• 제목/요약/키워드: catalytic chemical vapor deposition (CCVD)

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촉매 화학기상증착 공정에서 온도구배 설정을 통한 타이타늄 기판에서의 CNT 성장 거동 (CNT Growth Behavior on Ti Substrate by Catalytic CVD Process with Temperature Gradient in Tube Furnace)

  • 박주혁;변종민;김형수;석명진;오승탁;김영도
    • 한국분말재료학회지
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    • 제21권5호
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    • pp.371-376
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    • 2014
  • In this study, modified catalytic chemical vapor deposition (CCVD) method was applied to control the CNTs (carbon nanotubes) growth. Since titanium (Ti) substrate and iron (Fe) catalysts react one another and form a new phase ($Fe_2TiO_5$) above $700^{\circ}C$, the decrease of CNT yield above $800^{\circ}C$ where methane gas decomposes is inevitable under common CCVD method. Therefore, we synthesized CNTs on the Ti substrate by dividing the tube furnace into two sections (left and right) and heating them to different temperatures each. The reactant gas flew through from the end of the right tube furnace while the Ti substrate was placed in the center of the left tube furnace. When the CNT growth temperature was set $700/950^{\circ}C$ (left/right), CNTs with high yield were observed. Also, by examining the micro-structure of CNTs of $700/950^{\circ}C$, it was confirmed that CNTs show the bamboo-like structure.

Effect of $Al_2O_3/Fe$ Ratio on Characteristics of Carbon Nanotubes Prepared by Catalytic Chemical Vapor Deposition

  • Jung, Sung-Sil;Lee, Dae-Yeol;Chung, Won-Sub;Park, Ik-Min
    • Carbon letters
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    • 제5권2호
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    • pp.81-87
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    • 2004
  • The effect of compositions of $Al_2O_3$ in the mixed $Fe/Al_2O_3$ catalysts on the synthetic behaviors of carbon nanotubes (CNTs) by catalytic chemical vapor deposition (CCVD) process was investigated in wide range of the mixture ratios of support materials. CNTs were synthesized with $Fe/Al_2O_3$ catalysis under the condition of 40 min in synthetic time, and 923 K of synthetic temperature using $C_2H_4$ and $H_2$ as synthetic and carrier gas, respectively. The carbon yield with the content of $Al_2O_3$ showed in a parabolic curve and the maximum carbon yield was 40 wt.% of $Al_2O_3$. As the mixture ratio of $Al_2O_3$ increased, decreasing tendency was observed in the diameter of CNTs. Specific surface areas of CNTs were increased with the increase of the mixture ratio of $Al_2O_3$.

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Synthetic Properties of Fe/MgO Catalyst on Characteristics of Carbon Nanotubes Prepared by Catalytic Chemical Vapor Deposition

  • Jung, Sung-Sil;Lee, Dae-Yeol;Chung, Won-Sub;Park, Ik-Min
    • Carbon letters
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    • 제5권3호
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    • pp.133-141
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    • 2004
  • The synthetic behaviors of carbon nanotubes (CNTs) by Fe/MgO catalysts were investigated in 0~90 wt.% range of MgO mixture ratios by catalytic chemical vapor deposition (CCVD) process. The CNTs were synthesized with 40 minutes of synthetic time, and 923 K of synthetic temperature using 0.1 L/min of ethylene gas and 1.0 L/min of hydrogen gas as synthetic and carrier gas, respectively. As the increase of synthetic temperatures and times, the diameters of CNTs become thicker. The carbon yield showed in a parabolic curve as MgO content increased and the maximum carbon yield was obtained at 30 wt.% of MgO. There were no obvious changes in the diameters of CNTs respect to the change of MgO content. Fe/MgO CNTs showed good crystalinity by High Resolution Transmission Electron microscope (HR-TEM) analysis. The behaviors of Fe/MgO CNTs have a tendency of depending on synthetic time and temperature rather than MgO content.

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CNTs 합성을 통해 향상된 비표면적을 갖는 Ti 다공체의 제조 (Fabrication of Ti Porous body with Improved Specific Surface Area by Synthesis of CNTs)

  • 최혜림;변종민;석명진;오승탁;김영도
    • 한국분말재료학회지
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    • 제23권3호
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    • pp.235-239
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    • 2016
  • This study is performed to fabricate a Ti porous body by freeze drying process using titanium hydride ($TiH_2$) powder and camphene. Then, the Ti porous body is employed to synthesize carbon nanotubes (CNTs) using thermal catalytic chemical vapor deposition (CCVD) with Fe catalyst and methane ($CH_4$) gas to increase the specific surface area. The synthesized Ti porous body has $100{\mu}M$-sized macropores and $10-30{\mu}m$-sized micropores. The synthesized CNTs have random directions and are entangled with adjacent CNTs. The CNTs have a bamboo-like structure, and their average diameter is about 50 nm. The Fe nano-particles observed at the tip of the CNTs indicate that the tip growth model is applicable. The specific surface area of the CNT-coated Ti porous body is about 20 times larger than that of the raw Ti porous body. These CNT-coated Ti porous bodies are expected to be used as filters or catalyst supports.

촉매 화학 기상 증착법을 사용하여 실리콘 기판위에 수직 정렬된 직경이 얇은 다중층 탄소나노튜브의 합성과 그들의 전계방출 특성 (Synthesis of vertically aligned thin multi-walled carbon nanotubes on silicon substrates using catalytic chemical vapor deposition and their field emission properties)

  • 정승일;최상규;이승백
    • 한국진공학회지
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    • 제17권4호
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    • pp.365-373
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    • 2008
  • 최적화된 량의 황화수소 첨가 가스를 이용하여 실리콘 기판위에 증착된 Fe/Al 박막위에 촉매 화학 기상 증착법을 사용하여 직경이 얇은 다중층 탄소나노튜브가 수직 정렬되어 합성되었다. 주사전자현미경 관측 이미지에서 합성된 탄소나노튜브는 상대적으로 일정한 길이를 가지고 기판에 수직으로 정렬되었다. 투과전자현미경 관측에서 합성된 탄소나노튜브는 10nm 이내의 작은 외경을 가졌고 촉매가 거의 없었다. 평균 튜브의 벽 수는 약 다섯 개이다. 수직 정렬된 직경이 얇은 다중층 탄소나노튜브의 성장 메카니즘이 제시되었다. 수직 정렬된 직경이 얇은 다중층 탄소나노튜브는 $0.1\;{\mu}A/cm^2$의 전류밀도에서 약 $1.1\;V/{\mu}m$ 낮은 턴-온 전계를 나타내었고 $2.7\;V/{\mu}m$의 전계에서 약 $2.5\;mA/cm^2$의 전류밀도를 얻었다. 게다가, 수직 정렬된 직경이 얇은 다중층 탄소나노튜브는 약 $1\;mA/cm^2$의 전류밀도에서 20시간동안 전류밀도 저하 없이 좋은 전계 방출 안정성을 보여주었다.

High-yield synthesis of thin multiwalled carbon nanotubes and their field emission characteristics

  • Jeong, Hee-Jin;Song, Young-Il;Choi, Ha-Kyu;Kim, Gil-Yong;Yu, Tong;Lim, Seong-Chu;Lee, Young-Hee
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1443-1446
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    • 2005
  • We have synthesized thin multi-walled carbon nanotubes (t-MWCNTs) using a catalytic chemical vapor deposition (CCVD) method with FeMoMgO catalyst. The number of tube walls were 2 ${\sim}$ 6 with the corresponding diameters of 3 ${\sim}$ 6 nm. We obtained high production yield of over 3000 wt% compared to the weight of the supplied catalyst. These t-MWCNTs revealed the intermediate structural characteristics between single- and multi-walled carbon nanotubes (SWCNTs and MWCNTs). We have also characterized the field emission properties such as turn-on field and emission current, and current degradation from these t-MWCNTs together with SWCNTs and MWCNTs.

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이중층 탄소나노튜브 전계전자 방출원의 신뢰성 있는 전계방출 특성 (A Reliable Field Emission Performance of Double-Walled Carbon Nanotube Field Emitters)

  • 정승일;이승백
    • 한국진공학회지
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    • 제17권6호
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    • pp.566-575
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    • 2008
  • 촉매 화학기상증착법을 이용하여 합성된 이중층 탄소나노튜브를 가지고 전계전자 방출원을 제작하여 이들의 신뢰성 있는 전계전자 방출특성을 조사하였다. 합성된 탄소 필라멘트들은 TEM, TGA, 그리고 Raman 분석을 통하여 결함이 없고 순도가 높은 이중층 탄소나노튜브가 합성이 되었음을 확인하였다. 이들 이중층 탄소나노튜브 전계전자 방출원은 이전극 구조에서 낮은 턴-온 전계와 높은 전류밀도의 전계전자 방출 특성을 보여주었고, 균질한 전계방출 패턴과 좋은 전계방출 안정성을 나타내었다.