• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.42-44
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• 2003

The paper presents the method and apparatus for conformal photoresist spray coating on the 3D structured substrate. The system consists of a high-temperature-rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. The coating uniformity is acquired by controlling the moving speed of the ultrasonic spray nozzle across the substrate which is rotated constantly. To coat the photoresist conformally the spray angle of the nozzle and the temperature of the substrate are controlled during spray coating. The rotational chuck can be heated up by hot air or $N_2$. The photoresist (AZ1512) has been coated on the 3D structured wafer by spray coating system and the characteristics have been evaluated.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.18 no.6
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• pp.107-112
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• 2018

Shielding effectiveness (SE) improvement with EMI shield layers fabricated by conformal spray coating system was studied. Silver or Nickel powder filled acrylic resin were sprayed on the samples. We compared the performance with the viscosity of 400 cPs and 100 cPs cases. The thickness range of the coating layer was 20 to 50 um for the silver, 60 to 120 um for the nickel. The shielding effectiveness was measured by ASTM D4935 using coaxial type TEM-cell. The silver-filled resin showed much better performance than that of the nickel-filled resin. The shielding effectiveness increased almost proportional to the thickness of the coating layers until being saturated around 63 dB for the silver-layer or around 34 dB for the nickel-layer. The best performance measured in this study was the shielding effectiveness of 63 dB with $35{\mu}m-thick$ of silver-layer.