• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.108-112
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• 2023

Precision manufacturing technology is rapidly developing due to the extreme miniaturization of semiconductor processes to comply with Moore's Law. Accurate and precise alignment, which is one of the key elements of the semiconductor pre-process and post-process, is very important in the semiconductor process. The center detection of wafer align marks plays a key role in improving yield by reducing defects and research on accurate detection methods for this is necessary. Methods for accurate alignment using traditional image sensors can cause problems due to changes in image brightness and noise. To solve this problem, engineers must go directly into the line and perform maintenance work. This paper emphasizes that the development of AI technology can provide innovative solutions in the semiconductor process as high-resolution image and image processing technology also develops. This study proposes a new wafer center detection method through variable thresholding. And this study introduces a method for detecting the center that is less sensitive to the brightness of LEDs by utilizing a high-performance object detection model such as YOLOv8 without relying on existing algorithms. Through this, we aim to enable precise wafer focus detection using artificial intelligence.

• Journal of Welding and Joining
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• v.32 no.6
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• pp.35-40
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• 2014

The contact tip for gas metal arc welding has important functions to transmit the welding current to the wire and to guide the wire to molten pool. If the contact tip is damaged, it is a cause of lowering the welding productivity due to removal of welding defects and replacement of contact tip. In case of the use of a contact tip for a long time the arc is unstable because the processed hole in the contact tip center is larger, and the variation of aiming position of the welding wire causes a seam tracking error. In this study, gas metal arc welding experiments using contact tip of three different materials were performed. The contact tips with Cu-P, Cu-Cr, and Cu-ODS were used at the experiments, and the welding characteristics by each contact tip were evaluated. After welding contact tip appearance, welding spatter adhesion amount of the nozzle, and weld bead appearance were evaluated. The welding current and welding voltage were measured to verify arc stability during arc welding.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.2
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• pp.115-119
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• 2016

Winding is one of the major processes in roll-to-roll systems. Taper tension profile in a winding determines the distribution of stress in the radial direction, i.e., the radial stress in the wound rolls. Maximum radial stress is major cause of material defect, and this study has been actively proceeded. Traditional models of radial stress model were focused on flexible and light substrate. In this study, we developed an advanced radial stress model including effects of both these parameters(weight and stiffness) on the radial stress. The accuracy of the developed model was verified through FEM(Finite Element Method) analysis. FEM result of maximum radial stress value corresponds to 99 % in comparison to result with the model. From this study, the material defects does not occur when the steel winding. And steel industry can be applied to improve the winding process.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.7
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• pp.1047-1054
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• 2004

Internal defects in the glass, like-as micro-voids, micro-cracks, or inclusions, easily cause the failure when the glass is exposed to the shock or the thermal variation. In order to produce the highly reliable glass product, the precision inspection of the defect in the glass is required. For this purpose, this paper proposes a machine vision technique based on the auto-focusing method, which searches the defect and measures the location under the fact that the edge image of defect must be the most clear when the focal plane of CCD camera is coincided with the defect. As for the search index, the gradient indicator is presented. The basic principles are verified through the simulations for the computer-generated defect images, where the affects of defect shape, gray level of background, and the brightness of the defect image are also analyzed. Finally, experimental results for actual glass specimens are shown to confirm the applicability of this method to the actual field.

• Tribology and Lubricants
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• v.34 no.3
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• pp.115-122
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• 2018

Chemical mechanical polishing (CMP) is a hybrid processing method in which the surface of a wafer is planarized by chemical and mechanical material removal. Since mechanical material removal in CMP is caused by the rolling or sliding of abrasive particles, interfacial friction during processing greatly influences the CMP results. In this paper, the trend of tribology research on CMP process is discussed. First, various friction force monitoring methods are introduced, and three elements in the CMP tribo-system are defined based on the material removal mechanism of the CMP process. Tribological studies on the CMP process include studies of interfacial friction due to changes in consumables such as slurry and polishing pad, modeling of material removal rate using contact mechanics, and stick-slip friction and scratches. The real area of contact (RCA) between the polishing pad and wafer also has a significant influence on the polishing result in the CMP process, and many researchers have studied RCA control and prediction. Despite the fact that the CMP process is a hybrid process using chemical reactions and mechanical material removal, tribological studies to date have yet to clarify the effects of chemical reactions on interfacial friction. In addition, it is necessary to clarify the relationship between the interface friction phenomenon and physical surface defects in CMP, and the cause of their occurrence.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.484-489
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• 2005

Because of its effectiveness for the PD(Partial Discharge) pattern recognition, PSA(Pulse Sequence Analysis) has been considered as a new analytic method instead of conventional PRPDA(Phase Resolved Partial Discharge Analysis). However, it is generally thought that PSA has some possibility to misjudge patterns in case of data-missing resulting from poor sensitivity because it analyses the correlation between sequential pulses, which leads to hesitate to apply it to on-site. Therefore, in this paper, the problems of PSA such as data-missing and noise-adding cases were investigated. for the purpose, PD data obtained from various defects including noise-adding data were used and analyzed. As a result, it was shown that both cases could cause fatal errors in recognizing PD patterns. In case of the data missing, the error was dependant on the kinds of defect and the degree of degradation Also, it could be noticed that the error due to adding noises was larger than that due to some data missing.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.10
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• pp.72-79
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• 2021

A circular saw is an effective tool for cutting glass and carbon-fiber hybrid composites. This study investigated tool wear and cut quality when reusing saw blades. The carbide saws wear four times faster than the new ones, and polycrystalline diamond (PCD) is very resistant to tool wear, except at the end of its lifespan. The cut cross-section quality is affected by the blade type, tool wear, and spindle speed. Alternate top bevel (ATB)-type blades are suitable for cutting fiber-reinforced plastics, but triple-chip grind (TCG)-type blades are unsuitable because they cause fiber-pullout defects. Tool wear and low spindle speeds increase the occurrence of arc scratches, due to the rear saw blade. A microscopic examination showed that the burr, which is a mixture of fiber chips and epoxy matrix, was bonded on top, and glass-fiber delamination occurred on the bottom glass-fiber-reinforced polymer (GFRP) surface.

• Nuclear Engineering and Technology
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• v.51 no.3
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• pp.776-783
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• 2019

Laser welding is usually a more effective method than electron-beam one since a vacuum chamber is not required. It is important for joining Zr-1%Nb (E110) alloy in a manufacturing process of nuclear fuel rods. In the present work, effect of energy parameters of pulsed laser welding on properties of butt joints of sheets with a thickness of 0.5 mm is investigated. The most efficient combination has been found (8-11 J pulse energy, 10-14 ms pulse duration, 780-810 W peak pulse power, 3 Hz pulse frequency, 1.12 mm/s welding speed). The results show that ultimate strength under static loading can not be used as a quality criterion for zirconium alloys welds. Increased shielding gas flow rate does not allow to protect weld metal totally and contributes to defect formation without using special nozzles. Several types of imperfections of the welds have been found, but the major problem is branching microcracks on the surface of the welds. It is difficult to identify the cause of their appearance without additional research on improving the welding zone protection (gas composition and flow rate as well as nozzle configuration) and studying the hydrogen content in the welds.

• Journal of Rhinology
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• v.25 no.2
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• pp.99-102
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• 2018

Lateral pharyngoplasty is a surgical option for treatment of obstructive sleep apnea (OSA). Here, we present a case involving a 40-year-old healthy man who underwent surgery, including lateral pharyngoplasty and robotic tongue base resection, for OSA. There were no intraoperative or immediate postoperative complications. However, on postoperative day 3, the patient presented with swelling in the temporal and buccal areas and was diagnosed with subcutaneous emphysema, later confirmed by computed tomography. The patient was carefully monitored under conservative care and discharged without complications. Although subcutaneous emphysema following tonsillectomy is a rare complication and usually resolves with conservative management, in certain cases, it might require surgical intervention. Lateral pharyngoplasty involves tonsillectomy and additional incision along the tonsillar fossa, which makes it susceptible to pharyngeal wall defects and, consequently, subcutaneous emphysema. Additionally, lateral pharyngoplasty and robotic tongue base resection cause pain and might thus contribute to the increase in intrapharyngeal pressure, which might aggravate subcutaneous emphysema. Lateral pharyngoplasty should be performed with meticulous dissection of the superior pharyngeal constrictor muscle. Healthcare providers should be aware of these complications and, upon suspicion of the same, place the patient under close observation to prevent life-threatening situations.

• Korean Journal of Head & Neck Oncology
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• v.22 no.1
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• pp.36-39
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• 2006

The Neurofibroma is a benign neoplasm originating from neural tissue such as Schwann cell, fibroblast and peripheral fibroblast, which rarely converts to malignancy. About 25-45% of neurofibroma are located in head and neck, and the most common sites are lateral cervical region and mouth. Because of its high vascularity and invasion to the adjacent organs, surgical resection may be confronted and limited, moreover large neurofibroma can cause large defect that needs various kinds of flap. The factors related to clinically suspected malignancy are painlessness, abrupt increase in size, firm fixation, and central ulceration, although the malignancy rate of neurofibroma is low. The complete resection was failed several times at local clinic, the patient was transferred to our hospital. We have successfully removed the retroauricular neurofibroma using transposition flap & free skin graft on its large defects.