• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.15-16
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• 2006

In-process surface roughness prediction is studied in this research. To implement in-process prediction, spindle displacement is introduced. Machined surface's roughness is assumed to be expressed in terms of spindle displacement. In-process measurement of spindle displacement is conducted using CCDS (cylindrical capacitive displacement sensor). Two prediction models are developed. One is simple linear model between measured surface roughness and values by spindle displacement. The other is multiple regression model including machining parameters like spindle speed, fee rate and radial depth of cut. Relation between machined surface roughness and roughness by spindle displacement are verified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.133-134
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• 2011

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.453-458
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• 2004

A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100$\mu\textrm{m}$ and a sensitivity about 30nm. This sensor has too opposing electrode of comparably large area and has nominal gap distance about 150$\mu\textrm{m}$. So as to achieve a nano order displacement sensitivity, both sensor and target system have to be considered. This is important for the sensitivity can be achieved by minimizing a system total noise level in electronic type sensor application. Typical performance of the developed sensor is demonstrated in precision moving stage having 0.1$\mu\textrm{m}$ moving resolution.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.90-96
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• 1998

Non-contacting capacitive sensors, based on principle of the cross capacitor, for measuring small displacement less than $1.95{\pm}0.5\;mm$ have been fabricated and characterized. To overcome disadvantages of the existed capacitive sensors with 2-electrodes and 3-electrodes, the new sensor is consisted of 4-electrodes which are formed two electrode(high, low) and 2 guard electrodes on a sapphire plate with diameter 17 mm and thickness 0.7 mm, and are symmetrically situated with a constant gap of 0.2 mm between the electrodes. This sensor can be used for measuring both metallic and non-metallic target without ground connection, and is evaluated to the correlation coefficient of 0.9987 for the range of $1.95{\pm}0.5\;mm$ and that of 0.9995 for $1.95{\pm}0.25\;mm$ range.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.5
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.11
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• pp.1147-1156
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• 2011

A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein, in order to design an instrument for ensuring reliable contact conditions, the contact condition is analyzed by characterizing the signal distortion, observing the pressure distribution between the contacting surfaces, and measuring the motional errors of the sensor using a laser Doppler vibrometer (LDV). The manufactured instrument enables a CLECDiS to be used in an ultraprecise positioning system with improved reliability.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.234-236
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• 2006

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.