• 설비공학논문집
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• 제24권4호
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• 공업화학
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• 제22권3호
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• pp.332-335
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• 2011

친환경 재료에 대한 관심이 급증함에 따라 재료의 구조적 기능성 및 투수성을 동시에 갖는 다공성 콘크리트의 활용이 증가되고 있다. 본 연구에서는 다공성 콘크리트에 제올라이트를 혼합하여 다양한 활용도를 갖는 다기능형 옥석 제품의 수질정화 능력을 평가하여 친환경제품으로서의 적합성을 검토하였다. 흐름이 없는 시험용 수조에서 시간에 따른 오염도 제거율은 T-N (70.6%), T-P (67.0%), BOD (57.7%), TOC (50.6%) 순으로 우수한 수질정화 특성을 보였다. 또한 유입 및 유출이 가능한 비점오염원에서 시간에 따른 유출부에서의 수질오염도 및 중금속 농도의 제거율은 Zn (99.9%), Pb (90.0%), BOD (69.2%), COD (33.5%) 순으로 흐름이 없는 경우에서의 오염도 제거율보다 수질정화 특성이 우수한 것으로 나타났다. 따라서 다공성 콘크리트 시설물을 실제 하천 등에 시공했을 시에 우수한 오염도 제거율을 바탕으로 친환경제품으로 적합함을 확인할 수 있었다.

• 대한기계학회논문집
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• 제14권2호
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• pp.430-439
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• 1990

Steady state turbulent airflow and unsteady characteristics of generation, transportation, and recovery behavior of contaminate particles in the simplified 2 dimensional Vertical Laminar Flow (VLF) type clean room was numerically simulated using the low Reynolds number k-over bar.epsilon- turbulent model. Characteristics of airflow in VLF type clean room are greatly affected by the recirculation zone around working surface. The recirculation zone must be considered at the time of clean room design because the recirculation zone whose area increases with increment of inlet velocity exerts bad influence upon the performance of clean room in terms of particle contamination. The location of maximum particle concentration changes from the location of particle source to the recirculation zone, while averaged particle concentration is reduced exponentially with time. Recovery time of clean room with spontaneous particle generation source is inversely proportional to inlet velocity. We introduce nondimensionalized recovery time through the dimensional analysis, which can indicates the general performance of clean room with design structure change. It was identified that .tau. is independent of inlet velocity and background concentration. Therefore .tau. can be the simple factor to compare the different structure of clean room in terms of dynamic response to contamination and becomes larger with better structure of clean room.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.29-33
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• 2000

MEMS, Micro Electro-Mechanical Systems, present one of the greatest advanced packaging challenges of the next decade. Historically hybrid technology, generally thick film, provided sensors and actuators while integrated circuit technologies provided the microelectronics for interpretation and control of the sensor input and actuator output. Brought together in MEMS these technical fields create new opportunities for miniaturization and performance. Integrated circuit processing technologies combined with hybrid design systems yield innovative sensors and actuators for a variety of applications from single crystal silicon wafers. MEMS packages, far more simple in principle than today's electronic packages, provide only physical protection to the devices they house. However, they cannot interfere with the function of the devices and often must actually facilitate the performance of the device. For example, a pressure transducer may need to be open to atmospheric pressure on one side of the detector yet protected from contamination and blockage. Similarly, an optical device requires protection from contamination without optical attenuation or distortion being introduced. Despite impediments such as package standardization and complexity, MEMS markets expect to double by 2003 to more than ＄9 billion, largely driven by micro-fluidic applications in the medical arena. Like the semiconductor industry before it. MEMS present many diverse demands on the advanced packaging engineering community. With focused effort, particularly on standards and packaging process efficiency. MEMS may offer the greatest opportunity for technical advancement as well as profitability in advanced packaging in the first decade of the 21st century! This paper explores MEMS packaging opportunities and reviews specific technical challenges to be met.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.509-512
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• 1999

The main problem in porcelain as a high voltage insulator is that the water film is felled on the insulator surface due to rain, flog, and dew. In the presence of contamination. leakage current increases which may lead to flashover that could be followed by an outage of the power system. These days, high voltage polymer outdoer insulators have been studied and widely used, because they have excellent electrical and mechanical properties, superior performance of flashover for contamination. light weight, easy installation or handling. no maintenance during service, competitive price, and so on. First of a1l the excellent performance of the silicone rubber in polluted and wet conditions is attributed to the ability of the material to maintain the hydrophobicity of the surface in the presence of severe contaminants and wet conditions. This is due to a low surface energy of the silicone rubber. But the leakage current and some surface discharge occurs on the surface of insulator when the insulator is used for a long time. So the leakage current and the surface discharge current are important lo estimate the condition of the silicone rubber surface. In this paper, the average leakage current the surface discharge current the surface rubber surface with the salt fog condition for the first stage.

• Journal of the Korean Wood Science and Technology
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• 제47권6호
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• pp.667-673
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• 2019

The performance of a wooden deck made of refractory materials that have difficulties in achieving target penetrations as stipulated in the specification and quality standards for treated wood in Korea, was assessed via a case study in this research. A wooden deck built in Jinju in 2009 was selected for this study because of its fabrication method using pressure and treated refractory materials. The penetration and retention analysis did not satisfy the domestic standard for treated wood. Inspection of the deck in 2019 revealed that the deck had been attacked by decay fungi. Cap rails showed much deeper and wider checking on their surface compared with the top and base rails, resulting in a severe fungal attack. The decking boards exhibited severe fungal decay primarily in the end parts. However, the rails and balusters without checks and posts were virtually free of fungal attack irrespective of the preservative penetration measures. Copper content in the soil 5 cm away from the deck was less than 150 mg/kg, implying that copper movement in the soil was very limited. These results suggest that the inhibition of surface propagation and the protection of end surfaces are essential factors in increasing the longevity of treated wooden decks; further, the results also showed that the deck was within an acceptable range from the point of copper contamination.

• 항공우주시스템공학회지
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• 제7권3호
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• pp.51-57
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• 2013

This study describes the Federal Aviation Administration(FAA) certification policy for approving the use of Type II, III, and IV deicing/anti-icing fluids on small category airplanes. These fluids can be characterized as non-Newtonian, pseudo-plastic fluids, also known as "thickened" fluids. Deicing fluids are used before takeoff to remove frost or ice contamination, while anti-icing fluids are used before takeoff to prevent frost or ice contamination from occurring for a period of time(referred to as "holdover time") after application. Thickened deicing/anti-icing fluids can affect airplane performance and handling characteristics and their residue may cause stiff or frozen flight controls. This study also describes an approval process that may be used by type certificate holders and applicants for a type certificate under parts 23 to support operational use of these fluids on their airplanes.

• 대한기계학회논문집B
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• 제29권5호
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• pp.599-608
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• 2005

Controlling particle contamination is important to increase storage capacity as the flying height of a slider in a hard disk drive decreases. Since precise detection and analysis of particles are primary steps of particle control in a HDD, many researchers have used sampling methods. In this paper, we newly designed a particle sampler and conducted performance evaluation of the sampler. Also, we conducted particle sampling from the HDD using the particle sampler and analysis of sampled particles by SEM and AES. Experimental results show that the particles generated by the slide-disk interaction mainly came from the disk surface.

• 한국입자에어로졸학회지
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• 제5권3호
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• pp.95-109
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• 2009

A low temperature plasma process has been widely used for semiconductor fabrication and can also be applied for the preparation of solar cell, MEMS or NEMS, but they are notorious in the point of particle contamination. The nano-sized particles can be generated in the low temperature plasma process and they can induce several serious defects on the performance and quality of microelectronic devices and also on the cost of final products. For the preparation of high quality thin films of high efficiency by the low temperature plasma process, it is desirable to increase the deposition rate of thin films with reducing the particle contamination in the plasmas. In this paper, we introduced the studies on the generation and growth of nanoparticles in the low temperature plasmas and tried to introduce the recent interesting studies on nanoparticle generation in the plasma reactors.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.