• Journal of the Korean Society for Precision Engineering
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• v.26 no.3
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• pp.122-128
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• 2009

DBD(Dielectric Barrier Discharges) plasma is often used to clean the surface of semiconductor. The cleaning performance is affected mainly by plasma density and duration time. In this study, the plasma density is predicted by coupled simulation of flow, chemistry mixing and reaction, plasma, and electric field. 13.56 MHz of RF source is used to generate plasma. The effect of dielectric thickness, gap distance, and flow velocity on plasma density is investigated. It is shown that the plasma density increases as the dielectric thickness decreases and the gap distance increases.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.37 no.6
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• pp.396-396
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• 2000

Three-Dimensional FDTD method is applied to analyze the dielectric resonator coupled with two microstrip lines. We model accurately the curved surface using Noriaki model. The frequency resolution is 106.46 MHz by the conventional FFT However it is not sufficient for determining its resonant frequency. So we introduce the Pad approximation and Stoer-Bulirsch method in order to have the high frequency resolution degree, 1.00 MHz. All results are compared with the measured data. As a result, we acquire the very precise result through the Pad approximation. And sinusoidal wave is applied. From the plot of the electric and magnetic field distribution, it is shown that the resonant mode is $TE_{01{\delta}}$ mode.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.37 no.6
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• pp.36-43
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• 2000

Three-Dimensional FDTD method is applied to analyze the dielectric resonator coupled with two microstrip lines. We model accurately the curved surface using Noriaki model. The frequency resolution is 106.46 MHz by the conventional FFT However it is not sufficient for determining its resonant frequency. So we introduce the Pad approximation and Stoer-Bulirsch method in order to have the high frequency resolution degree, 1.00 MHz. All results are compared with the measured data. As a result, we acquire the very precise result through the Pad approximation. And sinusoidal wave is applied. From the plot of the electric and magnetic field distribution, it is shown that the resonant mode is TE$_{01{\delta}}$ mode.

• Journal of Electrical Engineering and Technology
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• v.9 no.1
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• pp.307-312
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• 2014

We present a full finite element analysis for plasma discharge in etching process of semiconductor circuit. The charge transport equations of hydrodynamic diffusion-drift model and the electric field equation were numerically solved in a fully coupled system by using a standard finite element procedure for transient analysis. The proposed method was applied to a real plasma reactor in order to characterize the plasma sheath that is closely related to the yield of the etching process. Throughout the plasma discharge analysis, the base electrode of reactor was tested and modified for improving the uniformity around the wafer edge. The experiment and numerical results were examined along with SEM data of etching quality. The feasibility and usefulness of the proposed method was shown by both numerical and experimental results.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.4
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• pp.507-514
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• 2012

This paper proposed the analysis method of the cavity resonance characteristics for a metallic enclosure with a PCB trace source. In order to calculation the electromagnetic fields inside the cavity, coupled integral equations for a current distribution on the PCB trace and an aperture electric field distribution on the boundary of the PCB dielectric are derived and solved by applying Galerkin's method of moments. The result show that the resonant characteristics of the metallic enclosure are fairly good agreement with the simulation(HFSS) and the measured results. The resonant frequencies of the metallic enclosure with the PCB trace are changed by the PCB trace location inside of the cavity. In order to check the validity of the theoretical analysis, the calculated return losses are compared with the measured results.

• Bulletin of the Korean Chemical Society
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• v.35 no.4
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• pp.1082-1086
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• 2014

A multi-channel microchip electrophoresis (MCME) method with parallel laser-induced fluorescence (LIF) detection was developed for rapid screening of H1N1 virus. The hemagglutinin (HA) and nucleocapsid protein (NP) gene of H1N1 virus were amplified using polymerase chain reaction (PCR). The amplified PCR products of the H1N1 virus DNA (HA, 116 bp and NP, 195 bp) were simultaneously detected within 25 s in three parallel channels using an expanded laser beam and a charge-coupled device camera. The parallel separations were demonstrated using a sieving gel matrix of 0.3% poly(ethylene oxide) ($M_r$ = 8,000,000) in $1{\times}$ TBE buffer (pH 8.4) with a programmed step electric field strength (PSEFS). The method was ~20 times faster than conventional slab gel electrophoresis, without any loss of resolving power or reproducibility. The proposed MCME/PSEFS assay technique provides a simple and accurate method for fast high-throughput screening of infectious virus DNA molecules under 400 bp.

• Journal of the Korean Vacuum Society
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• v.17 no.6
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• pp.511-517
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• 2008

A quasi two-dimensional model for numerical simulation of gas discharge is presented, based on the finite-element flux-corrected transport method. A one-dimensional continuity convection-diffusion equation coupled Poisson's equation is solved to calculate the charge density variation and the electric field is evaluated by the classical disk method. Results calculated for various benchmark problems verify the accuracy of the proposed model and illustrate its performance. This model has been applied to a streamer simulation, and the results are shown to agree well with previously published results.

• Applied Science and Convergence Technology
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• v.27 no.4
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• pp.70-74
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• 2018

We fabricated an anode-type ion source driven by a charge repulsion mechanism and investigated its beam shape controlled by a Whenelt mask integrated at the front face of the source. The ion beam shape was observed to vary by changing the geometry of the Whenelt mask. As the angle of inclination of the Whenelt mask was varied from $40^{\circ}$ to $60^{\circ}$, the etched area at a thin film was reduced from 20 mm to 7.5 mm at the working distance of 286 mm, and the light transmittance through the etched surface was increased from 78% to 80%, respectively. In addition, for the step height difference, ${\Delta}$ between the inner mask and the outer mask of ${\Delta}=0$, -1 mm, and +1 mm, we observed the ion beam shape was formed to be collimated, diverged, and focused, respectively. The focal length of the focused beam was 269 mm. We approved experimentally a simple way of controlling the electric field of the ion beam by changing the geometry of the Whenelt mask such that the initial direction of the ion beam in the plasma region was manipulated effectively.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.557-560
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• 2008

A two-dimensional particle-in-cell(PIC) simulation with a Monte-Carlo Collision(MCC) has been developed to investigate the discharge characteristics of the acceleration channel of a HET. The dynamics of electrons and ions are treated with PIC method at the time scale of electrons in order to investigate the particle transport. The densities of charged particles are coupled with Poisson's equation. Xenon neutrals are injected from the anode and experience elastic, excitation, and ionization collisions with electrons, and are scattered by ions. These collisions are simulated by using an MCC model. The effects of control parameters such as magnetic field profile, electron current density, and the applied voltage have been investigated. The secondary electron emission on the dielectric surface is also considered.

• Advances in nano research
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• v.6 no.4
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• pp.299-321
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• 2018

A layerwise shear deformation theory is applied in this paper for buckling analysis of piezoelectric truncated conical shell. The core is a multiphase nanocomposite reinforced by carbon nanotubes (CNTs) and carbon fibers. The top and bottom face sheets are piezoelectric subjected to 3D electric field and external voltage. The Halpin-Tsai model is used for obtaining the effective moisture and temperature dependent material properties of the core. The proposed layerwise theory is based on Mindlin's first-order shear deformation theory in each layer and results for a laminated truncated conical shell with three layers considering the continuity boundary condition. Applying energy method, the coupled motion equations are derived and analyzed using differential quadrature method (DQM) for different boundary conditions. The influences of some parameters such as boundary conditions, CNTs weight percent, cone semi vertex angle, geometrical parameters, moisture and temperature changes and external voltage are investigated on the buckling load of the smart structure. The results show that enhancing the CNTs weight percent, the buckling load increases. Furthermore, increasing the moisture and temperature changes decreases the buckling load.