• 대한금속재료학회지
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• 제56권12호
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• pp.910-914
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• 2018

Since catalyst technology is one of the promising technologies to improve the working performance of next generation energy and electronic devices, many efforts have been made to develop various catalysts with high efficiency at a low cost. However, there are remaining challenges to be resolved in order to use the suggested catalytic materials, such as platinum (Pt), gold (Au), and palladium (Pd), due to their poor cost-effectiveness for device applications. In this study, to overcome these challenges, we suggest a useful method to increase the surface area of a noble metal catalyst material, resulting in a reduction of the total amount of catalyst usage. By employing block copolymer (BCP) self-assembly and nano-transfer printing (n-TP) processes, we successfully fabricated sub-20 nm Pt line and cross-bar patterns. Furthermore, we obtained a highly ordered Pt cross-bar pattern on a Ni thin film and a Pt-embedded Ni thin film, which can be used as hetero hybrid alloy catalyst structure. For a detailed analysis of the hybrid catalytic material, we used scanning electron microscope (SEM), transmission electron microscope (TEM) and energy-dispersive X-ray spectroscopy (EDS), which revealed a well-defined nanoporous Pt nanostructure on the Ni thin film. Based on these results, we expect that the successful hybridization of various catalytic nanostructures can be extended to other material systems and devices in the near future.

• 대한치과기공학회지
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• 제33권1호
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• pp.37-45
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• 2011

Purpose: Heat pressed ceramics, used for all ceramic restorations, have the additional advantage of being technically less change through using of the lost-wax technique. Conceptually, combining the ceramic with the clinically proven reinforcing ability of a metal framework would be advantageous; however, cause of mismatching of fusion between ceramics and metal frameworks which from differences of casting temperature and coefficient of thermal expansion, pressed ceramics could not be used with a metal framework. The purpose of this study was to compare shear bond strength of press-to metal ceramic to porcelain fused non precious metal and feldspatic porcelain fused non precious metal. Methods: The 30 metal specimens were casted in a porcelain fused non precious metal nickel-chromium alloy. They were divided into 3 groups by surface treatment and applied ceramic: $125{\mu}m$ aluminium oxide sandblasting and veneered feldspatic porcelain (group FP), $125{\mu}m$ aluminium oxide sandblasting and had press-to-metal ceramic applied (group PC), porcelain bonder (gold bonder) fused on surface of metal specimens and had press-to-metal ceramic applied (group PCG). In each group 10 metal specimens were used. The press-to-metal ceramic applied 20 specimens had ash-free wax pattern applied, the metal-wax complexes invested, and were pressed with heat press ceramic. All specimens were subjected to shear bond strength test at a crosshead speed of 1.0 mm/min. Results: The results of measured in Mean SD and data were analyzed by one-way AVOVA (p= .05) and Tukey HSD test (p= .05).: group FP $16.090{\pm}1.841$ MPa, group PC $12.620{\pm}1.8256$ MPa, group PCG $10.920{\pm}0.9283$, significant differences between all groups (p < .05). Significant differences were found in each between group FP and group PC, group FP and group PCG (p < .05). Conclusion: The shear bond strength of press-to-metal ceramic to porcelain fused non precious metal was described higher in unused gold bonder group than used gold bonder groups.

• 한국세라믹학회지
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• 제40권11호
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• pp.1073-1077
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• 2003

Sn $O_2$ 가스센서는 낮은 농도의 가연성 가스 및 유독 가스를 표면 저항의 변화로부터 탐지할 수 있으나, 가스 선택성이 부족하다는 단점을 가지고 있다. 이러한 단점을 보완하기 위해서는 가스반응기구의 규명과 같은 기초이론 연구와 함께 선택성이 우수한 센서재료의 개발 및 적절한 신호처리방법의 적용이 필요하다. 본 논문에서는 Sn $O_2$ 표면에서 일어나는 에탄올 (C$_2$ $H_{5}$OH)과 아세토니트릴($CH_3$CN)의 촉매산화반응을 가스크로마토그래피 분석을 통해 확인하였다. PdCl$_2$가 첨가된 Sn $O_2$ 센서는 에탄올과 아세토니트릴에 대하여 높은 감도를 보였고, 반면에 La$_2$ $O_3$가 첨가된 Sn $O_2$ 센서는 에탄올에 대해서는 높은 감도를, 그리고 아세토니트릴에 대해서는 낮은 감도를 보였다. 이들 두 센서재료 개발 및 패턴인식기법적용을 통하여 아세토니트릴에 대한 선택성을 크게 증가시킬 수 있었다. 아세토니트릴에 대한 최소 탐지농도는, 공기 중에서는 15 ppm이었고, 다른 방해가스와 함께 존재할 경우에는 20 ppm에서 100 ppm 정도로 나타났다.

• 구강회복응용과학지
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• 제23권3호
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• pp.259-268
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• 2007

purpose: This study was to evaluate the shear bond strength of Lithium Disilicate Glass-Ceramic by removable method of temporary cement on the abutment tooth. Material and Method: Sixty molar teeth of human with the occlusal surface up were mounted in acrylic resin blocks. The 45 specimens were prepared to exposure dentin by diamond bur and the eugenol-containing temporary cement($Cavitec^{TM}$ ($KERR^{(R)}$, U.S.A)was applied to the dentin surfaces. After initial removal of the cement with a dental explorer, the specimens were divided into 4 groups of 15 specimens each. The dentin surfaces of the specimens were treated by rotary instrument with as follow pastes: $Zircate^{(R)}$ prophy paste(Dentsply, U.S.A), Radent Prophy Paste(Pascal company,inc. U.S.A), and Dental pumice(Wip mix corporation,U.S.A). An adhesive resin luting agent(Variolink $II^{(R)}$, Ivoclar Vivadent, Leichtenstein) including Monobond-S and $Excite^{(R)}$ was applied to all specimens. The ceramic specimens were made with an A1 ingot of IPS Empress $II^{(R)}$ (Ivoclar Vivadent, Leichtenstein). After the specimens were stored in distilled water for 48hr, the shear bond strength(MPa) was measured by a Universal testing machine(Zwick 145641, Zwick, Germany) at a 1mm/min cross-head speed. The data were statistically analyzed by one-way ANOVA and Duncan's multiple range test. Results: In all group, there were no significant differences in comparison with the control group(p>0.05). The pattern of most failure showed the mixed type of cohesive and adhesive failure. Conclusion: Resin bond strength of IPS Empress $II^{(R)}$ was not affected by removal method of the temporary cement.

• 한국재료학회지
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• 제34권6호
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• pp.303-308
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• 2024

The semiconductor and display industries require the development of plasma resistant materials for use in high density plasma etching process equipment. Yttria (Y₂O₃) is a ceramic material mainly used to ensure good plasma resistance properties, which requires a dense microstructure. In commercial production, a sintering process is applied to reduce the sintering temperature of Y₂O₃. In this study, the effect of the addition of glass frit to the sintered specimen was examined when manufacturing yttria sintered specimens for semiconductor process equipment parts. The Y₂O₃ specimen was shaped into a Ø50 mm size and then sintered at 1,600 ℃ for 1~8 h. The characteristics, X-ray diffraction pattern, densities, contraction rate of the specimen, and swelling of the surface of the Y₂O₃ specimens were investigated as a function of the sintering time and glass frit addition. The Y₂O₃ specimen exhibited a density of over 4.9 g/cm³ as the sintering time increased, and the swelling phenomenon characteristics were improved by glass frit, by controlling particle size.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.216-216
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• 2009

This paper describes a novel processing technique for the fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for extreme microelectromechanical system (MEMS) applications. A polydimethylsiloxane (PDMS) mold was formed on an SU-8 pattern using a standard UV photolithographic process. Next, the liquid precursor, polysilazane, was injected into the PDMS mold to fabricate free-standing SiCN microstructures. Finally, the solid polymer SiCN microstructure was cross-linked using hot isostatic pressure at $400^{\circ}C$ and 205 bar. The optimal pyrolysis and annealing conditions to form a ceramic microstructure capable of withstanding temperatures over $1400^{\circ}C$ were determined. Using the optimal process conditions, the fabricated SiCN ceramic microstructure possessed excellent characteristics includingshear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$, and BDV (1.2 kV, minimum). Since the fabricated ceramic SiCN microstructure has improved electrical and physical characteristics compared to bulk Si wafers, it may be applied to harsh environments and high-power MEMS applications such as heat exchangers and combustion chambers.

• 한국세라믹학회지
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• 제42권7호
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• pp.455-460
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• 2005

Deposition of TiN$_{x}$ film was conducted with a DC sputtering technique. The effect of the processing parameters such as substrate temperature, deposition time, working pressure, bias power, and volumetric flowing rate ratio of Ar to N$_{2}$ gas on the resistivity of TiN$_{x}$ film was systematically investigated. Three kinds of substrates, soda-lime glass, (100) Si wafer, and 111m thermally grown (111) SiO$_{2}$ wafer were used to explore the effect of substrate. The phase of TiN$_{x}$ film was analyzed by XRD peak pattern and deposition rate was determined by measuring the thickness of TiNx film through SEM cross-sectional view. Resistance was obtained by 4 point probe method as a function of processing parameters and types of substrates. Finally, optimum condition for synthesizing TiN$_{x}$ film having lowest resistivity was discussed.

• 대한치과기공학회지
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• 제25권1호
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• pp.21-28
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• 2003

The purpose of this study was to process bio-active glass ceramic composite, reinforced with sapphire fibers, by hot press. Also to study the interface of the matrix and the sapphire fiber, and the mechanical properties. Glass raw materials melted in Pt crucible at 1300$^{\circ}C$ during 3.5 hours. The melt was crushed in ball mill and then crushed material, ground and sieved to $<40{\beta}{\mu}m$. Sapphire fibers cut (30mm) and aligned. Powder and fibers hot pressed. The micrographs show good bonding between the matrix and the fiber and no porosity in the glass matrix. This means ideal fracture phenomena. Glass is fractured before the fiber. This is indication of good fracture strength. EDXS showing aluminum rich phase and crystalline phase. Bright field image of the matrix showing crystalline phase. Also diffraction pattern of TEM showing the crystalline phase and more than one phase. Strength of the samples was determined by 3 point bend testing. Strength of the 10vol% sample was approximately 69MPa, while strength of the control sample is 35MPa. Conclusions through this study as follow: 1. Micrographs show no porosity in the glass matrix and the interface. 2. The interface between the fiber and the glass matrix show no gaps. 3. Fracture of the glass indicates characteristic fiber-matrix separation. 4. Presence of crystalline phase at high processing temperature. 5. Sapphire is compatible with bioactive glass.

• 한국전자파학회논문지
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• 제13권7호
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• pp.625-632
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• 2002

본 논문에서는 높은 유전율을 갖는 세라믹 유전체상에 인쇄된 변형된 역 F형의 광대역 세라믹 유전체 칩 안테나를 설계 제작하였다. 이 안테나는 2.0 GHz 대역 IMT-2000(International Mobile Telecommunication 2000) 단말기의 내부에 장착하여 사용하기 위한 것으로 상용 소프트웨어 HFSS를 이용하여 유전체 크기, 유전율 및 인쇄패턴에 따른 안테나 특성을 해석하여 작은 접지면에서 최적의 안테나 특성을 갖도록 설계하였다. 제작된 안테나는 폭 8 mm, 높이 3 mm, 길이 8 mm로 소형으로 특성 측정결과, -10 dB 대역폭은 약 270 MHz로 IMT-2000 단말기에 요구되는 대역폭을 만족하며 또한 최대 방사이득은 2 dBi임을 확인할 수 있었다.

• 한국기계가공학회지
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• 제10권6호
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• pp.146-151
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• 2011

Wax spin coating is a part of several wafer handling processes in the silicon wafer polishing station. It is important to ensure the wax layer free of contamination to achieve the high degree of planarization on wafers after wafer polishing. Three-dimensional air flow characteristics in a wax spin coater are numerically investigated using computational fluid dynamics techniques. When the bottom of the wax spin coater is closed, there exists a significant recirculation zone over the rotating ceramic block. This recirculation zone can be the source of wax layer contamination at any rotational speed and should be avoided to maintain high wafer polishing quality. Thus, four air suction ducts are installed at the bottom of the wax spin coater in order to control the air flow pattern over the ceramic block. Present computational results show that the air suction from the bottom is quite an effective method to remove or minimize the recirculation zone over the ceramic block and the wax coating layer.