• Journal of the Korean Vacuum Society
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• v.19 no.3
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• pp.230-235
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• 2010

In this paper, we controlled the deposition rate and reflective index with process conditions that are TCP power, gas flow ratio and bias for optical properties of $SiO_2$ thin film using TCP-CVD equipment. We obtained a excellent $SiO_2$ thin film which has a excellent uniformity (<1 [%]), deposition rate (0.28 [${\mu}m$/ min]) and reflective index (1.4610-1.4621) within 4" wafer with process conditions ($SiH_4:O_2$=50 : 100 [sccm], TCP power 1 [kW], bias 200 [W]) at [$300^{\circ}C$].

• Journal of the Korean Ceramic Society
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• v.49 no.6
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• pp.556-560
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• 2012

Nanocrystalline CrN coatings were deposited by DC and ICP-assisted magnetron sputtering on Si (100) substrates. The influences of the ICP power on the microstructural and crystallographic properties of the coatings were investigated. For the generation of the ICP, radio frequency was applied using a dielectric-encapsulated coil antenna installed inside the deposition chamber. As the ICP power increased from 0 to 500W, the crystalline grain size decreased. It is believed that the decrease in the crystal grain size at higher ICP powers is due to resputtering of the coatings as a result of ion bombardment as well as film densification. The preferential orientation of CrN coatings changed from (111) to (200) with an increase in the ICP power. The ICP magnetron sputtering CrN coatings showed excellent surface roughness compared to the DC magnetron sputtering coatings.

• Structural Engineering and Mechanics
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• v.28 no.6
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• pp.695-713
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• 2008

The aim of this contribution is to present a new link/beam finite element suitable for electrothermo-structural analysis of uni-axially graded materials. Continuous polynomial variation of geometry and material properties will be considered. The element matrix and relations for solution of Joule's heat (and its distribution to the element nodes) have been established in the sense of a sequence method of a coupled problem solution. The expression for the solution of nodal forces caused by a continuously distributed temperature field has also been derived. The theoretical part of this contribution is completed by numerical validation, which proves the high accuracy and effectiveness of the proposed element. The results of the performed experiments are compared with those obtained using the more expensive multiphysical link element and solid element of the FEM program Ansys. The proposed finite element could be used not only in the multiphysical analysis of the current paths and actuators but also in analysis of other 1D construction parts made of composite or uni-axially graded materials.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.182-185
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• 2003

Etching characteristics of (PB,Sr)$TiO_3$(PST) thin films Were investigated using inductively coupled chlorine based plasma system as functions of gas mixing ratio, RF power and DC bias voltage. It was found that increasing of Ar content in gas mixture' lead to sufficient increasing of etch rate and selectivity of PST to Pt. The maximum etch rate of PST film is 562 ${\AA}$/min and the selectivity of PST film to Pt is 0.8 at $Cl_2/(Cl_2+Ar)$ of 20 %. It was proposed that sputter etching is dominant etching mechanism while the contribution of chemical reaction is relatively low due to low volatility of etching products.

• Transactions on Electrical and Electronic Materials
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• v.13 no.3
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• pp.144-148
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• 2012

In this work, we investigated to the etching characteristics of $TiO_2$ thin film and the selectivity using the inductively coupled plasma system. The etch rate and the selectivity were obtained with various gas mixing ratios. The maximum etch rate of $TiO_2$ thin film was 61.6 nm/min. The selectivity of $TiO_2$ to TiN, and $TiO_2$ to $SiO_2$ were obtained as 2.13 and 1.39, respectively. The etching process conditions are 400 W for RF power, -150 V for DC-bias voltage, 2 Pa for the process pressure, and $40^{\circ}C$ for substrate temperature. The chemical states of the etched surfaces were investigated with X-ray photoelectron spectroscopy (XPS). Its analysis showed that the etching mechanism was based on the physical and chemical pathways in the ion-assisted physical reaction.

• Journal of Microbiology and Biotechnology
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• v.21 no.11
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• pp.1127-1142
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• 2011

The aim of this investigation was to select effective Pseudomonas sp. strains that can enhance the productivity of soybean-wheat cropping systems in Vertisols of Central India. Out of 13 strains of Pseudomonas species tested in vitro, only five strains displayed plant growth-promoting (PGP) properties. All the strains significantly increased soil enzyme activities, except acid phosphatase, total system productivity, and nutrient uptake in field evaluation; soil nutrient status was not significantly influenced. Available data indicated that six strains were better than the others. Principal component analysis (PCA) coupled cluster analysis of yield and nutrient data separated these strains into five distinct clusters with only two effective strains, GRP3 and HHRE81 in cluster IV. In spite of single cluster formation by strains GRP3 and HHRE81, they were diverse owing to greater intracluster distance (4.42) between each other. These results suggest that the GRP3 and HHRE81 strains may be used to increase the productivity efficiency of soybean-wheat cropping systems in Vertisols of Central India. Moreover, the PCA coupled cluster analysis tool may help in the selection of other such strains.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1347-1348
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• 2007

In this paper, ITO gate electrode surface was modified using $O_2$ plasma and organic gate insulating layers were deposited on the ITO surface using plasma polymerization technique. In order to investigate the influence of the plasma coupling method and plasma conditions on the plasma polymerized methyl methacrylate (ppMMA) thin film properties, inductively coupled (ICP) and capacitively coupled plasma (CCP) were used to generate the plasma and the plasma parameters were varied. The ppMMAs were investigated using atomic force microscopy (AFM) and a Fourier Transform Infrared (FT-IR) spectroscopy. Dielectric constants of the ppMMA thin films were investigated using a impedance analyzer (HP4192A, LF Impedance Analyzer). Current-Voltage (I-V) characteristics of the organic thin film transistors (OTFTs) were investigated using a source measurement unit (SMU: Keithley 2612). Proposed method can be applied to dry-process to fabricate OTFTs during overall fabricating steps.

• Bulletin of the Korean Chemical Society
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• v.17 no.12
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• pp.1127-1131
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• 1996

[FeⅡ2(N-Et-HPTB)Cl2]BPh4(1), where N-Et-HPTB is the anion of N,N,N',N'-tetrakis(N-ethyl-2-benzimidazolylmethyl)-2-hydroxy-l,3-diaminopropane, has been synthesized to model dioxygen binding to the diferrous centers of proteins. 1 has a singly bridged structure with a μ-alkoxo of N-Et-HPTB and contains two five-coordinate iron(Ⅱ) centers with two chloride ligands as exogenous ligands. 1 exhibits an electronic spectrum with a λmax at 336 nm in acetone. 1 in acetone exhibits no EPR signal at 4 K, indicating diiron(Ⅱ) centers are antiferromagnetically coupled. Exposure of acetone solution of 1 to O2 at -90 ℃ affords an intense blue color intermediate showing a broad band at 586 nm. This absorption maximum of the dioxygen adduct(1/O2) was found in the same region of μ-l,2-peroxo diiron(Ⅲ) intermediates in the related complexes with pendant pyridine or benzimidazole ligand systems. However, this blue intermediate exhibits EPR signals at g = 1.93, 1.76, and 1.59 at 4 K. These g values are characteristic of S = 1/2 system derived from an antiferromagnetically coupled high-spin Fe(Ⅱ)Fe(Ⅲ) units. 1 is the unique example of a (μ-alkoxo)diferrous complex which can bind dioxygen and form a metastable mixed-valence intermediate. At ambient temperature, most of 1/O2 intermediate decays to form a diamagnetic species. It suggests that the dacay reaction of the intermediate might be bimolecular, implying the formation of mixed-valence tetranuclear species in transition state.

• Coupled systems mechanics
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• v.8 no.2
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• pp.129-146
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• 2019

The main goal of this work is to develop a numerical simulator to study an isothermal single-phase two-component flow in a naturally fractured oil reservoir, taking into account advection and diffusion effects. We use the Peng-Robinson equation of state with a volume translation to evaluate the properties of the components, and the discretization of the governing partial differential equations is carried out using the Finite Difference Method, along with implicit and first-order upwind schemes. This process leads to a coupled non-linear algebraic system for the unknowns pressure and molar fractions. After a linearization and the use of an operator splitting, the Conjugate Gradient and Bi-conjugated Gradient Stabilized methods are then used to solve two algebraic subsystems, one for the pressure and another for the molar fraction. We studied the effects of fractures in both the flow field and mass transport, as well as in computing time, and the results show that the fractures affect, as expected, the flow creating a thin preferential path for the mass transport.

• Steel and Composite Structures
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• v.43 no.5
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• pp.533-552
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• 2022

The current article deals with the dynamic stability, and structural improvement of vibrating electrically curved screen on the viscoelastic substrate. By considering optimum value for radius curvature of the electrically curved screen, the structure improvement of the system occurs. For modeling the electrically system, the Maxwell's' equation is developed. Hertz contact model in employed to obtain contact forces between impactor and structure. Moreover, variational methods and nonlinear von Kármán model are used to derive boundary conditions (BCs) and nonlinear governing equations of the vibrating electrically curved screen. Galerkin and Multiple scales solution approach are coupled to solve the nonlinear set of governing equations of the vibrating electrically curved screen. Along with the analytical solution, 3D finite element simulation via ABAQUS package is provided with the aid of a FE package for simulating the current system's response. The results are categorized in 3 different sections. First, effects of geometrical and material parameters on the vibrational performance and stability of the curves panel. Second, physical properties of the impactor are taken in to account and their effect on the absorbed energy and velocity profile of the impactor are presented. Finally, effect of the radius and initial velocity on the mode shapes of the current structure is demonstrated.