Fabrication and microstructure of (Sr .Ca)Ti $O_3$ Ceramic Thin Films by RF Sputtering Method-
(RF 스퍼터링법에 의한 (SrCa)Ti $O_3$ 세라믹 박막의 제초 및 미세구조)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1997.11a
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- pp.189-193
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- 1997