• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.15-18
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• 2005

We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.248-248
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• 2012

Synthesis graphene on Cu substrate by plasma-enhanced chemical vapor deposition (PE-CVD) is investigated and its quality's affection factors are discussed in this work. Compared with the graphene synthesized at high temperature in chemical vapor deposition (CVD), the low-temperature graphene film by PE-CVD has relatively low quality with many defects. However, the advantage of low-temperature is also obvious that low melting point materials will be available to synthesize graphene as substrate. In this study, the temperature will be kept constant in $400^{\circ}C$ and the graphene was grown in plasma environment with changing the plasma power, the flow rate of precursors, and the distance between plasma generator coil and substrates. Then, we investigate the effect of temperature and the influence of process variables to graphene film's quality and characterize the film properties with Raman spectroscopy and sheet resistance and optical emission spectroscopy.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.48-54
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• 2012

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and SF6 as an additive gas under thermal chemical vapor deposition system. The geometries of as-grown carbon materials were investigated with increasing the reaction temperature as the increment of $25^{\circ}C$ from $650^{\circ}C$ up to $800^{\circ}C$. At $650^{\circ}C$, the embryos for carbon coils were formed. With increasing the reaction temperature to $700^{\circ}C$, the coil-type geometries were developed. Further increasing the reaction temperature to $775^{\circ}C$, the development of wave-like nano-sized coils, instead of nano-sized coils, and occasional appearance of micro-sized carbon coils could be observed. Fluorine in $SF_6$ additive may shrink the micro-sized coil diameter via the reduction of Ni catalyst size by fluorine's etching role. Finally, the preparation of the micro-sized carbon coils having the smaller coil diameters, compared with the previously reported ones, could be possible using $SF_6$ additive.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.431-431
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• 2012

A compact tokamak reactor concept as a 14 MeV neutron source is desirable from an economic viewpoint for a fusion-driven transmutation reactor. LAR (Low Aspect Ratio) tokamak allows a potential of high "see full txt" operation with high bootstrap current fractions and can be used for a compact fusion neutron source. For the optimal design of a reactor, a radial build of reactor components has to be determined by considering the plasma physics and engineering constraints which inter-relate various reactor components and are constrained to use ITER physics and technology. In a transmutation reactor, the blanket should produce enough tritium for tritium self-sufficiency and the neutron multiplication factor, keff should be less than 0.95 to maintain sub-criticality. The shield should provide sufficient protection for the superconducting toroidal field (TF) coil against radiation damage and heating effects of the fusion neutrons, fission neutrons, and secondary gammas. In this work, characteristics of transmutation reactor based on LAR tokamak is investigated by using the coupled system analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.360-360
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• 2012

Graphene shows diverse novel physical properties arising from its peculiar electronic states, so called Dirac electrons. Especially, effect of magnetic field is very unique, exhibiting exotic Landau level (LL) splitting. LLs are substantially modified by spins of Dirac electrons and pseudo-spins. The degeneracy of LLs is lifted to show splitting by electron-electron interaction and by the Zeeman effect. We investigated the magneto-optical absorption of graphene subjected to ultra-high magnetic field. Samples were prepared by the CVD method deposited on GaAs and Quart substrate. We have confirmed existence of graphene on each substrate by the micro-Raman spectroscopy. Next, we conducted magneto-absorption measurements in magnetic field up to 120 T by the single-turn coil (STC) method. We could observe absorption peak at 65 T and 100 T, respectively, probably arising from the LL inter-band transitions.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.582-582
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• 2012

Characteristics of a fusion-driven transmutation reactor was investigated. A compact reactor concept is desirable from an economic viewpoint. For the optimal design of a reactor, a radial build of reactor components has to be determined by considering the plasma physics and engineering constraints which inter-relate various reactor components. In a transmutation reactor, design of blanket and shield play a key role in determining the size of a reactor; the blanket should produce enough tritium for tritium self-sufficiency, the transmutation rate of waste has to be maximized, and the shield should provide sufficient protection for the superconducting toroidal field (TF) coil. To determine the radial build of the blanket and the shield, not only a radiation transport analysis but also a burnup calculation were coupled with the system analysis and it allowed the self-consistent determination of the design parameters of a transmutation reactor.

• The Transactions of the Korean Institute of Power Electronics
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• v.7 no.3
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• pp.237-243
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• 2002

The single phase angle control system may become noisy when speed Is modulated with a conventional TRIAC AC controller. But this system is widely used despise of occurring sub-harmonic current because of its simply structure and low cost. Most of the vacuum cleaner drive control system regulates TRIAC's phase angle, so that it is controlled the speed. In the case of marketing product, it is not considered linearity of the speed to minimize occurring harmonic current. The sub-harmonic current reduces effectively in regulating specification TRIAC trigger phase angle. In this paper, we examined about characteristics of phase angle controller and parameter of parallel coil for eliminating sub-harmonic current.

• Proceedings of the KIEE Conference
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• 1996.07a
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• pp.199-201
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• 1996

The design and manufacturing results of a 16 tesla/45mm bore superconducting magnet is presented. The system consists of an 8.2 tesla(at 4.2K) outer NbTi coil with a bore I.D. of 261mm, a winding O.D. of 453mm and the length of 430mm which is connected in series with a 5.6 tesla(at 4.2K) middle and a 4.7 tesla(at 4.2K) inner insert coil constructed of multifilamentary $Nb_3Sn$. The middle and inner insert coil are reacted after winding. Also, epoxy impregnation is accomplished at $Nb_3Sn$ coils using a low viscosity crack resistant epoxy which is forced into the coil with a series of vacuum and over atmosphere pressure cycle.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.161-168
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• 1998

Reactive ion etching process for InGaAs/InP using the CH4/H2 high density inductively coupled plasma was investigated. The experimental design method proposed by Taguchi was utilized to cover the whole parameter range while maintaining reasonable number of actual experiments. Results showed that the ICP power mainly affects surface roughness and verticality of the sidewall, bias power does etch rate and verticality, CH4 gas concentraion does the verticality and etch rate, and the distance between the induction coil and specimen mostly affects the surface roughness. It was also observed that the chamber pressure is the dominant parameter for the etch rate and verticality of the sidewall. The optimum condition was ICP power 700W, bias power 150 W, 15% $CH_4$, 7.5 mTorr, and 14 cm distance, resulting in about 3 $\mu\textrm{m}$/hr etch rate with smooth surfaces and vertical mesa sidewalls.

• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.85-90
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• 1997

A new ionized sputtering process was developed to fill small trench or via using additional ionizing mechanism of sputtered particles from 32cm $AlCu_x$(x=0.5%) cathode target with rotating magnet, then drawn toward substrate by small negative DC potential. The radial uniformity in RFI magnetron sputtering was studied by plasma diagnosis and appropriate RFI coil design to improve it. Optical emission intensities of excited species. $Ar^{\circ}, \;Ar^+;Al^+, \;Al^{\circ}$ are measured across the radial direction and showed close correlation with deposit's bottom to top thickness ratios in trenches and vias of submicron opening and 1.5 aspect ratio. After increase of the diameter of RF coil from 29 cm to 32 cm and improved the power leading feedthrough symmetry by removal of asymmetric single turn region, there was an increase of uniformity from 7.5% to 1.5% in bottom to top thickness ratio in 0.6 $\mu\textrm{m}$ vias.