• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Polymer(Korea)
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• v.30 no.6
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• pp.519-524
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• 2006

Poly(4-vinyl pyridine) (PVP) and its copolymers, poly(4-vinyl pvridine- co-acrylamide) and poly(4-vinyl pyridine-co-allylamine), were synthesized and evaluated for application to organic solder-ability preservatives (OSP). The copolymers were synthesized by radical polymerization of vinyl pyridine in the presence of acrylamide or allylamine as a comonomer. Various kinds of polymers with different chemical composition were synthesized by varying the feed ratio of monomers and their low $M_w$ polymers can be obtained by adding 2-mercaptoethanol as a chain transfer agent during poly-merization. All the polymers showed good adhesion properties on Cu pad when they were spin-coated. Especially, allylamine -containing copolymers showed both good adhesion and solubility properties. Also, they exhibited better thermal stability than PVP homopolymer and such thermal properties were changed depending on the chemical composition and their $M_w$, which were evidenced by the measurement of oxygen induced temperature (OIT). From the OIT measurement, poly(4-vinyl pyridine- co-allylamine) was thermally stable up to $230^{\circ}C$ for 70 min in the 100% oxygen environment. As a result, allylamine-containing copolymers can be considered as a promising OSP coating material that has excellent thermal and adhesive properties applicable to the present microelectronic package processes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.5
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• pp.499-503
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• 2022

La_0.7Sr_0.3MnO₃ precursor solution were prepared by a sol-gel method. La_0.7Sr_0.3MnO₃ thin films were fabricated by a spin-coating method on a Pt/Ti/SiO₂/Si substrate. Structural and electrical properties with the variation of sintering temperature were measured. All specimens exhibited a polycrystalline orthorhombic crystal structure, and the average thickness of the specimens coated 6 times decreased from about 427 nm to 383 nm as the sintering temperature increased from 740℃ to 830℃. Electrical resistance decreased as the sintering temperature increased. In the La_0.7Sr_0.3MnO₃ thin films sintered at 830℃, electrical resistivity, TCR, B-value, and activation energy were 0.0374 mΩ·cm, 0.316%/℃, 296 K and 0.023 eV, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.2
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• pp.164-168
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• 2024

(La_0.7Sr_0.3)(Mn_1-xFe_x)O₃ (LSMFO) (x = 0.03, 0.06, 0.09, 0.12) precursor solution are prepared by sol-gel method. LSMFO thin films are fabricated by the spin-coating method on Pt/Ti/SiO₂/Si substrate, and the sintering temperature and time are 800℃ and 1 hr, respectively. The average thickness of the 6-times coated LSMFO films is about 181 to 190 nm and average grain size is about 18 to 20 nm. As the amount of Fe added in the LSMFO thin film increased, the resistivity decreased, and the TCR and B_25/65-value increased. Electrical resistivity, TCR and B_25/65-value of the (La_0.7Sr_0.3)(Mn_0.88Fe_0.12)O₃ thin film are 0.0136 mΩ-cm, 0.358%/℃, and 328 K at room temperature, respectively. The resistivity properties of LSMFO thin films matched well with Mott's VRH model.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.11 no.2
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• pp.49-55
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• 2001

ZnO films were fabricated on p-type Si(100) wafer ITO glass and quartz glass by the sol-gel process using zinc acetate dihydrate as starting material. A homogeneous and stable solution was prepared by dissolving the zinc acetate dihydrate in a solution of 2-methoxyethanol and monoethanolamine (MEA). ZnO films were deposited by spin-coating at 2800 rpm for 25 s and were dried on a hot plate at $250^{\circ}C$ for 10 min. Crystallization of the films was carried out at $400^{\circ}C$~$800^{\circ}C$ for 1 h in air. X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM), UV-vis transmittance spectroscopy, FTIR transmittance spectroscopy and Photoluminescence (PL) spectroscopy measurements have been used to study the structural and optical properties of the films. ZnO films highly oriented along the (002)plane were obtained. In all cases the films were found to be transparent (above 70%) in visible range with a sharp absorption edge at wavelengths of about 380nm, which is very close to the intrinsic band-gap of ZnO(3.2 eV). The low temperature band-edge photoluminescence revealed a complicated multi-line structure in terms of bound exciton complexes and the phonon replicas.

• Journal of the Korean Electrochemical Society
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• v.17 no.2
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• pp.94-102
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• 2014

Cation exchange membrane (Nafion) was modified to reduce the vanadium ion permeation through the membrane and to increase the vanadium redox flow battery (VRB) system performance by coating the graphene oxide (GO) which has nano-plate like morphology. Modified membrane properties were studied by measuring the ion exchange capacity (I.E.C), water uptake and proton conductivity. The thickness of the coated layer on the surface of the Nafion membrane was observed as $0.93{\mu}m$ by SEM. Proton conductivity and vanadium ion permeability of the modified membrane were decreased to 27% and 25% compared to that of the commercial Nafion membrane respectively. VRB single cell performance test was performed to compare the system performance of the VRB applied with commercial Nafion membrane and modified membrane. VRB system applied with modified membrane showed higher coulombic efficiency and energy efficiency than the VRB system applied with the commercial Nafion membrane due to the reduction of the vanadium ion permeation. From these result, we could suggest that the membrane modification by coating the GO on the surface of the Nafion membrane could be one of the promising strategies to reduce the vanadium ion permeation and to increase the VRB system performance effectively.

• Bulletin of the Korean Chemical Society
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• v.35 no.5
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• pp.1516-1522
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• 2014

A series of 20 wt % $(NH_4)_2SO_4$ and 3 wt % $Al_2O_3$ surface treatments were applied to $Li[Li_{0.2}Mn_{0.54}Co_{0.13}Ni_{0.13}]O_2$ substrates. The $Li[Li_{0.2}Mn_{0.54}Co_{0.13}Ni_{0.13}]O_2$ substrates were synthesized using a co-precipitation method. Sample (a) was left pristine and variations of the 20 wt % $(NH_4)_2SO_4$ and 3 wt % $Al_2O_3$ were applied to samples (b), (c) and (d). XRD was used to verify the space group of the samples as R$\bar{3}$m. Additional morphology and particle size data were obtained using SEM imagery. The $Al_2O_3$ coating layers of sample (b) and (d) were confirmed by TEM images and EDS mapping of the SEM images. 2032-type coin cells were fabricated in a glove box in order to investigate their electrochemical properties. The cells were charged and discharged at room temperature ($25^{\circ}C$) between 2.0V and 4.8V during the first cycle. The cells were then charged and discharged between 2.0V and 4.6V in subsequent cycles. Sample (d) exhibited lower irreversible capacity loss (ICL) in the first charge-discharge cycle as compared to sample (c). Sample (d) also had a higher discharge capacity of ~250 mAh/g during the first and second charge-discharge cycles when compared with sample (c). The rate capability of the $Al_2O_3$-coated sample (b) and (d) was lower when compared with sample (a) and (c). Sample (d), coated with $Al_2O_3$ after the surface treatment with $(NH_4)_2SO_4$, showed an improvement in cycle performance as well as an enhancement of discharge capacity. The thermal stability of sample (d) was higher than that of the sample (c) as the result of DSC.

• Journal of the Korean Applied Science and Technology
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• v.33 no.3
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• pp.587-592
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• 2016

In this study, flexible acid treated single walled carbon nanotubes (A-SWCNTs) electrodes were fabricated by using gold coated PET substrate and spray coating technique. The acid-treatment method was conducted to introduce functional groups on the SWCNTs wall, which could improve dispersability of the SWCNTs and its electrochemical property. The electrochemical properties of flexible A-SWCNTs electrode were carried out by cyclic voltammetry(CV), electrochemical impedance were carried out by cyclic voltammetry(CV), electrochemical impedance spectroscopy(EIS) and galvanostatic charge/discharge (GCD) cycles. As a results, The specific capacitance value of the unbent A-SWCNTs electrode was $67F{\cdot}g^{-1}$, which decreased to $63F{\cdot}g^{-1}$ (94% retention) after 1000 GCD cycles. Interestingly, the specific capacitance of the unbent A-SWCNTs electrode with application of the 1000 GCD cycles was retained even after 500 bending to $30^{\circ}$ with 6000 GCD cycles.

• Journal of the Korean Applied Science and Technology
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• v.33 no.3
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• pp.593-598
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• 2016

We report on the preparation of reduced graphene oxide (rGO)/single-walled carbon nanotubes (SWNTs) electrodes deposited onto flexible polyethylene terephthalate (PET) via spray coating technique. The highest capacitance value of the unbent rGO/SWNTs electrode was $82Fg^{-1}$ in 1 M $H_2SO_4$ at $100mVs^{-1}$, which decreased to $38Fg^{-1}$ after 500 bending cycle. Further characterization, including galvanostatic charge/discharge measurements and electrochemical impedance spectroscopy (EIS), showed that the rGO/SWNTs electrode retained a well-defined capacitive response after repetitive bending cycle. Overall, the rGO/SWNTs composite electrode showed reasonable electrochemical properties even prolonged bending cycle. Approximately 50% of the initial capacitance for the rGO/SWNTs composite electrode is remained after 500 bending cycle, making the electrode a potential option for flexible energy storage applications.

• Food Science and Preservation
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• v.12 no.6
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• pp.546-551
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• 2005

The new developed production process and the coating equipment were used to prepare the alginate coated rice having functional property. Then, the quality characteristics such as proximate analysis, moisture sorption properties, influence on the retrogradation, sensory evaluation were investigated. The moisture content of the alginate coated rice was $16.5-18\%$ which is $1.5\%$ higher than the normal rice. About $0.3\%$ alginate was coated on the rice by the measurement of carbohydrate content after coating with $2\%$ alginate. The rice coated with higher alginate concentration showed the higher moisture absorption. The rice coated with $2\%$ alginate solution stored $30^{\circ}C$ and $85\%$ RH conditions for 6 weeks and it increased $1.8\%$ of the moisture content The alginate coated rice has delayed the retrogradation more than 6 hrs as well as got the higher scores for the appearance, stickiness, and taste. The alginate coated rice is a good source of the fiber in the nutritional aspect and it improves the quality and functionality of the rice.