• Journal of Industrial Technology
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• v.43 no.1
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• pp.49-55
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• 2023

Cluster tools are extensively employed in various wafer fabrication processes within the semiconductor manufacturing industry, including photo lithography, etching, and chemical vapor deposition. Contemporary fabrication facilities encounter customer orders with technical specifications that are similar yet slightly varied. Consequently, modern fabrications concurrently manufacture two or three different wafer types using a cluster tool to maximize chamber utilization and streamline the flow of wafer lots between different process stages. In this review, we introduce two methods of concurrent processing of multiple wafer types: 1) concurrent processing of multiple wafer types with different job flows, 2) concurrent processing of multiple wafer types with identical job flows. We describe relevant research trends and achievements and discuss future research directions.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.496-499
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• 1999

This paper describes a medular neural network(MNN) for a vision system which tracks a given object using a sequence of images from a camera unit. The MNN is used to precisely recognize the given robot endeffector and to minize the processing time. Since the robot endeffector can be viewed in many different shapes in 3-D space, a MNN structure, which contains a set of feedforwared neural networks, co be more attractive in recognizing the given object. Each single neural network learns the endeffector with a cluster of training patterns. The training patterns for a neural network share the similar charateristics so that they can be easily trained. The trained MNN is less sensitive to noise and it shows the better performance in recognizing the endeffector. The recognition rate of MNN is enhanced by 14% over the single neural network. A vision system with the MNN can precisely recognize the endeffector and place it at the center of a display for a remote operator.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.6
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• pp.619-625
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• 2009

FastSLAM which uses the Rao-Blackwellized particle filter is one of the famous solutions to SLAM (Simultaneous Localization and Mapping) problem that estimates concurrently a robot's pose and surrounding environment. However, the particle depletion problem arises from the loss of the particle diversity in the resampling process of FastSLAM. Then, the performance of FastSLAM degenerates over the time. In this work, DIR (Density Information-based Resampling) technique is proposed to solve the particle depletion problem. First, the cluster is constructed based on the density of each particle, and the density of each cluster is computed. After that, the number of particles to be reserved in each cluster is determined using a linear method based on the distance between the highest density cluster and each cluster. Finally, the resampling process is performed by rejecting the particles which are not selected to be reserved in each cluster. The performance of the DIR proposed to solve the particle depletion problem in FastSLAM was verified in computer simulations, which significantly reduced both the RMS position error and the feature error.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2002.05a
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• pp.285-292
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• 2002

A cluster tool for semiconductor manufacturing is an integrated device that consists of several single wafer processing modules and a wafer transport module based on a robot. The distributed module controllers are integrated by an inter-module communication network and coordinated by a centralized controller, called a cluster tool controller (CTC). Since the CTC monitors and coordinates the distributed complex module controllers for advanced process control, complex commuication messaging and services between the CTC and the module controllers are required. A SEMI standard, CTMC(Cluster Tool Module Communication), specifies application-level communication service requirements for inter-module communication. We propose the use of high-level fieldbuses, for instance. PROFIBUS-FMS, for implementing CTMC since the high-level fieldbuses are well suited for complex real-time distributed manufacturing control applications. We present a way of implementing CTMC using PROFIBUS-FMS as the communication enabler. We first propose improvements of a key object of CTMC for material transfer and the part transfer protocol to meet the functional requirements of modem advanced cluster tools. We also discuss mapping objects and services of CTMC to PROFIBUS-FMS communication objects and services. Finally, we explain how to implement the mappings.

• The Journal of Korean Association of Computer Education
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• v.15 no.5
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• pp.33-41
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• 2012

Elementary school students should have many opportunities to find their abilities and talents. However, informatics education in Korea does not target the entire elementary school students, opportunities for informatics education are given only to some students. Unlike possibilities to find mathematics gifted students and science gifted students, opportunities to find informatics gifted students are very limited. This study aims to solve current problems through a robot education program based on SEM(Schoolwide Enrichment Model). Using modified curriculum and school enrichment cluster, robot programming education is implemented at the pilot school. The result shows that robot education program based on SEM improved creative potentials of elementary school students.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.15 no.1
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• pp.216-239
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• 2021

The present work addresses the challenging problem of coordinating power allocation with interference management in multi-robot networks by applying the promising expansion capabilities of multiple-input multiple-output (MIMO) and full duplex systems, which achieves it for maximizing the throughput of networks under the impacts of Doppler frequency shifts and external jamming. The proposed power allocation with interference coordination formulation accounts for three types of the interference, including cross-tier, co-tier, and mixed-tier interference signals with cluster head nodes operating in different full-duplex modes, and their signal-to-noise-ratios are respectively derived under the impacts of Doppler frequency shifts and external jamming. In addition, various optimization algorithms, including two centralized iterative optimization algorithms and three decentralized optimization algorithms, are applied for solving the complex and non-convex combinatorial optimization problem associated with the power allocation and interference coordination. Simulation results demonstrate that the overall network throughput increases gradually to some degree with increasing numbers of MIMO antennas. In addition, increasing the number of clusters to a certain extent increases the overall network throughput, although internal interference becomes a severe problem for further increases in the number of clusters. Accordingly, applications of multi-robot networks require that a balance should be preserved between robot deployment density and communication capacity.

• Journal of the Korean Institute of Telematics and Electronics B
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• v.28B no.9
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• pp.739-746
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• 1991

This paper develops a modified multilayer perceptron architecture which speeds up learning as well as the net's mapping accuracy. In Phase I, a cluster partitioning algorithm like the Kohonen's self-organizing feature map or the leader clustering algorithm is used as the front end that determines the cluster to which the input data belongs. In Phase II, this cluster selects a subset of the hidden layer nodes that combines the input and outputs nodes into a subnet of the full scale backpropagation network. The proposed net has been applied to two mapping problems, one rather smooth and the other highly nonlinear. Namely, the inverse kinematic problem for a 3-link robot manipulator and the 5-bit parity mapping have been chosen as examples. The results demonstrate the proposed net's superior accuracy and convergence properties over the original backpropagation network or its existing improvement techniques.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.393-398
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• 2002

Neural networks are used in the framework of sensorbased tracking control of robot manipulators. They learn by practice movements the relationship between PSD (an analog Position Sensitive Detector) sensor readings for target positions and the joint commands to reach them. Using this configuration, the system can track or follow a moving or stationary object in real time. forthermore, an efficient neural network architecture has been developed for real time learning. This network uses multiple sets of simple backpropagation networks one of which is selected according to which division (corresponding to a cluster of the self-organizing feature map) in data space the current input data belongs to. This lends itself to a very training and processing implementation required for real time control.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.253-257
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• 2004

Neural networks are works are used in the framework of sensor based tracking control of robot manipulators. They learn by practice movements the relationship between PSD(an analog Position Sensitive Detector) sensor readings for target positions and the joint commands to reach them. Using this configuration, the system can track or follow a moving or stationary object in real time. Furthermore, an efficient neural network architecture has been developed for real time learning. This network uses multiple sets of simple back propagation networks one of which is selected according to which division(corresponding to a cluster of the self-organizing feature map) in data space the current input data belongs to. This lends itself to a very training and processing implementation required for real time control.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10a
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• pp.660-665
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• 1993

Neural networks are used in the framework of sensorbased tracking control of robot manipulators. They learn by practice movements the relationship between PSD ( an analog Position Sensitive Detector) sensor readings for target positions and the joint commands to reach them. Using this configuration, the system can track or follow a moving or stationary object in real time. Furthermore, an efficient neural network architecture has been developed for real time learning. This network uses multiple sets of simple backpropagation networks one of which is selected according to which division (corresponding to a cluster of the self-organizing feature map) in data space the current input data belongs to. This lends itself to a very fast training and processing implementation required for real time control.