• Title/Summary/Keyword: contact hole

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Control of Haptic Hand Controller Using Collision Detection Algorithm (충돌감지 알고리듬을 적용한 햅틱 핸드 컨트롤러의 제어)

  • 손원선;조경래;송재복
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.992-995
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    • 2003
  • A haptic device operated by the user's hand can receive information on position and orientation of the hand and display force and moment generated in the virtual environment to the hand. For realistic haptic display, the detailed information on collision between objects is necessary. In the past, the point-based graphic environment has been used in which the end effector of a haptic device was represented as a point and the interaction of this point with the virtual environment was investigated. In this paper, the shape-based graphic environment is proposed in which the interaction of the shape with the environment is considered to analyze collision or contact more accurately. To this end. the so-called Gilbert-Johnson-Keerthi (GJK) algorithm is adopted to compute collision points and collision instants between two shapes in the 3-D space. The 5- DOF haptic hand controller is used with the GJK algorithm to demonstrate a peg-in-hole operation in the virtual environment in conjunction with a haptic device. It is shown from various experiments that the shape-based representation with the GJK algorithm can provide more realistic haptic display for peg-in-hole operations.

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Characteristics of Vanadium Oxide Grown by Atomic Layer Deposition for Hole Carrier Selective Contacts Si Solar Cells (실리콘 전하선택접합 태양전지 적용을 위한 원자층 증착법으로 증착된 VOx 박막의 특성)

  • Park, Jihye;Chang, Hyo Sik
    • Korean Journal of Materials Research
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    • v.30 no.12
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    • pp.660-665
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    • 2020
  • Silicon heterojunction solar cells can achieve high conversion efficiency with a simple structure. In this study, we investigate the passivation characteristics of VOx thin films as a hole-selective contact layer using ALD (atomic layer deposition). Passivation characteristics improve with iVoc (implied open-circuit voltage) of 662 mV and minority carrier lifetime of 73.9 µs after post-deposition annealing (PDA) at 100 ℃. The improved values are mainly attributed to a decrease in carbon during the VOx thin film process after PDA. However, once it is annealed at temperatures above 250 ℃ the properties are rapidly degraded. X-ray photoelectron spectroscopy is used to analyze the chemical states of the VOx thin film. As the annealing temperature increases, it shows more formation of SiOx at the interface increases. The ratio of V5+ to V4+, which is the oxidation states of vanadium oxide thin films, are 6:4 for both as-deposition and annealing at 100 ℃, and 5:5 for annealing at 300 ℃. The lower the carbon content of the ALD VOx film and the higher the V5+ ratio, the better the passivation characteristics.

Development of scaling approach based on experimental and CFD data for thermal stratification and mixing induced by steam injection through spargers

  • Xicheng Wang;Dmitry Grishchenko;Pavel Kudinov
    • Nuclear Engineering and Technology
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    • v.56 no.3
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    • pp.1052-1065
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    • 2024
  • Advanced Pressurized Water Reactors (APWRs) and Boiling Water Reactors (BWRs) employ a suppression pool as a heat sink to prevent containment overpressure. Steam can be discharged into the pool through multi-hole spargers or blowdown pipes in both normal and accident conditions. Direct Contact Condensation (DCC) creates sources of momentum and heat. The competition between these two sources determines the development of thermal stratification or mixing of the pool. Thermal stratification is of safety concern as it reduces the cooling capability compared to a completely mixed pool condition. In this work we develop a scaling approach to prediction of the thermal stratification in a water pool induced by steam injection through spargers. Experimental data obtained from large-scale pool tests conducted in the PPOOLEX and PANDA facilities, as well as simulation results obtained using validated codes are used to develop the scaling. Two injection orientations, namely radial injection through multi-hole Sparger Head (SH) and vertical injection through Load Reduction Ring (LRR), are considered. We show that the erosion rate of the cold layer can be estimated using the Richardson number. In this work, scaling laws are proposed to estimate both the (i) transient erosion velocity and (ii) the stable position of the thermocline. These scaling laws are then implemented into a 1D model to simulate the thermal behavior of the pool during steam injection through the sparger.

Selective etching of SiO2 using embedded RF pulsing in a dual-frequency capacitively coupled plasma system

  • Yeom, Won-Gyun;Jeon, Min-Hwan;Kim, Gyeong-Nam;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.136.2-136.2
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    • 2015
  • 반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

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Electrical Characteristics Analysis of Resistive Memory using Oxygen Vacancy in V2O5 Thin Film (산소공공을 이용한 V2O5 저항성 메모리의 전기적인 동작특성 해석)

  • Oh, Teresa
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.10
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    • pp.1827-1832
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    • 2017
  • To observe the characteristics to be a resistive memory of $V_2O_5$ deposited by oxygen various gas flows and annealed, the hysteresis curves of $V_2O_5$ were analyzed. The good resistive memory was obtained from the electrical characteristics of $V_2O_5$ films with the Schottky contact as a result of electron-hole pair, and the oxygen vacancy generated from the annealing process contributes the high quality of Schottky contact and the formation of resistive memories. The balanced Schottky contacts owing to the oxygen vacancy effect as the result of an ionic reaction were formed at the $V_2O_5$ film annealed at $150^{\circ}C$ and $200^{\circ}C$ and the balanced Schottky contact with negative to positive voltages enhanced the electrical operation with write/erase states according to the forward or reverse bias voltages for the resistive memory behavior due to the oxygen vacancy.

Current Status of Emitter Wrap-Through c-Si Solar Cell Development (에미터 랩쓰루 실리콘 태양전지 개발)

  • Cho, Jaeeock;Yang, Byungki;Lee, Honggu;Hyun, Deochwan;Jung, Woowon;Lee, Daejong;Hong, Keunkee;Lee, Seong-Eun;Hong, Jeongeui
    • Current Photovoltaic Research
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    • v.1 no.1
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    • pp.17-26
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    • 2013
  • In contrast to conventional crystalline cells, back-contact solar cells feature high efficiencies, simpler module assembly, and better aesthetics. The highest commercialized cell and module efficiency was recorded by n-type back-contact solar cells. However, the mainstream PV industry uses a p-type substrate instead of n-type due to the high costs and complexity of the manufacturing processes in the case of the latter. P-type back-contact solar cells such as metal wrap-through and emitter wrap-through, which are inexpensive and compatible with the current PV industry, have consequently been developed. In this paper the characteristics of EWT (emitter wrap-through) solar cells and their status and prospects for development are discussed.

Development and Application of an Explosion Modeling Technique Using PFC (PFC3D에서의 폭원모델링 기법의 개발 및 적용)

  • Choi Byung-Hee;Yang Hyung-Sik;Ryu Chang-Ha
    • Explosives and Blasting
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    • v.22 no.4
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    • pp.7-15
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    • 2004
  • An explosion modeling technique was developed by using the spherical discrete element code, PFC3D, which can be used to model the dynamic stress wave propagation phenomenon. The modeling technique is simply based on an idea that the explosion pressure should be applied to a PFC3D particle assembly not in the form of an external force (body force), but in the form of a contact force (surface force). According to this concept, the explosion pressure is applied to the wall particles by the scheme of radius expansion/contraction of inner-hole particles. The output wall force is compared to the input hole pressure in every time step, and a correction routine is activated to control the radius multiplier of the inner-hole particles. A comparative blast simulation far a cement mortar block of $80\times90\times80mm$ was conducted by using the conventional explosion modeling method and the new one. The results of the simulation are presented in a qualitative fashion.

Heat Transfer Modeling by the Contact Condition and the Hole Distance for A-KRS Vertical Disposal (A-KRS 수직 처분공 접촉 조건 및 처분공 간의 거리에 따른 열전달 해석)

  • Kim, Dae-Young;Kim, Seung-Hyun
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.17 no.3
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    • pp.313-319
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    • 2019
  • The A-KRS (Advanced Korean Reference Disposal System) is the disposal concept for pyroprocessed waste, which has been developed by the Korea Atomic Energy Research Institute. In this disposal concept, the amount of high-level radioactive waste is minimized using pyrochemical process, called pyroprocessing. The produced pyroprocessed waste is then solidified in the form of monazite ceramic. The final product of ceramic wastes will be disposed of in a deep geological repository. By the way, the decay heat is generated due to the radioactive decay of fission products and raises the temperature of buffer materials in the near field of radioactive waste repository. However, the buffer temperature must be kept below $100^{\circ}C$ according to the safety regulation. Usually, the temperature can be controlled by variation of the canister interdistance. However, KAERI has modelled thermal analysis under the boundary condition, where the waste canisters are in direct contact with each other. Therefore, a reliable temperature analysis in the disposal system may fail because of unknown thermal resistence values caused by the spatial gap between waste canisters. In the present work, we have performed thermal analyses considering the gap between heating elements and canisters at the beginning of canister loading into the radioactive waste repository. All thermal analyses were performed using the COMSOL software package.

Optimization of Pulsed Nd:YAG Laser Welding Conditions for Sealing of Lithium-ion Battery (리튬이온전지의 밀봉용접을 위한 펄스 Nd:YAG레이저 용접조건의 최적화)

  • Kim, Jong-Do;Yoo, Seung-Jo;Kim, Jang-Soo
    • Journal of Advanced Marine Engineering and Technology
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    • v.30 no.5
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    • pp.623-628
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    • 2006
  • Laser material processing is a very fast advancing technology for various industrial applications. because of many advantages. Its major advantage of less and controlled heat input has been exploited successfully for the very critical application of aluminium alloy welding. This study suggested the occurrence source of weld-defects and its solution methods in a welding of lithium ion battery by pulsed Nd:YAG laser. In experiment. battery case has changed over joint geometry from welding of side position to flat one. In the case of a electrolyte injection hole in order to seal it. welding is carried out after pressing Al ball. At this time. an eccentric degree. contact length and gap are worked as a major parameters. As improving the method of Al ball pressing. it was able to reduce an eccentricity. increase the contact length and decrease gap. As a results of a experiment. a sound weld bead shape and crack-free weld bead can be obtained.

Thermal Analysis on Twin-Roll Type Strip Continuous Casting Process Considering Contact Thermal Resistance between Molten Metal and Cooling Roll (쌍롤식 박판 연속주조공정에 있어서 용탕과 냉각롤의 접촉 열저항을 고려한 전열해석)

  • Kim, Y.D;Kim, C.G
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.1
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    • pp.189-205
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    • 1996
  • The twin-roll type strip continuous casting process(or direct rolling process) of steel materials is characterized by two rotating water cooled rolls receiving a steady supply of molten metal which solidifies onto the rolls. A solidification analysis of molten metal considering phase transformation and thermofluid is performed using finite diffefence method with curvilinear coordinate to reduce computing time and molten region analysis with arbitrary shape. An enthalpy-specific heat method is used to determine the temperatures inthe roll and the steel. The temperature distribution of cooling roll is calculated using two dimensional finite element method, because of complex roll shape due to cooling hole in rolls and improvemnt accuracy of calculation result. The energy equaiton of cooling roll is solved simultanuously with the conservation equaiton of molten metal in order to consider heat transfer through the cooling roll. The calculated roll temperature is compared to experimental results and the heat transfer coefficient between cooling roll surface and rolling material(steel) is also determined from comparison of measured roll temperature and calculated temperature.