• Title/Summary/Keyword: controlling factor

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Optimization of Etching Profile in Deep-Reactive-Ion Etching for MEMS Processes of Sensors

  • Yang, Chung Mo;Kim, Hee Yeoun;Park, Jae Hong
    • Journal of Sensor Science and Technology
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    • v.24 no.1
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    • pp.10-14
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    • 2015
  • This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

URBAN ENVIRONMENTAL QUALITY ANALYSIS USING LANDSAT IMAGES OVER SEOUL, KOREA

  • Lee, Kwon-H.;Wong, Man-Sing;Kim, Gwan-C.;Kim, Young-J.;Nichol, Janet
    • Proceedings of the KSRS Conference
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    • 2007.10a
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    • pp.556-559
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    • 2007
  • The Urban Environmental Quality (UEQ) indicates a complex and various parameters resulting from both human and natural factors in an urban area. Vegetation, climate, air quality, and the urban infrastructure may interact to produce effects in an urban area. There are relationships among air pollution, vegetation, and degrading environmental the urban heat island (UHI) effect. This study investigates the application of multi-spectral remote sensing data from the Landsat ETM and TM sensors for the mapping of air quality and UHI intensity in Seoul from 2000 to 2006 in fine resolution (30m) using the emissivity-fusion method. The Haze Optimized Transform (HOT) correction approach has been adopted for atmospheric correction on all bands except thermal band. The general UHI values (${\Delta}(T_{urban}-T_{rural})$) are 8.45 (2000), 9.14 (2001), 8.61 (2002), and $8.41^{\circ}C$ (2006), respectively. Although the UHI values are similar during these years, the spatial coverage of "hot" surface temperature (>$24^{\circ}C$) significantly increased from 2000 to 2006 due to the rapid urban development. Furthermore, high correlations between vegetation index and land surface temperature were achieved with a correlation coefficients of 0.85 (2000), 0.81 (2001), 0.84(2002), and 0.89 (2006), respectively. Air quality is shown to be an important factor in the spatial variation of UEQ. Based on the quantifiable fine resolution satellite image parameters, UEQ can promote the understanding of the complex and dynamic factors controlling urban environment.

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Effect of Different Dietary Fats on Colonic Epithelial Cell Phospholipid and Phosphatidyl Inositol Composition in DMH-treated Rats (서로 다른 종류의 식이지방이 1,2-Dimethylhydrazine으로 처리한 쥐의 대장점막 인지질 및 Phosphatidyl Inolsitol의 지방산조성에 미치는 영향)

  • 김채종;남정혜
    • The Korean Journal of Food And Nutrition
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    • v.9 no.1
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    • pp.59-68
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    • 1996
  • The study was designed to observe the effects of different dietary fat consumed in Korea with those of three other fats on colonic epithelial cell phospholipid and phosphatidyl inositol composition, which were known as biomarker for colon cancer. Male Sprague Dawley rats, at 7 weeks of age, were divided into control and 1,2-dimethylhydrazine (DMH) -treated group that was again subdivided into four groups. The experimental diets contained one of four dietary fats at 15%(w/w) level, those were, blend fat(BF), beef tallow(BT), corn oil (CO) or perilla oil (PO) At the same time, each rat was injected nth saline for control group or DMH twice a week for 6 weeks to five total dose of 180 mg/kg body weight. Dietary fatty acid composition influenced the fatty acid compositions of tissues. Proportions of C18:2 colonic mucosal phospholipid well reflected dietary level of C18:2 showing in decending CO>BF>PO> BT. The percentage of C20:4 in phospholipid was the higher in CO and BT groups and the lowest in PO groups. Incorporation of -linolenic acid in colonic mucosal lipid In perilla oil group was negatively correlated to the content of C20:4. Therefore, $\omega$3-linolenic acid rich in perilla oil could be a very important dietary source in controlling arachidonic acid level in colon epithelial cell. Therefore it could be recommend to use more perilla oil in meal preparation to reduce the risk factor against colon cancer.

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Socioeconomic Disparities in Breast Cancer Screening among US Women: Trends from 2000 to 2005

  • Kim, Jae-Young;Jang, Soong-Nang
    • Journal of Preventive Medicine and Public Health
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    • v.41 no.3
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    • pp.186-194
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    • 2008
  • Objectives : This study describes trends in the socioeconomic disparities in breast cancer screening among US women aged 40 or over, from 2000 to 2005. We assessed 1) the disparities in each socioeconomic dimension; 2) the changes in screening mammography rates over time according to income, education, and race; and 3) the sizes and trends of the disparities over time. Methods : Using data from the Behavioral Risk Factor Surveillance System (BRFSS) from 2000 to 2005, we calculated the age-adjusted screening rate according to relative household income, education level, health insurance, and race. Odds ratios and the relative inequality index (RII) were also calculated, controlling for age. Results : Women in their 40s and those with lower relative incomes were less likely to undergo screening mammography. The disparity based on relative income was greater than that based on education or race (the RII among low-income women across the survey years was 3.00 to 3.48). The overall participation rate and absolute differences among socioeconomic groups changed little or decreased slightly across the survey years. However, the degree of each socioeconomic disparity and the relative inequality among socioeconomic positions remained quite consistent. Conclusions : These findings suggest that the trend of the disparity in breast cancer screening varied by socioeconomic dimension. Continued differences in breast cancer screening rates related to income level should be considered in future efforts to decrease the disparities in breast cancer among socioeconomic groups. More focused interventions, as well as the monitoring of trends in cancer screening participation by income and education, are needed in different social settings.

Relationship between Spatter Generation and Waveform Factors in Transitional Condition of $CO_2$ Welding ($CO_2$ 용접의 천이이행 조건에서 스패터 발생과 파형인자와의 관계)

  • 강봉용;이창한;김희진;장희석
    • Journal of Welding and Joining
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    • v.16 no.4
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    • pp.39-46
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    • 1998
  • $CO_2$ gas shielded arc welding has been characterized with its harsh arc compared to Ar-based shielding gases and with its high level of spattere specially in welding current range of 250~300 amperes. In this range of welding current, the metal transfer mode showed to be changed from short circuit to globular with the increase of welding voltage resulting in so-called the transitional mode in which both modes of transfer appeared together. To characterize the transitional mode, the short circuit events were divided into two groups, i.e. normal short circuit (N.S.C) which has short circuit time $(t_s)$ over 2msec and instantaneous short circuit (I.S.C) of $t_s$$\leq$2msec. The experimental results showed that the number of N.S.C decreased almost linearly with the increase of welding voltage and appeared to be not related with spatter generation rate. However I.S.C became to be pronounced in the transitional condition and its number reached the maximum value at around 29.0 volts. Considering the relation with the spatter generation rate, it was found that the number of I.S.C had a very strong correlation with the spatter generation rate of the transitional condition. It was further demonstrated that spatter generation rate decreased quite linearly with the decrease of I.S.C frequency. It implies that I.S.C is the most important waveform factor controlling the spatter generation of the transitional mode, i.e. in the middle range of welding current. Based on these results, It was discussed that in the transitional mode the basic concept of waveform control for suppressing spatter generation would be different from the one applied for typical short circuit transfer mode of low welding current.

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Anti-inflammatory Action of Extract of Mori Cortex against Lipopolysaccharide-induced BV2 Microglia (지질다당체유도 BV2세포손상에 대한 상백피 추출물의 항염증작용)

  • Park, Shin-Hyung;Choi, Yung-Hyun;Eom, Hyun-Sup;Chi, Gyoo-Yong
    • Journal of Physiology & Pathology in Korean Medicine
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    • v.24 no.3
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    • pp.463-469
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    • 2010
  • This research is performed to obtain positive evidences of Mori cortex, a kind of oriental medicinal herbs, in the cellular levels. The extracts of M. cortex have shown anti-inflammatory effects against cutaneous inflammation and clinical effects on pulmonary asthma and congestion in oriental medicine. Thus BV2 cells were chosen because microglia are considered as the main immunocompetent cells in the central nervous system. Lipopolysaccharide (LPS)-induced microglial activation of cultured BV2 cells and subsequent release of nitric oxide (NO) and Prostaglandin E2 (PGE2) were effectively suppressed by methylene chloride extract of Morus alba L. (MEMA). From the inflammation-mediated mRNA and protein analyses, we showed that inducible NO synthase (iNOS), cyclooxygenase-2 (COX-2), interleukin-$1{\beta}$ (IL-$1{\beta}$) and tumor necrosis alpha (TNF-${\alpha}$) induced by LPS were markedly decreased by MEMA treatment. From the observation of nuclear factor-kB (NF-${\kappa}B$) which is controlling and mediating inflammation through COX-2 and iNOS, there showed that p65, a subunit of NF-${\kappa}B$, was increased in nuclear and $I{\kappa}B$, a competitor of NF-${\kappa}B$, was recovered in cytosol after MEMA treatment. These are corresponding with results of iNOS, COX-2, IL-$1{\kappa}$ and TNF-${\alpha}$, and confirm some suppressive effect against transcriptional activation of NF-${\kappa}B$. In conclusion, the anti-inflammatory action of M. cortex against BV2 microglia cells is expected to protect nerve tissues through suppression of neuronal inflammation in various neurodegenerative diseases.

Photovoltaic Generation System Design for Controlling the Temperature and Humidity of Hospital (병원내 온도와 습도조절을 위한 태양광 발전 시스템 설계)

  • Cho, Moon-Taek;Lee, Chung-Sik;Baek, Jong-Mu
    • Journal of the Korean Society of Radiology
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    • v.5 no.3
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    • pp.127-134
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    • 2011
  • In this paper we propose an improved PV generation systems. Improved systems for temperature and humidity controlled heating and air conditioning offers a pleasant environment within the building, set up chopper and consists of a PWM voltage type inverter. The proposed system is stable modulation for a one-chip microprocessor using the synchronous signal and control signals was treated. The proposed system is a PWM voltage type inverter and phase of the synchronous to the grid voltage to detect the system voltage and inverter output to drive the statue, so surplus power to connection was able to, certain buildings such as buildings or hospitals, temperature and humidity sensor is applied to the good dynamic characteristic could be obtained. In addition, the system was applied to the high power factor and low-frequency harmonics by maintaining the output load and grid to power to be supplied to a stable control could get a good result.

Optimized Design of Air Controlling System in Air Defense Gun Systems of Wheeled Vehicle (차륜형 대공포의 냉방기 최적화 설계)

  • Jeon, Ki-Hyun;Lee, Boo-Hwan;Lee, Dong-Hee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.37 no.11
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    • pp.1047-1051
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    • 2013
  • A modern combat vehicle needs to have a separate air-conditioning unit, although new combat systems tend to employ an integrated heating, cooling, and ventilating system. In this study, we investigated an air conditioning unit for an armored combat wheeled vehicle as a special use and military specification and performed a case study of a unique military combat vehicle. By using Fluent software, we tried to determine a suitable air ducting method and its location in the armored combat vehicle. The results show that an air-conditioning unit is one of the best solutions for wheeled vehicles that are not equipped with a cooling unit for their crews, and it can be applied to similar types of armored vehicles.

Geochemistry of Pb in Surface Sediments of the Yellow Sea: Contents and Speciation

  • Kim, Kyung-Tae;Lim, Chae-Reol;Cho, Yeong-Gil;Hong, Gi-Hoon;Lim, Suk-Hyun;Yang, Dong-Beom;Choi, Man-Sik
    • Journal of the korean society of oceanography
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    • v.35 no.4
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    • pp.179-191
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    • 2000
  • Both acid-leached and residual Pb in surface sediments of the Yellow Sea are analyzed in order to explain the spatial distribution of Pb contents and to determine a major controlling factor of its geographical distribution. Leached and residual Pb contents in surface sediments, which may have a different origin, show mirrored geographical distribution. Sediments with high residual Pb ( ${\sim}$20 ${\mu}$g/g; northeastern sand) contain low leached Pb (6-8 ${\mu}$g/g) while sediments with high leached Pb ( ${\sim}$20 ${\mu}$g/g; central mud) contain low residual Pb. As a result, total Pb shows little variation spatially. The mirrored distribution of both species also leads the grain-size dependence of Pb contents to be unclear although the grain-size dependence of other trace metals (Cr, Co, Ni etc.) has been well reported in this shelf. High leached Pb contents (>15 ${\mu}$g/g) were also observed in sediments off the Changjiang River mouth and off the Kyunggi Bay where they can be interpreted as the results of diagenetic accumulation and anthropogenic pollution, respectively. Residual Pb enriched in sands of the northeastern area might be from K-feldspar, which in turn allows the suggestion that northeastern sands may have originated from coastal erosion of granitic landmass or directly from nearby rivers.

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Effects of Site-scale Anisotropy of an Aquifer on Groundwater Remediation (지하수 오염복원에서 현장규모 이방성의 효과)

  • Lee, Jae-Min;Lee, Byung-Sun;Woo, Nam-Chil
    • Journal of Soil and Groundwater Environment
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    • v.15 no.6
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    • pp.17-28
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    • 2010
  • As a preliminary survey to improve efficiency of well-based permeable reactive barrier system for groundwater remediation, this site-scale study was carried to identify the flowpaths and controlling factors of plume at a remediation site in Suwon City, Korea. A total of 22 monitoring wells were installed as a grid system in the $4m{\times}4m$ square area by 1-m interval. For the groundwater characterization, various tests were performed including water-level monitoring, water sampling & analysis, pumping and slug tests, and tracer tests. The aquifer appeared to be unconfined with hydraulic conductivities (K) ranging from $2.6{\times}10^{-4}cm/s$ to $9.5{\times}10^{-3}cm/s$. The average linear velocity of groundwater was estimated to be $2.94{\times}10^{-6}m/s$, and the longitudinal dispersivity of a conservative tracer to be $5.94{\times}10^{-7}m^2/s$. Groundwater plume moves preferentially through the high-K zones, and the relatively high ion concentrations along the low-K zones implying deterred groundwater flow. Consequently, the spatial variation of hydraulic conductivity caused by aquifer heterogeneity and anisotropy appears to be the most important factor to maximize the effect of plume treatment system for application of in-situ groundwater remediation techniques.