• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.482-483
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• 2009

In chemical mechanical planarization (CMP) process, the uniformity of stress acting on wafer surface is a key factor for uniform material removal of thin film especially in the oxide CMP. In this paper, we analyze the stress on the contact region between wafer and pad with finite-element analysis (FEA). The setting pressure acting on wafer back side was $500g/cm^2$ and the retainer pressure was changed from 300 to $700g/cm^2$. The polishing test is also done with the same conditions. The material removal rate profiles well-matched with stress distribution.

• Tribology and Lubricants
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• 제18권3호
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• pp.187-193
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• 2002

The half-value breadth off-ray diffraction profile line is generally used for a factor in nondestructive hardness measuring method of steel. In this paper, the problem in using the half-value breadth for the hardness measuring method is evaluated in strain hardened steel. And new hardness measuring method using residual stress is proposed X-ray diffraction test after rolling contact fatigue test of ball bearing with inner race of various hardness are carried out to measure the distribution of residual stress and half-value breadth from surface. The result of this study shows that there is little correlation between half-value breadth and hardness in the higher strength region and in the region increasing the hardness by strain hardening. But the magnitude of residual stress on/under race after rolling contact fatigue test becomes clearly to be correlative with hardness. Thus, it is concluded that the hardness of strain hardened steel can be estimated by this relationship between residual stress and hardness.

• Tribology and Lubricants
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• 제38권3호
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• pp.73-83
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• 2022

This paper is concerned with an analysis of a surface edge crack emanated from a sharp contact edge. For a geometrical model, a square wedge is in contact with a half plane whose materials are identical, and a surface perpendicular crack initiated from the contact edge exists in the half plane. To analyze this crack problem, it is necessary to evaluate the stress field on the crack line which are induced by the contact tractions and pseudo-dislocations that simulate the crack, using the Bueckner principle. In this Part I, the stress filed in the half plane due to the contact is re-summarized using an asymptotic analysis method, which has been published before by the author. Further focus is given to the stress field in the half plane due to a pseudo-edge dislocation, which will provide a stress solution due to a crack (i.e. a continuous distribution of edge dislocations) later, using the Burgers vector. Essential result of the present work is the corrective functions which modify the stress field of an infinite domain to apply for the present one which has free surfaces, and thus the infiniteness is no longer preserved. Numerical methods and coordinate normalization are used, which was developed for an edge crack problem, using the Gauss-Jacobi integration formula. The convergence of the corrective functions are investigated here. Features of the corrective functions and their application to a crack problem will be given in Part II.

• 대한기계학회논문집
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• 제14권3호
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• pp.624-635
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• 1990

본 연구에서는 마멸과정을 선형파괴역학적 관점에서 해석하여, 탄성체의 표면 에 산재되어 있는 표면균열의 전파거동을 마멸과정규명의 입장에서 살펴보고자 한다. 우선 마멸거동에 관한 파괴역학적 접근방식에 의한 마멸이론의 확립을 위해서, 표면균 열이 내부균열보다 그 전파 가능성이 높다고 한 Keer등의 주장에 착안하여 Hertz 접촉 압력하의 경사진 표면균열의 전파거동을 선형파괴역학적으로 해석하고자 한다. 이론 해석에 있어서는 표면균열을 인상전립의 연속분포로 치환하고, 전립밀도분포함수에 관 한 특이적분방정식을 유도해서 Erdogangupta의 방법을 이용하여 그 해를 구하였다.

• Tribology and Lubricants
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• 제23권5호
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• pp.187-194
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• 2007

The profile of the roller in the axial direction is the main design factor in order to increase endurance life against the contact fatigue due to the stress concentration along the edge of the roller. Even under the elas-tohydrodynamic lubrication (ehl) conditions, the stress concentration along the edge of the roller greatly worsens the fatigue life both for the roller and contacting body. In this study, roller contacts of finite axial length are studied for the film thickness and pressure of ehl. For the real contact behaviors under the ehl conditions, multigrid and multi-level method is applied so that much higher loading conditions can be investigated. Several axial profiles of roller are investigated to verify how both ehl film and pressure are generated and some of them are recommended for the ehl contact condition.

• 대한의용생체공학회:의공학회지
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• 제20권1호
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• pp.37-44
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• 1999

인공 슬관절에 사용되는 초고분자량 폴리에틸렌(Ultra-high molecular weight polyethylene : UHMWPE)의 마모는 삽입물의 수명을 결정하는 주요 요인으로 작용한다. UHMWPE의 마모로 입자가 발생하여 조직반응을 일으키고 이에 따른 일련의 반응으로 골용해가 일어나 인공관절의 실패의 원인으로 작용한다. 여러 보고들에 의하면 관절 운동시 발생하는 접촉응력은 UHMWPE의 마모에 영향을 미치는 주요한 인자 중 하나로 알려져 있다. 그러나 이러한 보고들은 관절 접촉면에서의 접촉 조건만을 고려했고 UHMWPE 삽입물을 지지하고 있는 금속 지지판과의 접촉면에서의 접촉 조건은 고려하지 않았다. 본 연구에서는 이러한 접촉 조건들을 고려하여 UHMWPE의 모양, 두께, 마찰, 굴곡 정도 그리고 구성 요소들에 대한 UHMWPE 표면과 내부에서의 응력해석을 통해 이들 변수가 UHMWPE의 마모현상에 미치는 영향을 알아보았다. UHMWPE의 모양에 따른 관절의 일치정도(conformity)에 대한 영향의 경우, 일치정도가 높은 모델이 응력을 줄여줄 수 있는 유형으로 나타났으며, 금속 지지판과의 접촉면에서 접촉조건을 준 경우가 완전히 결합된 것으로 가정한 경우보다 UHMWPE 내부에서의 최대 응력이 1-2mm 더 아래에서 나타났다. 또한 UHMWPE로만 된 유형이 금속 지지판이 있는 유형보다 낮은 응력분포를 보여줌으로써 높은 응력으로 인한 UHMWPE의 마모와 균열을 줄이기 위해서는 UHMWPE로만 된 유형의 삽입물의 사용이 좋을 것으로 사료되었다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2003년도 학술대회지
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• pp.201-209
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• 2003

In the mixed lubrication regime, the roughness effects are very important due to the presence of interacting asperities. An average Reynolds equation using flow factors is very useful to determine effects of surface roughness on mixed lubrication. In this paper, the pressure flow factors and shear stress factor for Gaussian and non-Gaussian surfaces are evaluated in terms of kurtosis and skewness. particularly, the elastic deformation of the surface is considered.

• Structural Engineering and Mechanics
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• 제25권4호
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• pp.383-403
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• 2007

The contact problem for an elastic layer resting on an elastic half plane is considered according to the theory of elasticity with integral transformation technique. External loads P and Q are transmitted to the layer by means of two dissimilar rigid flat punches. Widths of punches are different and the thickness of the layer is h. All surfaces are frictionless and it is assumed that the layer is subjected to uniform vertical body force due to effect of gravity. The contact along the interface between elastic layer and half plane will be continuous, if the value of load factor, ${\lambda}$, is less than a critical value, ${\lambda}_{cr}$. However, if tensile tractions are not allowed on the interface, for ${\lambda}$ > ${\lambda}_{cr}$ the layer separates from the interface along a certain finite region. First the continuous contact problem is reduced to singular integral equations and solved numerically using appropriate Gauss-Chebyshev integration formulas. Initial separation loads, ${\lambda}_{cr}$, initial separation points, $x_{cr}$, are determined. Also the required distance between the punches to avoid any separation between the punches and the layer is studied and the limit distance between punches that ends interaction of punches, is investigated. Then discontinuous contact problem is formulated in terms of singular integral equations. The numerical results for initial and end points of the separation region, displacements of the region and the contact stress distribution along the interface between elastic layer and half plane is determined for various dimensionless quantities.

• Tribology and Lubricants
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• 제32권1호
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• pp.18-23
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• 2016

The effective case depth for case-hardened rolling bearing has been discussed. For this purpose, rolling contact fatigue tests for ball bearings built with inner race of various hardness values were conducted until L₁₀ calculating rating life using a bearing life test machine under radial loading. Then, the distribution of residual stress below the inner raceway, which depended on the hardness value, was measured by X-ray diffraction. As a result, the linear relationship was established between the hardness value of the inner race and the theoretical shear stress evaluated at the depth where the residual stress disappeared below the inner raceway. Based on the relationship, it could be found that the factor of safety in bearing manufacturer’s rules for the effective case depth of case hardened rolling bearings was set higher. However, it could be also found that the hardness values at the depth where the maximum shearing stress acted below the raceway surface in a tapered roller bearing hardened by the carburizing process, were not sufficient for preventing plastic deformation under the basic dynamic load rating. Consequently, further efforts were still required to reduce or to disperse the contact load on the material design of a rolling bearing in order to prolong its life.

• 한국생산제조학회지
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• 제25권4호
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• pp.245-252
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• 2016

Girth gears are applied in the mining, cement, and mineral processing industries and used in various types of horizontal mills, rotary dryers and kilns, and other heavy-gear ring applications. The large ring gears are normally fitted outside mills or kilns to provide the primary rotational drive. Recently, an external pinwheel gear set (e-PGS) was introduced to overcome manufacturing problems associated with girth gears. e-PGS is also suitable for low-speed, heavy-duty mechanical transmission and dusty and poor-lubrication conditions. This paper first presents a new profile modification of root relief for the e-PGS cam pinion. We then investigate load-stress factors to estimate the surface fatigue life by varying the shape design parameters. The results show that the contact fatigue life of an e-PGS can be extended significantly by increasing the profile shift coefficient. However, support bearing life of the pinwheel depends more on the contact force distribution than the profile shift coefficient.