• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1415-1418
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• 1997

An accurate length measuring system has been develope by a modified Michelson interferometer. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. Resolutioin of .lambda./40, 16 nm, was achieved from the discrete length measuring system. In order to obtain a resoltuion of 1.mu.m a decimalizing module was designed for the 0.016.mu.m resolution system. The refractive index of the ambient air was calibrated on the decimalizing module through the Edlen's formula. Performance of the system was evaluated on the machining center in short and long length measruements.