• Journal of the Korean Institute of Intelligent Systems
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• v.7 no.5
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• pp.67-76
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• 1997

In this paper, a theoretical study is presented for the force control of a miniature robotic manipulator which is driven by a pair of piezo-electric bimorph cells. In the theoretical analysis, one finger is modeled as a flexible cantilevers with a force sensor at the tip and the finger is a solid beam. The robotic finger is used to hold the objects with different stiffness such as an iron block and a living insect and a moving objcet. So it is very important to develop an adequate controller for the holding operation of the finger. The main problems in force controlling are overdamping, overshoot and unknown environment(such as the stiffness of object and unknown plant parameters). So, the main target is propose the new fuzzy compensation for unknown environment and incease the system performance. The fuzzy compensation is implemented by using PI-type fuzzy approach to identified unknown environment. And the result of proposed controller was compared with the conventaional PID and optimal controller.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.2
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• pp.116-122
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• 2004

A micromachined self-exited piezoelectric cantilever has been fabricated using PZT(52/48) thin film. For the application to biosensor using antigen-antibody interaction, electromechanical properties such as resonant frequency and quality factor of micromachined piezoelectric cantilever were important factors. Electromechanical properties and resonant behaviors of microfabricated cantilever were simulated by FEA (Finite Element Analysis) using Coventorware$^{TM}$2003. And these characterization of microcantilever were measured by using LDV(Laser Doppler Vibrometer) to compare with FEA data. We present the resonant frequency shift of micromachined piezoelectric cantilevers due to combination of mass loading and change of spring constant by gold deposition. Experimental mass sensitivities of microcantilever were characterized by Au deposition on the backside of microcantilever. Mass sensitivities with $100{\times}300$ ${\mu}{\textrm}{m}$ dimension cantilever from simulation and experimental were 5.56 Hz/ng and 16.8 Hz/ng respectively.y.

• Proceedings of the KIEE Conference
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• 1994.11a
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• pp.416-418
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• 1994

In this study, a silicon piezoresistive accelerometer is designed and fabricated using $p^+$ etch stop layer. The accelerometer consists of a seismic mass and tour cantilevers, and is fabricated mainly by the anisotropic etching method using EPW as an etchant. Eight piezoresistors are properly arranged and connected to make a bridge circuit so that acceleration in only one direction may be measured. The etch stop method is adequate to the mass-production and the precise thickness control of the diaphragms as well, whet compared with the electrochemecal etch stop method.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.71.5-71
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• 2001

This paper presents the vibration control of a flexible intelligent beam with added mass. The materials which is a glass fiber reinforced(GFR) thermoplastic composite is employed to achieve vibration characteristics according to added mass induced end of composite beam. In the experiments of forced vibration control, the -controller are employed to achieve vibration suppression in forced vibration situations. Also, in the controller design, 1st and 2nd´s natural frequencies are considered in the modeling, because robust control theory which has robustness to structured uncertainty is adopted to suppress the vibration. By designing a controller using mu-synthesis, robust performance against measurement noise, various modeling.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.11
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• pp.1-5
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• 2010

We developed a novel micro-electro mechanical systems (MEMS) test socket using silicon on insulator (SOI) substrate with the cantilever array structure. We designed the round shaped cantilevers with the maximum length of $350{\mu}m$, the maximum width of $200{\mu}m$ and the thickness of $10{\mu}m$ for $650{\mu}m$ pitch for 8 mm x 8 mm area and 121 balls square ball grid array (BGA) packages. The MEMS test socket was fabricated by MEMS technology using metal lift off process and deep reactive ion etching (DRIE) silicon etcher and so on. The MEMS test socket has a simple structure, low production cost, fine pitch, high pin count and rapid prototyping. We verified the performances of the MEMS test sockets such as deflection as a function of the applied force, path resistance between the cantilever and the metal pad and the contact resistance. Fabricated cantilever has 1.3 gf (gram force) at $90{\mu}m$ deflection. Total path resistance was less than $17{\Omega}$. The contact resistance was approximately from 0.7 to $0.75{\Omega}$ for all cantilevers. Therefore the test socket is suitable for BGA integrated circuit (IC) packages tests.

• Journal of Sensor Science and Technology
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• v.10 no.5
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• pp.292-303
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• 2001

This work reports the tunneling effects of the lateral field emitters. Tunneling effect is applicable to the VMFS(vacuum magnetic field sensors). VMFS uses the fact that the trajectory of the emitted electrons are curved by the magnetic field due to Lorentz force. Polysilicon was used as field emitters and anode materials. Thickness of the emitter and the anode were $2\;{\mu}m$, respectively. PSG(phospho-silicate-glass) was used as a sacrificial layer and it was etched by HF at a releasing step. Cantilevers were doped with $POCl_3(10^{20}cm^{-3})$. $2{\mu}m$-thick cantilevers were fabricated onto PSG($2{\mu}m$-thick). Sublimation drying method was used at releasing step to avoid stiction. Then, device was vacuum sealed. Device was fixed to a sodalime-glass #1 with silver paste and it was wire bonded. Glass #1 has a predefined hole and a sputtered silicon-film at backside. The front-side of the device was sealed with sodalime-glass #2 using the glass frit. After getter insertion via the hole, backside of the glass #1 was bonded electrostatically with the sodalime-glass #3 at $10^{-6}\;torr$. After sealing, getter was activated. Sealing was successful to operate the tunneling device. The packaged VMFS showed very small reduced emission current compared with the chamber test prior to sealing. The emission currents were changed when the magnetic field was induced. The sensitivity of the device was about 3%/T at about 1 Tesla magnetic field.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• The Journal of Korean Academy of Prosthodontics
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• v.55 no.2
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• pp.180-186
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• 2017

Implant supported prostheses have improved the quality of lives of totally edentulous patients. However, there are some limitations on the number of implants related to the residual bone level or the economic concern and so on. In this situation, applying fixed detachable prosthesis with bilateral cantilevers can be considered. This clinical report describes implant supported prosthetic rehabilitation of a patient with severe bone resorption. The patient was satisfied and felt comfortable with upper complete denture and lower fixed detachable prosthesis.

• The Journal of Korean Academy of Prosthodontics
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• v.56 no.1
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• pp.25-30
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• 2018

In edentulous patients, the advantages of prosthodontic therapy using oral implants include both stability and comfort. Advantages suggested for this approach include the prevention of mandibular bone resorption and increased masticatory function. Implant hybrid prostheses place 4 to 6 implants between the mental foramens, and cantilevers are used to replace the posterior teeth at both ends. The 85 - year - old female patient visited our clinic with complete edentulism in the maxilla and mandible. This article reports a satisfactory clinical and esthetic outcome of full mouth rehabilitation using removable complete denture in the maxilla and implant hybrid prosthesis in the mandible.

• Journal of Korean Society of Steel Construction
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• v.16 no.4 s.71
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• pp.453-461
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• 2004

Since there are no specifications in Korea regarding the design of steel column baseplates that are subjected to concentric axial load, this paper proposes a more accessible stress design method for baseplates based on AISC specifications and guidelines.Some designs included in this paper were: (1) a full area ofconcrete bearing pressure under normal axial load and subsequent failure in external cantilevers at 0.95 d or 0.8 bf, and (2) a partial area of the pressure under a light axial load and subsequent failure as an internal cantilever model.