• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.93-98
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• 1999

Non-contacting capacitive sensors, based on principle of the cross capacitor, for measuring small displacement less than 1.95$\pm$0.5 mm have been fabricated and characterized. To overcome disadvantages of the existed capacitive sensors, the new sensor is consisted of 4-electrodes which are formed 2 active electrodes and 2 guard electrodes on a sapphire plate with diameter 17mm and thickness 0.7 mm, and are symmetrically situated with constant gap of 0.2 mm among the electrodes. The sensor is evaluated to be correlation coefficient of 0.9987 for the range of 1.95$\pm$0.5 mm and that of 0.9995 for 1.95$\pm$0.25 mm range. This sensor can be used for in situ measurements in the mechanical mirror polishing with precision less than $\pm$1${\mu}{\textrm}{m}$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.31-32
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• 2006

A signal conditioning circuit for capacitive sensors was developed using a commercial single chip solution. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. Up to now, several companies already have succeeded in the development of the capacitive sensors system and they are commercially available in the market. In this research, to construct the signal processing circuits more easily and simply, we used a universal LVDT signal conditioner (AD698). Since the AD698 provides one chip solution for a basic signal processing including modulation and demodulation using various internal components, we can build the processing circuits successfully with minimal additional circuits: a compensation circuits for the drift caused by the bias current of OP amplifiers and a fine adjustment circuit for the elimination of nonlinearity. The signal processing circuits shows nonlinearity less than 0.05% in the comparison with a laser interferometer.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.89-94
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• 2001

A cylindrical capacitance-type spindle displacement sensor was designed and tested in the hard turning as a way to develop a sensor that can estimate cutting forces without using a tool dynamometer. The displacement sensor was installed between the face of spindle cover and the chucking element, and measured pure radial motion of the spindle. Ceramic inserts and tool steel workpieceof 65 Rc were used during the hard turning tests. The signals from the sensor showed the same pattern of cutting force variations as those from the tool dynamometer. The research results showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to estimate cutting forces.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.548-553
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• 2000

A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the $3^{rd}$ harmonic component of the geometric errors of a rotor. The procedure of designing new CCS starts from the modeling and error analysis of CCS. The angular size of CCS is set up as a design parameter, and new 8-segment CCS is introduced to possess an arbitrary angular size. The optimum geometry of CCS to minimize the effect of geometric errors is determined through minimum norm approach. Experimental results with test rotors have confirmed the improvement in geometric error suppression.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.35-44
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• 2009

Long stroke Fast Tool Servo (LFTS) with maximum stroke of $432{\mu}m$ is designed, manufactured and tested for fabrication of optical free-form surfaces. The large amount of stroke in LFTS has been realized by utilizing the hinge and lever mechanisms which enable the displacement amplification ratio of 4.3. In this mechanism the peculiar shape was devised for maximizing the displacement of end tip in LFTS and special mechanical spring has been mounted to provide the sufficient preload to the piezoelectric actuator. Also, its longitudinal motion of tool tip can be measured by capacitive type displacement sensor and closed-loop controlled to overcome the nonlinear hysteresis. In order to verify the static and dynamic characteristics of designed LFTS, several features including step response, frequency response and cut-off frequency in closed-loop mode were experimentally examined. Also, basic machining result shows that the proposed LFTS is capable of generating the optical free-form surface as an additional axis in diamond turning machine.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1038-1041
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• 2003

The magnetic suspension system is used in many areas, because it has great advantages. such as no friction, no noise, no lubrication and so on, but it is a unstable system in natural. It must have a feedback control with the position is measured for a stable levitation. There are an eddy-current sensor, a capacitive sensor, an inductive sensor, and an optical sensor with a laser as the sensor which measures displacements without contact. Among them, an inductive sensor is made with lower price than others. And it has a good linearity. In this paper, a magnetic circuit leads a linear equation between an input as a displacement and an output as a voltage. Experiments establish that voltage change according to displacement is linear. This paper presents the preliminary study of an inductive position sensing for self-sensing magnetic suspension system.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.2
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• pp.17-23
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• 2002

A cylindrical capacitance-type spindle displacement sensor was developed and its effectiveness as a system to monitor cutting forces during hard turning was tested in this research. The sensor was installed between the face of spindle cover and the chucking element and measured pure radial motion of the spindle under the condition with presence of roundness error at measured surface. To prove the effectiveness of the developed system hard aiming tests using ceramic inserts and tool steel as workpiece were conducted. The workpiece was hardened up to 65 Rc. The variations of pure radial motion of the spindle ware measured during the cutting tests. The signals from the sensor showed the same pattern of cutting force variations from the tool dynamometer due to the progress of tool wear. As the flank wear of the ceramic tool increased both static component of cutting forces and the amount of center shift of spindle orbit increased, Results from the research showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to monitor cutting conditions and tool performance in the un-manned machining center.

• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.597-599
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• 2006

In this paper, we propose an artificial intelligence method to compensate the nonlinearity error which occurs in the heterodyne laser interferometer. Some superior properties such as long measurement range, ultra-precise resolution and various system set-up lead the laser interferometer to be a practical displacement measurement apparatus in various industry and research area. In ultra-precise measurement such as nanometer or subnanometer scale, however, the accuracy is limited by the nonlinearity error caused by the optical parts. The feedforward neural network trained by back-propagation with a capacitive sensor as a reference signal minimizes the nonlinearity error and we demonstrate the effectiveness of our proppsed algorithm through some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.315-316
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• 2006

• Tribology and Lubricants
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• v.10 no.4
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• pp.27-32
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• 1994

The capacitive type transducers measure the displacement of rotating shaft using the voltage difference which is formed between the sensor plates and rotor so that the measured signal is not affected by the magnetic field generated by the magnetic bearing. In this paper, the capacitive transducers are embedded inside of the magnetic bearing. In order to verify the support characteristics of the capacitance sensor-magnetic bearing system, we experimented and analyzed the magnetic bearing-rotating shaft system up to 12,000 rpm. The magnetic bearing system proposed in this paper, successfully supports the rotating shaft and we can remain the maximum displacement below $5 \mu m$ at 12,000 rpm.