• Transactions on Electrical and Electronic Materials
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• v.3 no.3
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• pp.14-17
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• 2002

The HDP (High Density Plasma) CVD process consists of a simultaneous sputter etch and chemical vapor deposition. As CMOS process continues to scale down to sub- quarter micron technology, HDP process has been widely used fur the gap-fill of small geometry metal spacing in inter-metal dielectric process. However, HBP CVD system has some potential problems including plasma-induced damage. Plasma-induced gate oxide damage has been an increasingly important issue for integrated circuit process technology. In this paper, thin gate oxide charge damage caused by HDP deposition of inter-metal dielectric was studied. Multiple step HDP deposition process was demonstrated in this work to prevent plasma-induced damage by introducing an in-situ top SiH$_4$ unbiased liner deposition before conventional deposition.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.145-154
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• 2002

CMP (Chemical mechanical polishing) process was used to control the fine grinding process induced mechanical damage of Cz Silicon wafer. Characterization of mechanical damage was carried out using Nomarski microscope, magic mirror and also using angle lapping and lifetime scanner evaluation after heat treatment. Magic mirror and lifetime scanner were very useful for the residual damage pattern characterization and CMP process was effective on the reduction of fine grinding induced mechanical damage.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.291-295
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• 2003

The occurrence of ductile fracture is the working limit of many metal forming processes. It is necessary to predict the criteria and to apply the condition in a process design. Over the years. the way for clarifying conditions have been studied and presented. However such a way needs lots of experiments and analysis. In this study, in order to determine the critical damage value of a used material Cu 4N, it was performed a tensile test and FEM analysis by using DEFORM 2D. For applying the obtained critical damage value it was also performed a upsetting test by using DEFORM 2D. The way of determining a critical damage value which is presented in this study will make possible to find easily it which is one of the working limit factor. And the way of determining a critical damage value will make possible to find in multi-pass drawing process.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.130-138
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• 1996

In general, the scattler is observed in fatigue test data due to the nonhomogeneity of a material. Consequently. It is necessary to use the statistical method to describe the fatigue crack growth process precisely. Bogdanoff and Kozin suggested and developed the B-model which is the probabilistic models of cumulative damage using the Markov process in order to describe the damage process. But the B-model uses only constant probability ratior(r), so it is not consistent with the actual damage process. In this study, the r-decreasing model using a monotonic decreasing function is introduced to improve the B-model. To verify the model, thest data of fatigue crack growth of A12024-T351 and A17075-T651 are used. Compared with the empirical distribution of test data, the distribution from the r-decreasing model is satisfactory and damage process is well described from the probabilistic and physical viewpoint.

• Journal of the Korean Society of Safety
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• v.31 no.2
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• pp.119-126
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• 2016

Across the world, the industrialization has increased the frequency of climate anomaly. The size of damage due to recent natural disasters is growing large and fast, and the human damage and economic loss due to disasters are consistently increasing. Urbanization has a structure vulnerable to natural disasters. Therefore, in order to reduce damage from natural disasters, both hardware and software approaches should be utilized. Currently, however, the development of a statistical access process for 'analysis of disaster occurrence factor' and 'prediction of damage costs' for disaster prevention and overall disaster management is inadequate. In case of local governments, overall disaster management system is not established, or even if it is established, unscientific classification system and management lead to low utility of natural statistics of disaster year book. Therefore, in order to minimize disaster damage and for rational disaster management, the disaster damage survey process should be improved. This study selected gale as the focused analysis target among natural disasters recorded in disaster year book such as storm, torrential rain, gale, high seas, and heavy snow, and analyzed disaster survey process. Based on disaster year book, the gale damage size was analyzed and the issues occurring from the correlation of gale and damage amount were examined, so as to suggest an improvement plan for reliable natural disaster information collection and systematic natural disaster damage survey.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.9
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• pp.438-443
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• 2001

In the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control, within-wafer-non-uniformity, and the possible defects such as pad oxide damage and nitride residue. The defect like nitride residue and silicon (or pad oxide) damage after STI-CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI fill and STI-CMP were discussed. Consequently, we could conclude that law trench depth and high CMP thickness can cause nitride residue, and high trench depth and over-polishing can cause silicon damage.

• Structural Engineering and Mechanics
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• v.49 no.2
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• pp.183-202
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• 2014

A new method of multiple damage detection in beam like structures is introduced. The mode shapes of both healthy and damaged structures are used in damage detection process (DDP). Multiple Damage Localization Index Based on Mode Shapes (MDLIBMS) is presented as a criterion in detecting damaged elements. A finite element modeling of structures is used to calculate the mode shapes parameters. The main advantages of the proposed method are its simplicity, flexibility on the number of elements and so the accuracy of the damage(s) position(s), sensitivity to small damage extend, capability in prediction of required number of mode shapes and low sensitivity to noisy data. In fact, because of differential and comparative form of MDLIBMS, using noise polluted data doesn't have major effect on the results. This makes the proposed method a powerful one in damage detection according to measured mode shape data. Because of its flexibility, damage detection process in multi span bridge girders with non-prismatic sections can be done by this method. Numerical simulations used to demonstrate these advantages.

• Transactions of Materials Processing
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• v.19 no.3
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• pp.160-166
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• 2010

In this paper, the process parameters of thread rolling were designed based on the numerical analysis results. Firstly, the effective analysis conditions that guarantee the reliability of the analysis results were found. To find the effective analysis conditions, the analyses were carried out for various numbers of teeth. And then, the effects of the process parameters such as tool shape and temperature on the thread rolling performance were investigated. The formability in thread rolling process was evaluated in terms of Cockcroft-Latham damage value. In order to evaluate formability, Cockcroft-Latham damage value was normalized by the critical damage value which was obtained from the analysis of uniaxial tensile test. The analyses were carried out using DEFORM-3D. The results showed that the flank angle and crest round had an effect on the thread rolling load. It was also shown that temperature had significant effects on the effective strain distribution, rolling load, and damage. With the reduced formability of stainless steel at higher temperature, it was shown that the normalized damage values increased as the process temperature.

• Computers and Concrete
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• v.18 no.2
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• pp.267-278
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• 2016

In order to observe the internal damage of concrete in real time, we introduced acoustic emission nondestructive detecting technology into a series of fracture tests; the test results revealed the whole process that concrete undergoes when it sustains damage that leads to failure, according to the change rules of the acoustic emission parameters. The results showed that both the initiation and unstable loads can be accurately determined using the abrupt change of the acoustic emission rate curves and the turning point of the acoustic emission parameters' accumulative curves. The whole process, from damage to failure, includes five phases, beginning with damage, such as cracking, a stable crack growth process, a critical unstable stage, and unstable propagation. The brittle fracture characteristics of concrete change when steel bars are joined, because the steel bars and the concrete structure bond, which causes an increase in the acoustic emission signals within the fracture process of the reinforced concrete. The unstable propagation stage is also extended. Our research results provide a valid methodology and technical explanations, which can help researchers to monitor the cracking process of concrete structures, in real time, during actual projects.

• Proceedings of the Korean Society of Toxicology Conference
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• 2006.11a
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• pp.55-64
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• 2006

The fetal central nervous system (CNS) is sensitive to diverse environmental factors, such as alcohol, heavy metals, irradiation, mycotoxins, neurotransmitters, and DNA damage, because a large number of processes occur during an extended period of development. Fetal neural damage is an important issue affecting the completion of normal CNS development. As many concepts about the brain development have been recently revealed, it is necessary to compare the mechanism of developmental abnormalities induced by extrinsic factors with the normal brain development. To clarify the mechanism of fetal CNS damage, we used one experimental model in which 5-azacytidine (5AZC), a DNA damaging and demethylating agent, was injected to the dams of rodents to damage the fetal brain. 5AzC induced cell death (apoptosis)and cell cycle arrest in the fetal brain, and it lead to microencephaly in the neonatal brain. We investigated the mechanism of apoptosis and cell cycle arrest in the neural progenitor cells in detail, and demonstrated that various cell cycle regulators were changed in response to DNA damage. p53, the guardian of genome, played a main role in these processes. Further, using DNA microarray analysis, tile signal cascades of cell cycle regulation were clearly shown. Our results indicate that neural progenitor cells have the potential to repair the DNA damages via cell cyclearrest and to exclude highly affected cells through the apoptotic process. If the stimulus and subsequent DNA damage are high, brain development proceeds abnormally and results in malformation in the neonatal brain. Although the mechanisms of fetal brain injury and features of brain malformation afterbirth have been well studied, the process between those stages is largely unknown. We hypothesized that the fetal CNS has the ability to repair itself post-injuring, and investigated the repair process after 5AZC-induced damage. Wefound that the damages were repaired by 60 h after the treatment and developmental processes continued. During the repair process, amoeboid microglial cells infiltrated in the brain tissue, some of which ingested apoptotic cells. The expressions of genes categorized to glial cells, inflammation, extracellular matrix, glycolysis, and neurogenesis were upregulated in the DNA microarray analysis. We show here that the developing brain has a capacity to repair the damage induced by the extrinsic stresses, including changing the expression of numerous genes and the induction of microglia to aid the repair process.