• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.12
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• pp.1906-1913
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• 2004

A new method has been proposed for the calibration of frictional forces in atomic force microscopy. Angle conversion factor is defined using the relationship between torsional angle and frictional signal. Once the factor is obtained from a cantilever, it can be applied to other cantilevers without additional experiments. Moment balance equations on the flat surface and top edge of a commercial step grating are used to obtain angle conversion factor. Proposed method is verified through another step grating test and frictional behavior of Mica.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.24.2-27
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• 1996

This paper is a study on the fuzzy force control of a miniature gripper driven by piezoelectric bimorph actuator. The system is composed of two flexible cantilevers, a stepping motor, a laser displacement transducer and two semiconductor force sensors attached to the beams. Obtained results show that the present artificial finger system works well as a miniature gripper, which produces approximately 0.06N force in the maximum. Further, the fuzzy position/force control algorithm is applied to the soft-handing gripper for stable grasping of a object. It revealed that the fuzzy rule-based controller be efficient controller for the stable drive of the flexible miniature gripper. It also showed that two semiconductor strain gauges located in the flexible beam play an important roles for force control, position control and vibration suppression control.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.217-217
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths, $10\;{\mu}m$ width, and $0.4\;{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the 60 ~ 100 ${\mu}m$ long cantilevers, the fundamental frequency appeared at 373.4 ~ 908.1 kHz. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.846-851
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• 2004

A new method has been proposed for the calibration of frictional forces in atomic force microscopy. Angle conversion factor is defined using the relationship between torsional angle and frictional signal. Once the factor is obtained from a cantilever, it can be applied to other cantilevers without additional experiments. Moment balance equations on the flat surface and top edge of a commercial step grating are used to obtain angle conversion factor. Proposed method is verified through another step grating test and frictional behavior of Mica.

• Journal of Mechanical Science and Technology
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• v.18 no.4
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• pp.622-629
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• 2004

In this paper, effects of elastic energy of magnetostrictive film on the deflection of a cantilevered film-substrate system are investigated. The total energy including the elastic energy of magnetostrictive film is formulated. And it is minimized to give the curvatures and the position of neutral axis of the cantilevered system. To discuss the effects of the elastic energy of film in a measured system, three magnetostrictive unimorph cantilevers and a bimorph cantilever reported elsewhere are reviewed. It is shown that the assumption, since the thickness of film is much smaller than that of substrate the film elastic energy is negligible, can cause considerable error in evaluating magnetostrictive coefficients. Not the ratio of thicknesses but elastic energies between film and substrate is also shown to play important role in making decision whether the assumption is valid or not.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1007-1009
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• 1998

In this paper, the effects of the drive-in process parameters on the residual stress profile of the p+ silicon film has been investigated. All the residual stress profile has been estimated by the second-order polynomial. All the coefficients of the polynomial have been determined from the measurement of the deflections of cantilevers and a rotating beam by using a surface profiler meter and by means of focusing a calibrated microscope. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual stress decreases. If the boron concentration decreases the tensile residual stress decreases except near the surface where the magnitude of compressive residual stress increases.

• Tribology and Lubricants
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• v.21 no.1
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• pp.1-7
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• 2005

Effect of Surface roughness on nanoscale adhesion was studied experimentally by using colloidal probe technique. Glass micro balls having the radius of $3.3\~17.4{\mu}m$ were glued at the end of AFM cantilevers to prepare colloidal probes. Adhesion force between the colloidal probe and Si-wafer was measured using pull-off force measuring method. Results showed that the measured adhesion forces are not the function of the radius of the glued balls because the ball surfaces are rough. It is also found that roughness parameters such as $R_a,\;R_q\;and\;R_{max}$ do not have important role on nanoscale adhesion. In order to find the effect of surface roughness on nanoscale adhesion, the bearing areas were extracted from the measured topography of glued balls. After normalizing the measured adhesion force with the bearing area, it was found that the normalized adhesion force kept constant as function of the radius of glued ball.

• Proceedings of the Korea Concrete Institute Conference
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• 1999.04a
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• pp.135-140
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• 1999

The size effect of axial compressive strength of concrete in notched specimens was experimentally investigated. Based on the concept of the fracture mechanics and size effect law, theoretical studies for axial compressive failure of concrete were reviewed, and two failure modes of concrete specimen under compression were discussed. In this study, experiment of axial compressive failure, which is one of the two failure modes, was carried out by using double cantilever fracture specimens. By varying the slenderness of cantilevers and the eccentricity of applied loads with respect to the axis of each cantilever, the size effect of axial compressive strength of concrete was investigated, and predicted by Bazant's size effect law. The test results show that size effect appears conspicuously for all series of specimens. For the eccentricity of loads, the influence of tensile and compressive stress at the notch tip are significant and so that the size effect is varied. In other words, if the influence of tensile stress at the notch tip grows up, the size effect of concrete increases. And the fact that the fracture process zone must be sufficiently secured for more accurate experiment was affirmed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.303-306
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.4
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• pp.675-681
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• 1988

A simplified FRF(frequency response function) model of an indeterminate cantilever system with viscoelastic material layers is derived. A way to calculate modal damping of the system from the dynamic properties of the viscoelastic material is proposed. The model is experimentally verified.