• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.23 no.2
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• pp.109-114
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• 1994

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.19 no.3
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• pp.164-174
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• 1990

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.5
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• pp.459-465
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• 2011

Excessive heat may be generated during the semiconductor manufacturing process. Therefore, precise control of temperature is required to maintain a constant ambient temperature and wafer temperature in the chamber. Compared to an industrial chiller, a semiconductor chiller's power consumption is high because it is in continuous operation for a year. Because of this high power consumption, it is necessary to develop an energy-efficient chiller by optimizing the operation. The competitiveness of domestic products is low because of the high energy consumption. We experimentally investigated a domestic semiconductor by conducting load change, temperature rise and fall, and control precision experiments. The experimental study showed that the chiller had 2.1-3.9 kW of cooling capacity and 0.56-0.93 of EER. The control precisions were ${\pm}1^{\circ}C$ and ${\pm}0.6^{\circ}C$ when the setting temperatures were $0^{\circ}C$ and $30^{\circ}C$ respectively.

• Journal of the Korean Society of Safety
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• v.38 no.3
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• pp.27-34
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• 2023

With the technological development of the semiconductor industry, the roles of electrical and thermal energy supply and control of semiconductor equipment in ultrafine processes have become very important. However, instances of electrical fires in the chiller heater, which is used for cooling in the semiconductor manufacturing process, are increasing. A fire occurs in combustibles due to high heat at the connection part of the chiller heater, that is, when the number of electrical wires in the connection part is reduced or when the wires are completely disconnected. In this study, the temperature characteristics were compared and analyzed through experiments and 3D simulations. The number of electrical wires, which is the connection part of the chiller heater, was reduced by 90%, 50%, 30%, 10%, and 5%, and the wires were completely disconnected. When the number of electrical wires was reduced by 5%, heat of up to 80℃ was generated, which is a relatively high temperature but insufficient to cause a fire in combustibles. Complete disconnection occurred due to the vibration of the motor and other components, and sparks and arcs were generated, resulting in a rapid increase in temperature to up to 680℃. When completely disconnected, the temperature increase was sufficient to cause a fire in the combustibles covering the terminal block. Therefore, in this study, the causes of electrical fires in chiller heaters were investigated and preventive measures were proposed by analyzing abnormal signals and thermal characteristics caused by the electrical wiring being reduced and completely disconnected.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.4
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• pp.187-194
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• 2015

This paper describes the PI controller design based on a practical transfer function model for centrifugal water chillers. The rotational speed of a compressor and the opening angle of an electronic expansion valve were simultaneously regulated as manipulated variables to maintain temperature reference and to ensure high efficiency of the chiller. The COP according to the change in each variable was investigated by performing some static experiments, and it was reflected in the PI controller design to accomplish the high efficiency control. Especially, the practical transfer function model of the chiller was built based on the dynamic experimental data considering the strong inherent non-linearity and complexity of the chiller system. The validity of the designed PI controller was proven by some experimental results using the test facility and the results were also compared to the conventional evaporating pressure control results.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.2 s.233
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• pp.239-246
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• 2005

A rotor dynamic analysis is implemented to confirm the vibration stability of the high speed centrifugal chiller coupled with gear system. As the rotating speed of the centrifugal chiller under investigation is increased up to 17605rpm at the pinion rotating part, the bearing instability is getting higher and, furthermore, the rotor-bearing system might experience a few critical speed which lead to system failure due to the excessive vibration. In this study, considering the loading capacity and stability conditions, offset journal bearings are adopted for the pinion rotating system and general cylindrical bearings are used for motor part. From the modal analysis, the system is found to be stable as the critical damping ratio which shows the damping characteristics of the system are positive over all operating ranges, and in addition, the synchronous rotating frequency does not come across with any whirl natural frequency. From these results the authors confirm the vibration stability of the rotor-bearing system suggested in this study.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.18 no.9
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• pp.753-760
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• 2006

The purpose of the present work is to investigate the influence of the refrigerant adulteration by LiBr solution on the cooling capacity and COP for three different types of abso게tion chillers: a single-effect type, a series-flow double-effect type and a parallel-flow with double-effect type. A simulation program has been prepared for the cyclic analysis of absorption chillers. With some assumptions, the calculations have been performed by solving the mass balance equation, energy balance equation and the state equation simultaneously. The range of the LiBr concentration of refrigerant was 0% to 20% in the present study. For the single-effect absorption chiller, the maximum decrease in the cooling capacity was 10% at the 20% of LiBr concentration. For the double-effect chiller, the capacity was decreased by 11.1% for the parallel-flow type and the series-flow type. Also, the COP was reduced by 3.0% in single-effect, 2.8% in series-flow type (SR=0.4) and 2.3% in parallel-flow type.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.5
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• pp.431-438
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• 2000

The major irreversibilities in absorption chillers are associated with the transfer of heat into and out from the machine and irreversible process inside the machine. By modeling only external irreversibilities(endo-reversible), a model was formulated to predict the ideal performance of a single-effect absorption chiller. Its actual performance including both external and internal irreversibilities was calculated with a in-house simulation program. The optimization of heat transfer area distribution was performed for both endo-reversible cycle and actual cycle. The equation of endo-reversible modeling was found to give about 2times higher cooling capacity than the simulation program. At optimal distribution, it was found that heat transfer area of the evaporator was about 30% of total area, that of the generator was 20%, and the rest 50% was for the absorber and condenser. The system COP for endo-reversible cycle was slightly higher than that for actual cycle. In the case of LiBr-water single-effect absorption chiller, the maximum cooling capacity was obtained near the condition that LMTD is same at all heat exchangers.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.17-22
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• 2002

A conventional silica gel/water adsorption chiller has been analyzed numerically. A novel non-dimensional mathematical model has been presented to analyze the design effect of different components of an adsorption chiller. The design parameters of this system are characterized by the number of transfer unit, NTU, of different components and the inert material alpha number, ${\alpha}$of different components of the systems. Results show that condenser NTU$\sub$a/ has the most influential effect on the system performance, which is fellowed by absorber NTU$\sub$e/. It is also seen that coefficient of performance (COP) and non-dimensional specific cooling capacity increases with the increase of NTU$\sub$a/ and NTU$\sub$e/, but decreases with the increase of inert material alpha number. A thermo-economic data of the adsorption chiller and some other heat pump systems those are in practical operation are also presented.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.3
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• pp.193-198
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• 2003

A rotor dynamic analysis is implemented to confirm the vibration stability of the high speed centrifugal chiller coupled with gear system. As the rotating speed of the centrifugal chiller under investigated is increased up to 17,605 rpm at the pinion rotating part, the bearing instability is getting higher and, furthermore, the rotor-bearing system might experience a few critical speed which lead to system failure due to the excessive vibration. In this study, considering the loading capacity and stability conditions, offset journal bearings are adopted for the pinion rotating system and general cylindrical bearing are used for motor part. From the modal analysis, the system is found to be stable as the synchronous rotating frequency does not come across with any whirl natural frequency and, in addition, the critical damping ratio which shows the damping characteristics of the system are positive over the all operating ranges. From these results the authors confirm the vibration stability of the rotor-bearing system suggested in this study.