positive polarity. PD pulses were distributed in every phase unlike to other three electrode systems and the peak magnitude was measured at $118^{\circ}$ and $260^{\circ}$ for the FP. As described above, PD pulses were observed in positive polarity for the POC, in negative one for the POE, in both one for the crack and the FP. In conclusion, it is expected that the identification rate of defect type can be improved by considering the polarity ratio of PD pulses on the PRPDA method.

The Growth of $MgO:LiNbO_3$ Single Crystal by Czochralski Method and its Density Measurement (Czochralski법에 의한 $MgO:LiNbO_3$단결정 성장과 밀도 측정)

  • Kim, Il-Won;Park, Bong-Chan;Kim, Gap-Jin
    • Korean Journal of Crystallography
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    • v.4 no.2
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    • pp.74-85
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    • 1993
  • Single crystals of LiNbO3 have found extensive application in electro-optic and nonlinear optic devices. However, laser-induced refartive index inhomogeneities, which have been labeled opical damage impose limits on device optical damage in LiNbO3 is imporved if more than 4.5 rml% MgO is added to the melt The laser damage thrueshold increased as much as 100 times better then that of undoped crystals. The MgO doped cystal has thus been urterlsiv81y studied since then. In the study, Mgo:LiNbOs(MLA) single crystals dopsd with 0, 2.5, 5.0, 7.5, 10.0 mol% MgO have been grown by the czocrualski technique. The metls were prepared in the platinum crluible and 15∼20mm diameter crystals were grown with a length of 20∼30mm in a resitance heater. The growth rate was 2.5mm/hr, the rotation speed 15rpn. Before sawing MLN single crystals were annealed for 24 hours under atmosphere at a temperature of 1080℃. After sawing, we have found an annual ring cross section of MNA crystals only in the direction of perpendicilar to the c-axis. Nonuniform dispusion of MgO was pointed out that the cuties of the state of oxide were strongly affected by oxygen partial pressure in.

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Study on Physical and Chemical Properties of CaO-Al2O3 System Melting Compound (CaO-Al2O3계 용융화합물의 물리·화학적 특성에 관한 연구)

  • Lee, Keun-Jae;Koo, Ja-Sul;Kim, Jin-Man;Oh, Sang-Yoon
    • Journal of the Korea Concrete Institute
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    • v.25 no.2
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    • pp.209-215
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    • 2013
  • This study is aimed to identify the method to use the CaO-$Al_2O_3$ system of rapidly cooled steel making slag (RCSS) as the environment-friendly inorganic accelerating agent by analyzing its physical and chemical properties. The fraction of rapidly cooled steel making slag is distinguished from its fibrous, and the contents of CaO and $Fe_2O_3$ are inversely proportional across different fractions. In addition, as the content of CaO decreased and the content of $Fe_2O_3$ increased, the loss ignition tended to become negative (-) and the density increased. The pore distribution by mercury intrusion porosimetry is very low as compared to the slowly cooled steel-making slag, which indicates that the internal defect and the microspore rate are remarkably lowered by the rapid cooling. To analyze the major minerals the rapidly cooled steel-making slag, XRD, f-CaO quantification and SEM-EDAX analysis have been performed. The results shows that f-CaO does not exist, and the components are mainly consisted of $C_{12}A_7$ and reactive ${\beta}-C_2S$.

CONSTRUCTION OF RECOMBINANT HSCC-1 ADENOVIRUS VECTOR FOR ORAL CANCER GENE THERAPY (구강암 유전자 치료를 위한 재조합 HSCC-1 아데노바이러스의 개발)

  • Kim, Chang-Hyen;Kim, Jin-Woo;Kim, Myung-Jin;Pyo, Sung-Woon
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.27 no.2
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    • pp.103-109
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    • 2005
  • In spite of the ongoing advances, standard therapies for oral cancer still has some limitations in efficacy and in ability to prolong survival rate of advanced disease and result in significant functional defect and severe cosmetic deformity. Currently gene therapy using tumor suppressor gene is considered as a potent candidate for new therapeutic approaches that can improve efficacy and reduce complications. The purpose of this research is to identify the role of adenoviral vector to transfer HCCS-1 tumor suppressor gene in oral cancer cells and to find out whether there is a possibility for it to serve in the field of gene therapy. The human SCC-25 cell line was used for transfection. To determine the efficiency of the adenovirus as a gene delivery vector cell line was transduced with LacZ gene and analysed with X-gal staining. Northern blot was performed to confirm the tranfection with HSCC-1 gene and cell viability was assessed by cell cytotoxicity assay. We had successfully construct the recombinant HSCC-1 adenovirus(Ad5CMV-HCCS-1). DNA extracted from Ad5CMV-HCCS-1 revealed HCCS-1 gene is incorporated. The transduction efficiencies were over than 50% of SCC-25 cells with a MOI of 2 and over 95% with a MOI of 50. Northern blot analysis showed that a single 0.6kb mRNA transcript was expressed in Ad5CMV-HCCS-1 transduced SCC-25 cells. There was no or very low transcription HCCS-1 mRNA in wild and Ad5CMV-LacZ transduced SCC-25 cells. Cells transduced with Ad5CMV-HCCS-1 showed significant growth inhibition. By day 6, Ad5CMV-HCCS-1 treated cell count was decreased to 30% of mock-infected cells, while that of Ad5CMV-LacZ treated cells was 90% of mock-infected cells (p<0.05). Finally, these result suggest that the Ad5CMV-HCCS-1 has potential as a gene therapy tool for oral cancer.

Image Generator Design for OLED Panel Test (OLED 패널 테스트를 위한 영상 발생기 설계)

  • Yoon, Suk-Moon;Lee, Seung-Ho
    • Journal of IKEEE
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    • v.24 no.1
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    • pp.25-32
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    • 2020
  • In this paper, we propose an image generator for OLED panel test that can compensate for color coordinates and luminance by using panel defect inspection and optical measurement while displaying images on OLED panel. The proposed image generator consists of two processes: the image generation process and the process of compensating color coordinates and luminance using optical measurement. In the image generating process, the panel is set to receive the panel information to drive the panel, and the image is output by adjusting the output setting of the image generator according to the panel information. The output form of the image is configured by digital RGB method. The pattern generation algorithm inside the image generator outputs color and gray image data by transmitting color data to a 24-bit data line based on a synchronization signal according to the resolution of the panel. The process of compensating color coordinates and luminance using optical measurement outputs an image to an OLED panel in an image generator, and compensates for a portion where color coordinates and luminance data measured by an optical module differ from reference data. To evaluate the accuracy of the image generator for the OLED panel test proposed in this paper, Xilinx's Spartan 6 series XC6SLX25-FG484 FPGA was used and the design tool was ISE 14.5. The output of the image generation process was confirmed that the target setting value and the simulation result value for the digital RGB output using the oscilloscope matched. Compensating the color coordinates and luminance using optical measurements showed accuracy within the error rate suggested by the panel manufacturer.

Problem Analysis and Suggestion for Improved Approaches to Ecological Planting and the Establishment of Urban Parks -A Case Study of the Nature Ecological Forest in Yeouido Park, Seoul- (도시공원 생태적 배식의 조성 단계별 문제점 고찰 및 개선방안 -서울시 여의도공원 자연생태의 숲을 사례로-)

  • Seong, Kyong-Ho;Lee, Kyong-Jae;Choi, Jin-Woo;Kim, Jong-Yup
    • Journal of the Korean Institute of Landscape Architecture
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    • v.39 no.2
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    • pp.91-102
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    • 2011
  • This study was carried out to analyze the problems on several steps of the establishment of the Nature Ecological Forest in Yeouido Park, Seoul, and also to suggest improved approaches on each step. For execution drawing, planting models and plans seemed to be uncertain, and the quantity and size of planting trees seemed to be impractical. For construction, the woody plants planted on the site were different in species and size from the planting plan. Ecological planting was somewhat limited because of the inappropriate soil properties. For management, replacement of the dead trees was not executed properly, and no management scheme was prepared after the replacement period. We suggested improved approaches for the establishment of ecological forests in urban areas as follows: for execution drawing, overstory, understory and herbaceous ground cover layers should be composed based on standard plant community structures. Trees that are available from tree markets should be specified in the planting plan. For construction, trees for planting need to be tagged to identify species and size. When tree species and size are changed, they should be checked to ensure that they are proper to the plant community model. Soil information should be collected to check that they fit the target plant community model. For management, the proper amount of trees needs to be specified in the planting plan by applying regular discount rates, especially for trees supplied from the government sector. The replacement period should be extended from two years to five years. The change of plant communities should be monitored during first five years after establishment.