• Title/Summary/Keyword: cause of defects

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Improvement of Defect Density by Slurry Fitter Installation in the CMP Process (CMP 공정에서 슬러리 필터설치에 따른 결함 밀도 개선)

  • Kim, Chul-Bok;Seo, Yong-Jin;Seo, Sang-Yong;Lee, Woo-Sun;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05b
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    • pp.30-33
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    • 2001
  • Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter-level dielectrics (ILD). Especially, defects like micro-scratch lead to severe circuit failure, and affects yield. CMP slurries can contain particles exceeding $1{\mu}m$ size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particle agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectric(IMD)-CMP. The filter installation in CMP polisher could reduce defect after IMD-CMP. As a result of micro-scratches formation, it shows that slurry filter plays an important role in determining consumable pad lifetime.

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A Study on the Quality Improvement of Mechanical Drawing Notes Using Lean 6 Sigma Analysis (린 6시그마 분석을 통한 도면 주기 품질 향상 방안 연구)

  • Jeon, Yong Gu;Huh, Hyoung Jo;Lee, Seong Bae;Park, Hun Hyuk;An, Byung Guk
    • Journal of Korean Society for Quality Management
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    • v.48 no.3
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    • pp.381-393
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    • 2020
  • Purpose: The purpose of this study was to find useful solutions by analyzing causes and results about defects on mechanical drawing notes and provide an automated tool with solutions to mechanical engineers. Methods: The collected data for defects on mechanical drawing notes were from ongoing development and mass production projects. Various measurement methods were used based on the Lean 6 Sigma analysis such as Process analysis, C&E diagram and some statistical analysis. Results: The results of this study are as follows; The results of the Lean 6 Sigma analysis, the validity of the selected indicators for improving drawing notes quality was verified through the verification of cause variables. The strategy established to improve the mechanical drawing notes was reflected as an automated program, and the defects were within a manageable range and achieved target Sigma level. Conclusion: Through the application of the "Mechanical drawing notes automation tool", it is expected to resolve the "Voice of Customer, VOC" and "Voice of Business, VOB".

A comparative study of the PD pattern analysis based on PRPD and CAPD for the diagnosis of Gas Insulated Transformer (GITr(Gas Insulated Transformer) 내부에 발생되는 PD 신호의 패턴분석을 위한 PRPD와 CAPD 적용 결과 비교)

  • Jung, Seung-Yong;Lim, Yun-Sok;Koo, Ja-Youn;Chang, Yong-Moo;Kang, Chang-Won;Lee, Yung-Sang
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2060-2062
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    • 2005
  • Partial Discharge (PD) phenomena occurred by different nature of insulating defects has been regarded as a random process by which Phase Resolved Partial Discharge Analysis (PRPDA) has been proposed and then commercially accepted for the diagnosis of the power apparatus since more than three decades. Moreover, for the same purpose, a novel approach based on the Chaotic Analysis(CAPD) has been proposed since 2000, in which PD phenomena is suggested to be considered as a deterministic dynamical process. In this work for the diagnosis of GITr, four different types of specimen were fabricated as a model of the possible defects that might possibly cause its sudden failures such as turn to turn insulation, inter coil insulation, free moving particle and protrusion. For this purpose, these defects are introduced into the GITr mock-up and experimental investigations have been carried out in order to analyze the related PD patterns by means of both PRPDA and CAPD respectively and then their comparisons are made systematically.

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Practical stepwise approach to rhythm disturbances in congenital heart diseases

  • Huh, June
    • Clinical and Experimental Pediatrics
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    • v.53 no.6
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    • pp.680-687
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    • 2010
  • Patients with congenital heart diseases (CHD) are confronted with early- and late-onset complications, such as conduction disorders, arrhythmias, myocardial dysfunction, altered coronary flow, and ischemia, throughout their lifetime despite successful hemodynamic and/or anatomical correction. Rhythm disturbance is a well-known and increasingly frequent cause of morbidity and mortality in patients with CHD. Predisposing factors to rhythm disturbances include underlying cardiac defects, hemodynamic changes as part of the natural history, surgical repair and related scarring, and residual hemodynamic abnormalities. Acquired factors such as aging, hypertension, diabetes, obesity, and others may also contribute to arrhythmogenesis in CHD. The first step in evaluating arrhythmias in CHD is to understand the complex anatomy and to find predisposing factors and hemodynamic abnormalities. A practical stepwise approach can lead to diagnosis and prompt appropriate interventions. Electrophysiological assessment and management should be done with integrated care of the underlying heart defects and hemodynamic abnormalities. Catheter ablation and arrhythmia surgery have been increasingly applied, showing increasing success rates with technological advancement despite complicated arrhythmia circuits in complex anatomy and the difficulty of access. Correction of residual hemodynamic abnormalities may be critical in the treatment of arrhythmia in patients with CHD.

Development of an Electromagnetic Nondestructive Testing Method for the Prevention of Defects in Steam Generator Tubes at Nuclear Power Plant (원자력발전소 증기발생기 전열관의 결함발생 예방을 위한 전자기 비파괴 검사방법 개발)

  • Shin, Young-Kil
    • Proceedings of the KIEE Conference
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    • 1996.07a
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    • pp.83-85
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    • 1996
  • Major cause of defects in steam generator tubes at nuclear power plant is the accumulation of magnetite and other byproducts of corrosion in the crevice gap between support plates and tubes. Since damaged tubes result in contamination of the secondary coolant by the radioactive primary coolant, they represent a safety hazard. Early detection of magnetite buildup is, therefore, imperative in order to take remedial measures such as chemical flushing. Although the eddy current testing is being used for the inspection of steam generator tubes, the interpretation of resulting signals is generally a difficult task. This paper uses the phase of sensor coil emf as the test signal to find a way of easier signal interpretation. Numerical study using FEM shows that the shape of resulting signal is good for identifying the relative position of the probe to the support plate, and for discreminating the different shapes and degrees of magnetite buildup in the crevice gap region.

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The effect of thread rolling process parameters on the quality of large stud bolts (대형 스터드 볼트의 나사부 품질에 미치는 전조 공정 변수의 영향)

  • Kwon, I.K.;Yoon, Y.C.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2006.05a
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    • pp.341-344
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    • 2006
  • Finite element analysis and verification experiments were performed in order to find cause of defects such as folding and improper radius around the root area of the thread rolled stud bolts. Thread rolling experiments under several conditions were also carried out to understand the effect of process parameters, such as the rotation speed of the dies and the hardness of the work pieces, on the product quality. Folding defects at the top of thread are attributed to the higher hardness of the work piece and higher rotation speed of the rolling die. It was also found that the radius of screw mainly determined by the radius of the die.

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A Material Simulation of High-Strain-Rate Deformation with Dislocations and Vacancies (전위 및 공공을 고려한 고변형률 변형에 대한 재료 시뮬레이션)

  • Choi, Deok-Kee;Ryu, Han-Kyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.28 no.9
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    • pp.1306-1313
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    • 2004
  • This paper addresses a theoretical approach to calculate the amount of the stored energy during high strain-rate deformations using atomistic level simulation. The dynamic behavior of materials at high strain-rate deformation are of great interest. At high strain-rates deformations, materials generate heat due to plastic work and the temperature rise can be significant, affecting various properties of the material. It is well known that a small percent of the energy input is stored in the material, and most of input energy is converted into heat. However, microscopic analysis has not been completed without construction of a material model, which can simulate the movement of dislocations and vacancies. A major cause of the temperature rise within materials is traditionally credited to dislocations, vacancies and other defects. In this study, an atomistic material model for FCC such as copper is used to calculate the stored energy.

Neurodevelopmental Aspects of RASopathies

  • Kim, Ye Eun;Baek, Seung Tae
    • Molecules and Cells
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    • v.42 no.6
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    • pp.441-447
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    • 2019
  • RAS gene mutations are frequently found in one third of human cancers. Affecting approximately 1 in 1,000 newborns, germline and somatic gain-of-function mutations in the components of RAS/mitogen-activated protein kinase (RAS/MAPK) pathway has been shown to cause developmental disorders, known as RASopathies. Since RAS-MAPK pathway plays essential roles in proliferation, differentiation and migration involving developmental processes, individuals with RASopathies show abnormalities in various organ systems including central nervous system. The frequently seen neurological defects are developmental delay, macrocephaly, seizures, neurocognitive deficits, and structural malformations. Some of the defects stemmed from dysregulation of molecular and cellular processes affecting early neurodevelopmental processes. In this review, we will discuss the implications of RAS-MAPK pathway components in neurodevelopmental processes and pathogenesis of RASopathies.

A Study on the Fault Diagnosis of the 3-D Roll Shape in Cold Rolling

  • Lee, Chang-Woo;Kang, Hyun-Kyoo;Shin, Kee-Hyun
    • Journal of Mechanical Science and Technology
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    • v.18 no.12
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    • pp.2174-2181
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    • 2004
  • The metal processing system usually consists of various components such as motors, work rolls, backup rolls, idle rolls, sensors, etc. Even a simple fault in a single component in the system may cause a serious damage on the final product. It is, therefore, necessary to diagnose the faults of the components to detect and prevent a system failure. Especially, the defects in a work roll are critical to the quality of strip. In this study, a new 3-D diagnosis method was developed for roll shape defects in rolling processes. The new method was induced from analyzing the rolling mechanism by using a rolling force model, a tension model, the Hitchcock's equation, and measurement of the strip thickness, etc. Computer simulation shows that the proposed method is very useful in the diagnosis of the 3-D roll shape.

Neonatal innate immunity and Toll-like receptor

  • Yoon, Hye-Sun
    • Clinical and Experimental Pediatrics
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    • v.53 no.12
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    • pp.985-988
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    • 2010
  • The innate immune response is the first line of defense against microbial infections. Innate immunity is made up of the surface barrier, cellular immunity and humoral immunity. In newborn, immunologic function and demands are different to adults. Neonatal innate immunity specifically suppresses Th1-type immune responses, and not Th2-type immune responses, which are enhanced. And the impaired response of macrophages is associated with the defective innate immunity in newborn period. Toll-like receptors (TLRs) play a key roles in the detection of invading pathogens and in the induction of innate immune responses. In newborn, the expression of TLRs is age dependent, so preterm has low expression of TLRs. Also, there are defects in signaling pathways downstream of TLRs. As a consequence, the defects of TLRs activity cause the susceptibility to infection in the neonatal period.