• Title/Summary/Keyword: chemical oxide

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Synthesis of Alumina-Grafted Manganese Oxide Particles Using Surfactants through Coprecipitation Method and Their Thermal Properties

  • Kwon, Boseong;Park, Jun-Hwan;Jang, Seong-Cheol;Oh, Seong-Geun
    • Bulletin of the Korean Chemical Society
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    • v.34 no.12
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    • pp.3559-3564
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    • 2013
  • Alumina particles were grafted onto the surface of manganese oxide particles via the coprecipitation process using surfactant and cosurfactant. The phase of Mn/Al salts (Phase I) and the phase of precipitation agent (Phase II) were prepared in aqueous surfactant solution, separately. Phase II was added into Phase I and the reaction was performed to form the precursors of composites through hydrogen bonding between $Mn(OH)_2$ and $Al(OH)_3$ prepared by the reaction of Mn/Al salts with the precipitation agent. The alumina-grafted manganese oxide particles were obtained as a final product after calcination. The concentrations of Al salt and surfactant were varied to investigate their effects on the formation and the crystallinity of composites. In addition, the crystal structure of products could be controlled by changing the calcination temperature. Through thermal analyses, it was found that the thermal stability of manganese oxide was improved by the introduction of alumina on its surface.

Fabrication of Graphene-modified Indium Tin Oxide Electrode Using Electrochemical Deposition Method and Its Application to Enzyme Electrode (전기화학 증착법을 이용한 그래핀 개질 Indium Tin Oxide 전극 제작 및 효소 전극에 응용)

  • Wang, Xue;Shi, Ke;Kim, Chang-Joon
    • Korean Chemical Engineering Research
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    • v.60 no.1
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    • pp.62-69
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    • 2022
  • Graphene has a large surface area to volume ratio and good mechanical and electrical property and biocompatibility. This study described the electrochemical deposition and reduction of graphene oxide on the surface of indium tin oxide (ITO) glass slide and electrochemical characterization of graphen-modified ITO. Cyclic voltammetry was used for the deposition and reduction of graphene oxide. The surface of graphen-coated ITO was characterized using scanning electron microscopy and energy dispesive X-ray spectroscopy. The electrodes were evaluated by performing cyclic voltammetry and electrochemical impedance spectroscopy. The number of cycles and scan rate greatly influenced on the coverage and the degree of reduction of graphene oxide, thus affecting the electrochemical properties of electrodes. Modification of ITO with graphene generated higher current with lower charge transfer resistance at the electrode-electrolyte interface. Glucose oxidase was immobilized on the graphene-modified ITO and has been found to successfully generate electrons by oxidizing glucose.

Synthesis of Zinc Oxide Nano Rods, Sheet and Flower at $80^{\circ}C$ by the Sol-gel Method

  • Wahab, Rizwan;Ansari, S.G.;Kim, Y.S.;Dar, M.A.;Shin, H.S.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.676-677
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    • 2006
  • Synthesis of zinc oxide nanorods, sheets and flower like structure were done by the sol-gel method using zinc acetate dihydrate and sodium hydroxide at $80^{\circ}C$ with 12 hours refluxing time nanorods, in case of as synthesized powder, with diameter of 20-60nm. Annealing at higher temperature (300 and $500^{\circ}C$,) in air ambient changes the morphology to sheet and flower like structure. The standard peak of zinc oxide was observed in IR at $523cm^{-1}$. The UV-VIS spectroscopy of zinc oxide shows a characteristic peak at 375nm.

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A Study for the Improvement of Torn Oxide Defects in Shallow Trench Isolation-Chemical Mechanical Polishing (STI-CMP) Process (STI--CMP 공정에서 Torn oxide 결함 해결에 관한 연구)

  • 서용진;정헌상;김상용;이우선;이강현;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.1
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    • pp.1-5
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    • 2001
  • STI(shallow trench isolation)-CMP(chemical mechanical polishing) process have been substituted for LOCOS(local oxidation of silicon) process to obtain global planarization in the below sub-0.5㎛ technology. However TI-CMP process, especially TI-CMP with RIE(reactive ion etching) etch back process, has some kinds of defect like nitride residue, torn oxide defect, etc. In this paper, we studied how to reduced torn oxide defects after STI-CMP with RIE etch back processed. Although torn oxide defects which can occur on trench area is not deep and not severe, torn oxide defects on moat area is not deep and not severe, torn oxide defects on moat area is sometimes very deep and makes the yield loss. Thus, we did test on pattern wafers which go through trench process, APECVD process, and RIE etch back process by using an IPEC 472 polisher, IC1000/SUVA4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the origin of torn oxide defects.

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Chemical Structure Analysis on the ONO Superthin Film by Second Derivative AES Spectra (2차 미분 AES 스펙트럼에 의한 ONO 초박막의 화학구조 분석)

  • 이상은;윤성필;김선주;서광열
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.79-82
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    • 1998
  • Film characteristics of thin ONO dielectric layers for MONOS(metal-oxide-nitride-oxide-semiconductor) EEPRM was investigated by AES and AFM. Second derivative spectra of AES Si LVV overlapping peak provided useful information for chemical state analysis of superthin film. The ONO films with dimension of tunneling oxide 24${\AA}$, nitride 33${\AA}$, and blocking oxide 40${\AA}$ were fabricated. During deposition of the LPCVD nitride films on tunneling oxide, this thin oxide was nitrized. When the blocking oxide were deposited on the nitride film, the oxygen not only oxidized the nitride surface, but diffused through the nitride. The results of ONO film analysis exhibits that it is made up of SiO$_2$(blocking oxide)/O-rich SiON(interface/N-rich SiON(nitride)/-rich SiON(interface)/N-rich SiON(nitride)/O-rich SiON(tunneling oxide).

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Photoelectrochemical property of thermal copper oxide thin films (열성장을 통해 형성된 산화구리의 광전기화학적 특성)

  • Choi, Yongseon;Yoo, JeongEun;Lee, Kiyoung
    • Journal of the Korean institute of surface engineering
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    • v.55 no.4
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    • pp.215-221
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    • 2022
  • In the present work, copper oxide thin films were formed by heat-treatment method with different temperatures and atmosphere, e.g., at 200 ~ 400 ℃; in air and Ar atmosphere. The morphological, electrical and optical properties of the thermally fabricated Cu oxide films were analyzed by SEM, XRD, and UV-VIS spectrometer. Thereafter, photoelectrochemical properties of the thermal copper oxide films were analyzed under solar light (AM 1.5, 100 mW/cm2). Conclusively, the highest photocurrent was obtained with Cu2O formed under the optimum annealing condition at 300 ℃ in air atmosphere. In addition, EIS results of Cu oxide formed in air atmosphere showed relatively low resistance and long electron life-time compared with Cu Oxide fabricated in Ar atmosphere at the same temperature. This is because heat-treatment in Ar atmosphere could not form Cu2O due to lack of oxygen, and thermally formed CuO at high temperature suppressed stability and conductivity of the Cu oxide.

Photoelectrochemical performance of anodized nanoporous iron oxide based on annealing conditions (양극산화로 제조된 다공성 나노구조 철 산화막의 열처리 조건에 따른 광전기화학적 성질)

  • Dongheon Jeong;JeongEun Yoo;Kiyoung Lee
    • Journal of the Korean institute of surface engineering
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    • v.56 no.4
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    • pp.265-272
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    • 2023
  • Photoelectrochemical (PEC) water splitting is one of the promising methods for hydrogen production by solar energy. Iron oxide has been effectively investigated as a photoelectrode material for PEC water splitting due to its intrinsic property such as short minority carrier diffusion length. However, iron oxide has a low PEC efficiency owing to a high recombination rate between photoexcited electrons and holes. In this study, we synthesized nanoporous structured iron oxide by anodization to overcome the drawbacks and to increase surface area. The anodized iron oxide was annealed in Ar atmosphere with different purging times. In conclusion, the highest current density of 0.032 mA/cm2 at 1.23 V vs. RHE was obtained with 60 s of pursing for iron oxide(Fe-60), which was 3 times higher in photocurrent density compared to iron oxide annealed with 600 s of pursing(Fe-600). The resistances and donor densities were also evaluated for all the anodized iron oxide by electrochemical impedance spectra and Mott-Schottky plot analysis.