• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1450-1454
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• 2007

A Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) has been developed to measure displacements at high accuracy within a long measurement range. In this paper, we have worked on improving the performance and reliability of the sensor. The performance increase can be done by introducing the smaller electrode patterns of $4{\mu}m$ width. In order to improve the reliability of the sensor we have changed the electrode layers from chrome-gold to chrome-gold-chrome and re-design its supporting structure. The newly-designed sensor is fabricated and tested to show that its sensitivity is $35pF/{\mu}m$, which implies that its resolution may be 0.36nm if SNR (Signal-to-Noise-Ratio) is 80.1dB. It is about ten times of that $(3.14pF/{\mu}m)$ of its previous version with 10${\mu}m$ electrodes. The total measurement range remains the same as the previous one; 15mm. The calibration experiments show its improved performance and reliability.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.387-393
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• 2004

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.110-117
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• 1997

This paper discusses numerically and experimenally several design parameters for the plate- type capacitive displacement sensor. The influenences of shape of this sensor on the sensitivity are numerically analyzed with the charge density method. Using many test sensor plates of different shape for verifing the validity of this method can not guarantee the repetibility of experiments. Therefore we made specially the test sensor plate so that experiments of effects of shape of this sensor on sensitivity can be done with only that plate. Results from these experiments agree well with those from numerical analysis.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.55-61
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• 2004

Chatter monitoring is also important for realizing an unmanned machining system. while many researches were done on this area, it is still a difficult job to detect very small amplitude amount of chattering. A monitoring system using a capacitive spindle displacement sensor was developed to monitor cutting vibration in turning in this research. The variance of the measured spindle displacement signals using the developed sensor was calculated and utilized to quantify the small vibration in machining. The results were compared with variance obtained using a tool dynamometer. The result showed that the developed system could be utilized in monitoring the subtle changes of cutting vibrations with high sensitivity confidence.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.516-522
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• 2003

Monitoring chattering is also important for realizing an unmanned machining system While many researches were done on this area, it is still a difficult job to detect very small amplitude amount of chattering. A monitoring system using a capacitive spindle displacement sensor was developed to monitor cutting vibration in turning in this research. The variance of the measured spindle displacement signals using the developed sensor was calculated and utilized to quantity the small vibration in machining. The results were compared with variance obtained using a tool dynamometer. The result showed that the developed system could be utilized in monitoring the subtle changes of cutting vibrations with high sensitivity confidence.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.485-489
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• 2004

Cutting force is important to understand cutting process in milling. To measure cutting force, tool dynamometer is widely used but it is hard to apply in workshop condition. Cutting force measurement which doesn't affect cutting process is needed. Using relations between cutting force and spindle displacement, cutting force can be predicted. Cylindrical capacitive sensor was used to measure spindle displacement during cutting. And signals from tool dynamometer collected to compare with spindle displacement. The result shows spindle displacement has a linear relation with cutting force. Using this result, a simple method to predict cutting force could be applied at workshop condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.313-314
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• 2012

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.140-145
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• 2007

To improve productivity of a metal cutting process, it is required to monitor machining stability in real time. Since cutting environment is harsh against sensing conditions due to vibration, chip, and cutting fluid, etc., it is necessary to develop a robust and reliable sensing system for the practical application. In this work, a chatter monitoring system was developed and its effectiveness was proved. Spindle displacement caused by cutting was selected as a main monitoring parameter. A cylindrical capacitive displacement sensor was adopted. Chatter frequencies were identified through modal analysis. To quantify chatter vibrations, chatter correlation coefficient was introduced. The identification of the monitoring system showed a good agreement with the result of experiment.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.60-67
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• 2007

A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.133-134
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• 2006

A cylindrical capacitive displacement sensor (CCS) was developed and applied for monitoring end milling processes. Dynamic characteristics of a spindle-assembly were measured using the CCS and a designed magnetic exciter. The technique to extract the spindle displacement component caused only by cutting from the measured signals using the CCS was proposed in the paper. Using CCS signals and FRF (Frequency Response Function) derived from dynamics of the spindle tool system, dynamic cutting forces are estimated quantitatively.