Study on Ductile Machining Technology for Manufacturing Nano-Patterns on Single Crystal Silicon through Quantitative Analysis of Thrust Force (배분력의 정량적인 분석을 통한 단결정실리콘의 나노패턴 연성가공법 연구)
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- Journal of the Korean Society for Precision Engineering
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- v.33 no.1
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- pp.11-16
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- 2016