• Title/Summary/Keyword: catalytic chemical vapor deposition (CCVD)

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CNT Growth Behavior on Ti Substrate by Catalytic CVD Process with Temperature Gradient in Tube Furnace (촉매 화학기상증착 공정에서 온도구배 설정을 통한 타이타늄 기판에서의 CNT 성장 거동)

  • Park, Ju Hyuk;Byun, Jong Min;Kim, Hyung Soo;Suk, Myung-Jin;Oh, Sung-Tag;Kim, Young Do
    • Journal of Powder Materials
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    • v.21 no.5
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    • pp.371-376
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    • 2014
  • In this study, modified catalytic chemical vapor deposition (CCVD) method was applied to control the CNTs (carbon nanotubes) growth. Since titanium (Ti) substrate and iron (Fe) catalysts react one another and form a new phase ($Fe_2TiO_5$) above $700^{\circ}C$, the decrease of CNT yield above $800^{\circ}C$ where methane gas decomposes is inevitable under common CCVD method. Therefore, we synthesized CNTs on the Ti substrate by dividing the tube furnace into two sections (left and right) and heating them to different temperatures each. The reactant gas flew through from the end of the right tube furnace while the Ti substrate was placed in the center of the left tube furnace. When the CNT growth temperature was set $700/950^{\circ}C$ (left/right), CNTs with high yield were observed. Also, by examining the micro-structure of CNTs of $700/950^{\circ}C$, it was confirmed that CNTs show the bamboo-like structure.

Effect of $Al_2O_3/Fe$ Ratio on Characteristics of Carbon Nanotubes Prepared by Catalytic Chemical Vapor Deposition

  • Jung, Sung-Sil;Lee, Dae-Yeol;Chung, Won-Sub;Park, Ik-Min
    • Carbon letters
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    • v.5 no.2
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    • pp.81-87
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    • 2004
  • The effect of compositions of $Al_2O_3$ in the mixed $Fe/Al_2O_3$ catalysts on the synthetic behaviors of carbon nanotubes (CNTs) by catalytic chemical vapor deposition (CCVD) process was investigated in wide range of the mixture ratios of support materials. CNTs were synthesized with $Fe/Al_2O_3$ catalysis under the condition of 40 min in synthetic time, and 923 K of synthetic temperature using $C_2H_4$ and $H_2$ as synthetic and carrier gas, respectively. The carbon yield with the content of $Al_2O_3$ showed in a parabolic curve and the maximum carbon yield was 40 wt.% of $Al_2O_3$. As the mixture ratio of $Al_2O_3$ increased, decreasing tendency was observed in the diameter of CNTs. Specific surface areas of CNTs were increased with the increase of the mixture ratio of $Al_2O_3$.

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Synthetic Properties of Fe/MgO Catalyst on Characteristics of Carbon Nanotubes Prepared by Catalytic Chemical Vapor Deposition

  • Jung, Sung-Sil;Lee, Dae-Yeol;Chung, Won-Sub;Park, Ik-Min
    • Carbon letters
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    • v.5 no.3
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    • pp.133-141
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    • 2004
  • The synthetic behaviors of carbon nanotubes (CNTs) by Fe/MgO catalysts were investigated in 0~90 wt.% range of MgO mixture ratios by catalytic chemical vapor deposition (CCVD) process. The CNTs were synthesized with 40 minutes of synthetic time, and 923 K of synthetic temperature using 0.1 L/min of ethylene gas and 1.0 L/min of hydrogen gas as synthetic and carrier gas, respectively. As the increase of synthetic temperatures and times, the diameters of CNTs become thicker. The carbon yield showed in a parabolic curve as MgO content increased and the maximum carbon yield was obtained at 30 wt.% of MgO. There were no obvious changes in the diameters of CNTs respect to the change of MgO content. Fe/MgO CNTs showed good crystalinity by High Resolution Transmission Electron microscope (HR-TEM) analysis. The behaviors of Fe/MgO CNTs have a tendency of depending on synthetic time and temperature rather than MgO content.

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Fabrication of Ti Porous body with Improved Specific Surface Area by Synthesis of CNTs (CNTs 합성을 통해 향상된 비표면적을 갖는 Ti 다공체의 제조)

  • Choi, Hye Rim;Byun, Jong Min;Suk, Myung-Jin;Oh, Sung-Tag;Kim, Young Do
    • Journal of Powder Materials
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    • v.23 no.3
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    • pp.235-239
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    • 2016
  • This study is performed to fabricate a Ti porous body by freeze drying process using titanium hydride ($TiH_2$) powder and camphene. Then, the Ti porous body is employed to synthesize carbon nanotubes (CNTs) using thermal catalytic chemical vapor deposition (CCVD) with Fe catalyst and methane ($CH_4$) gas to increase the specific surface area. The synthesized Ti porous body has $100{\mu}M$-sized macropores and $10-30{\mu}m$-sized micropores. The synthesized CNTs have random directions and are entangled with adjacent CNTs. The CNTs have a bamboo-like structure, and their average diameter is about 50 nm. The Fe nano-particles observed at the tip of the CNTs indicate that the tip growth model is applicable. The specific surface area of the CNT-coated Ti porous body is about 20 times larger than that of the raw Ti porous body. These CNT-coated Ti porous bodies are expected to be used as filters or catalyst supports.

Synthesis of vertically aligned thin multi-walled carbon nanotubes on silicon substrates using catalytic chemical vapor deposition and their field emission properties (촉매 화학 기상 증착법을 사용하여 실리콘 기판위에 수직 정렬된 직경이 얇은 다중층 탄소나노튜브의 합성과 그들의 전계방출 특성)

  • Jung, S.I.;Choi, S.K.;Lee, S.B.
    • Journal of the Korean Vacuum Society
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    • v.17 no.4
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    • pp.365-373
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    • 2008
  • We have succeeded in synthesizing vertically aligned thin multi-walled carbon nanotubes (VA thin-MWCNTs) by a catalytic chemical vapor deposition (CCVD) method onto Fe/Al thin film deposited on a Si wafers using an optimum amount of hydrogen sulfide ($H_2S$) additive. Scanning electron microscope (SEM) images revealed that the as-synthesized CNT arrays were vertically well-oriented perpendicular to the substrate with relatively uniform length. Transmission electron microscope (TEM) observations indicated that the as-grown CNTs were nearly catalyst-free thin-MWCNTs with small outer diameters of less than 10nm. The average wall number is about 5. We suggested a possible growth mechanism of the VA thin-MWCNT arrays. The VA thin-MWCNTs showed a low turn-on electric field of about $1.1\;V/{\mu}m$ at a current density of $0.1\;{\mu}A/cm^2$ and a high emission current density about $2.5\;mA/cm^2$ at a bias field of $2.7\;V/{\mu}m$. Moreover, the VA thin-MWCNTs presented better field emission stability without degradation over 20 hours (h) at the emission current density of about $1\;mA/cm^2$.

High-yield synthesis of thin multiwalled carbon nanotubes and their field emission characteristics

  • Jeong, Hee-Jin;Song, Young-Il;Choi, Ha-Kyu;Kim, Gil-Yong;Yu, Tong;Lim, Seong-Chu;Lee, Young-Hee
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1443-1446
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    • 2005
  • We have synthesized thin multi-walled carbon nanotubes (t-MWCNTs) using a catalytic chemical vapor deposition (CCVD) method with FeMoMgO catalyst. The number of tube walls were 2 ${\sim}$ 6 with the corresponding diameters of 3 ${\sim}$ 6 nm. We obtained high production yield of over 3000 wt% compared to the weight of the supplied catalyst. These t-MWCNTs revealed the intermediate structural characteristics between single- and multi-walled carbon nanotubes (SWCNTs and MWCNTs). We have also characterized the field emission properties such as turn-on field and emission current, and current degradation from these t-MWCNTs together with SWCNTs and MWCNTs.

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A Reliable Field Emission Performance of Double-Walled Carbon Nanotube Field Emitters (이중층 탄소나노튜브 전계전자 방출원의 신뢰성 있는 전계방출 특성)

  • Jung, S.I.;Lee, S.B.
    • Journal of the Korean Vacuum Society
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    • v.17 no.6
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    • pp.566-575
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    • 2008
  • We investigated the field emission characteristics from the planar field emitters made of double-walled carbon nanotubes (DWCNTs) synthesized by a catalytic chemical vapor deposition (CCVD) method. Transmission electron microscopy, Thermogravimetric and Raman analysis showed that the carbon materials have a low defect level in their atomic carbon structure, pointing to the synthesis of high-purity DWCNTs. For field emission properties of DWCNTs, the turn-on field of DWCNTs was $1.9\;V/{\mu}m$ and the current density was about $74\;mA/cm^2$ at $8.1\;V/{\mu}m$, which is sufficient for the applications of field emission displays and vacuum microelectronic devices. The DWCNT field emitters also exhibited a uniform field emission pattern and good field emission stability in a diode configuration.