• Title/Summary/Keyword: carrier gas flow rate

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Crystal Characteristics of 3C-SiC Grown on Si(100) Wafers (Si(100)기판상에 성장된 3C-SiC의 결정 특성)

  • Chung, Yun-Sik;Ryu, Ji-Goo;Seon, Joo-Heon;Chung, Soo-Yong;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05a
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    • pp.30-34
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    • 2002
  • Single crystal 3C-SiC(cubic silicon carbide) thin-films were deposited on Si(100) wafers up to a thickness of 4.3 ${\mu}m$ by APCVD method using HMDS(hexamethyldisilane) at $1350^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like crystal surface. The growth rate of the 3C-SiC films was 4.3 ${\mu}m$/hr. The 3C-SiC epitaxial films grown on Si(100) were characterized by XRD, AFM, RHEED, XPS and raman scattering, respectively. The 3C-SiC distinct phonons of TO(transverse optical) near 796 $cm^{-1}$ and LO(longitudinal optical) near $974{\pm}1cm^{-1}$ were recorded by raman scattering measurement. The heteroepitaxially grown films were identified as the single crystal 3C-SiC phase by XRD spectra($2{\theta}=41.5^{\circ}$).

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The Fundamental Studies of the New Glow Discharge/Inductively Coupled Plasma Interface: Part Ⅰ. Preliminary Studies (새로운 글로우 방전/유도결합 플라스마 장치(GD/ICP Interface)에 대한 기초 연구: Part Ⅰ. 기초 연구)

  • Lee, Gae Ho;Kil, Hyo Shik;Kim, Hyung Seung;Gary M. Hieftje
    • Journal of the Korean Chemical Society
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    • v.43 no.2
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    • pp.182-192
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    • 1999
  • The new GD/ICP-AES quick change over system has been developed and characterized. Within less than 15 minutes, ICP-AES could be switched to GD-AES and vise a versa. As a result, both solid and liquid samples could be analyzed in a very short period of time by the ICP/GD-AES quick change over system developed in our laboratory. The influences of the experimental variables, such as flow rate of coolant gas, flow rate of auxiliary gas, flow rate of sample carrier gas, sampling depth, orifice size of sampling cone, and rf (radio frequency) power on emission intensity have been presented. The detection limits of Cd(I) 228.8 nm, Mn (II) 257.61 nm, and Fe(II) 259.95 nm were found to be 3.86, 1.49, and 5.79 ppb, respectively. And linealities of the calibration curves were measured to be unity.

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The Formation Mechanism Synthesizing of $SrTiO_3$Fine Powders by Ultrasonic Spray Pyrolysis (초음파 분무 열분해법에 의한 $SrTiO_3$ 미분말 합성시 그 형성 과정에 관하여)

  • 허화범;이동주;신건철
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.2 no.2
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    • pp.11-19
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    • 1992
  • $SrTiO_3$powders were synthesized from the chloride and the nitrate aqueous solution by spray pyrolysis method using ultrasonic vibrator. The concentration of mother solution was prepared 0.05M and O.lM. The carrier gas flow rate was 0.5cm/sec and 1.5cm/sec, respectively. The formation processing was investigated in the 0.05M and 0.05cm/sec. The $SrTiO_3$powders could not be synthesized from chloride aqueous solution. The prepared powders from nitrate aqueous solution was SrTi03 with cubic structure and nearly sphere particle for all samples. Mean particle size was increased from $0.49{\mu}m$ to $0.67{\mu}m$ by changing the carrier gas flow rate from O.5cm/sec to 1.5cm/sec. Also, mean particle size increased from $0.49{\mu}m$to $0.55{\mu}m$by changing the concentration of mother solution from O.05M to O.1M. Atomizing droplet size was $14.3{\mu}m$. The shape of particles was very porous by evaporation of solvent at the initial step. But through the each step upwards, shape of particles was formed themselves into a nearly roundish.

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The Effect of the Precursor Delivery Rate on low Pressure Flame Synthesis of $n-TiO_2$ Powder ($n-TiO_2$ 분말의 저압화염 합성에 미치는 전구체 전달속도의 영향)

  • 김태형
    • Journal of Powder Materials
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    • v.6 no.1
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    • pp.75-80
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    • 1999
  • The formation of $n-TiO_2$ powder by oxidation of Ti-ethoxied vapor in a flat flame burner reactor maintained under 20 torr has been studied. The produced powder were characterized in terms of crystal structure, chemical composition by XRD and TEM. The results showed that the powder consisted of loose agglomerated anatase and rutile particles and their size were about 10 nm and 20 nm, respectively. In the course of synthesis, changes of the flame color were happened to each condition during heating up the bubbler. The flame color transition phenomena reveled that a critical precursor delivery rate was needed for the powder formation (obtainable powder yield). The critical precursor delivery rate was estimated by a simple function of the bubbler temperature and the carrier gas flow rate. The critical precursor delivery rate was reviewed as an important variable of the nanopowder synthesis.

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OH-and CH-Radical Chemiluminescence Characteristics in the Spray Combustion of Ultransonically Atomized Kerosene (초음파에 의해 무화된 케로신 분무연소에서의 OH 라디칼 및 CH 라디칼 자발광 특성)

  • Kim, Min Cheol;Kim, Jeong Soo
    • Journal of the Korean Society of Propulsion Engineers
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    • v.22 no.1
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    • pp.72-79
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    • 2018
  • An experimental study was performed to investigate the chemiluminescence characteristics in the spray combustion of ultransonically atomized kerosene. The radical intensity of the spray flame was measured using an ICCD camera and the amount of fuel consumed was obtained by a precise flow-rate measurement technique during combustion. Fuel consumption increased linearly with the increase in carrier-gas flow rate, and typical group combustion, which is a characteristic of spray combustion, was observed. It was found from the analysis of chemiluminescence that the maximum emission intensities of OH and CH radicals decrease, and they move downstream resulting in the increase in a vivid reaction zone as the spray flow rate increases.

Generation of Silver Nanoparticles by Spark Discharge Aerosol Generator Using Air as a Carrier Gas (공기 분위기에서 스파크 방전을 이용한 은 나노입자 생성)

  • Oh, Hyun-Cheol;Jung, Jae-Hee;Park, Hyung-Ho;Ji, Jun-Ho;Kim, Sang-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.30 no.2 s.245
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    • pp.170-176
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    • 2006
  • A spark discharge aerosol generator using air as a carrier gas has successfully been applied to silver nanoparticle production. The spark discharge between two silver electrodes, which was periodically obtained by discharging the capacitor, produced sufficient high temperatures to evaporate a small fraction of the silver electrodes. The silver vapor was subsequently supersaturated by rapid cooling and condensed to silver nanoparticles by nucleation and condensation. The morphology of the generated particles observed by transmission electron microscope was spherical. The element composition of the nanoparticles was silver, which was determined by energy dispersive X-ray spectroscopy. The crystal phase of the particles spark-generated under air atmosphere was composed of silver and silver oxides phase, which was determined by Xray diffraction analysis. While the nanoparticles generated under nitrogen atmosphere had only silver phase. This XRD data indicates that some fraction of the evaporated silver vapor could be oxidized in air atmosphere by the reaction with oxygen. A stable operation of the spark discharge generator has been achieved. The size and concentration of the particles can be easily controlled by altering the repetition frequency, capacitance, gap distance and flow rate of the spark discharge system.

Reduction Characteristics of Oxygen Carriers in a Pressurized Bubbling Fluidized Bed (가압 기포유동층에서 산소전달입자들의 환원반응특성)

  • YOON, JOO-YOUNG;BAE, DAL-HEE;BAEK, JEOM-IN;RYU, HO-JUNG
    • Transactions of the Korean hydrogen and new energy society
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    • v.27 no.5
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    • pp.589-596
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    • 2016
  • Effects of pressure, temperature, gas velocity, and fuel flow rate on reduction of three oxygen carriers, SDN70, OC-1, OC-2, were measured and investigated in a pressurized bubbling fluidized bed reactor. Among three oxygen carriers OC-2 was selected as the best oxygen carrier in view of fuel conversion and $CO_2$ selectivity. However, all oxygen carriers showed good reactivity even at high pressure conditions. SDN70 particle showed maximum reactivity at $900^{\circ}C$ and low reactivity at $950^{\circ}C$. However, reactivity decay of OC-1 and OC-2 particles at high temperature condition was negligible. The fuel conversion and the $CO_2$ selectivity slightly decreased as the gas velocity increased, whereas they are slightly increased as the fuel concentration increased.

A study on the characteristics of the OXYNITRIDE film deposited by Laser CVD (Laser CVD법에 의해 퇴적된 OXYNITRIDE막의 특성에 관한 고찰)

  • Kim, C.D.;Shin, S.W.;Jung, M.N.;Kim, J.K.;Sung, Y.S.
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1428-1430
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    • 1996
  • Thin Silicon oxynitride(SiON) films have been chemically deposited using 193nm ArF Excimer Laser CVD, with $Si_{2}H_{8}$, $N_{2}O$, and $NH_3$ as the reactive gases and $N_2$ as the carrier gas. Experimental results show that deposition rate and refractive index have a strong dependence on substrate temperature, chamber pressure, gas ratio, laser power and laser beam height. Electrical characterization of oxynitride films demonstrates that for $NH_{3}/N_{2}O$ flow ratios ranging from 0.25 to 1, the leakage currents, the interface trap density and the capacitances (dielect ric constant) increase and the dielectric breakdown fields decrease

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Relationship between Optical Properties Analyzed by Photoluminance of Bonding Structure Analyzed by X-ray Diffractometer (XRD 분석에 의한 결정구조와 PL 분석에 의한 광학적 특성의 상관성)

  • Oh, Teresa
    • Journal of the Semiconductor & Display Technology
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    • v.15 no.1
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    • pp.70-75
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    • 2016
  • GZO films prepared on ITO glasses were annealed at various temperatures in a vacuum condition to research the relationship between oxygen vacancies and optical properties. GZO films after annealing in a vacuum showed the various optical-chemical properties depending on the annealing temperatures and oxygen gas flow rate during the deposition. The oxygen vacancy of GZO film prepared by oxygen gas flows of 22 sccm increased with increasing the annealing temperatures, because of the extraction of oxygen by the annealing. But the intensity of photoluminance of GZO with 22 sccm decreased in accordance with the annealing temperature, because of the reduction of ionized charge carriers. The oxygen vacancy by the extraction of oxygen enhanced a depletion, so the widen depletion had the strong Schottky barrier and the PL intensity due to the low carrier density decreased.

In-Situ TEM Observation on Phase Formation of $TiO_2$ Nanoparticle Synthesized by Flame Method

  • Jie, H.S.;Park, H.;Kim, K.H.;Ahn, J.P.;Park, J.K.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.469-470
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    • 2006
  • [ $TiO_2$ ] nanoparticle was synthesized by the flame method, which was controlled by varying the ratio and flow rate of gas mixtures consisting of oxygen (oxidizer), methane (fuel) and nitrogen (carrier gas). The crystalline phases of $TiO_2$ nanoparticle depended strongly on the temperature distribution in the flame, whereas the morphology was not sensitive. We proved that the anatase phase formed without the phase transformation in the flame and the rutile phase generated through several phase transformations.

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