• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.78-78
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• 2003

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.894-900
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• 2006

This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

• Journal of the Korean Academy of Esthetic Dentistry
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• v.10 no.1
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• pp.104-113
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• 2001

This article described a procedure for fabricating an esthetic gingival porcelain restoration as an implant-supported fixed prosthesis for edentulous maxilla. Alternative treatments for fully edentulous patients include an implant-supported overdenture or a fixed implant-supported prosthesis with bilateral distal cantilevers. But, from a functional and biomechanical point of view, the fixed implant-supported prosthesis with posterior cantilevers or implant-supported tissue-borne overdenture do not significantly improve masticatory effectiveness compared with a distributed implant restoration as a fixed implant-supported prosthesis. The fact that the prosthesis is supported by distributed implants over eight for edentulous maxilla in general, provides increased masticatory efficiency as a fixed restoration and similar gingival appearance with esthetic gingival porcelain. It is also detachable by dentist to allow easier after-care of soft tissue and the prosthesis.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1994-1996
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• 1996

This paper presents the fabrication and testing of a polysilicon piezoresistive accelerometer with p+ silicon diaphragm by simple process such as two step photolithography for the RIE process to form the cantilevers and a deep anisotropic etch process for the complete fabrication of the accelerometer. The fabricated accelerometer consists of a seismic mass and four cantilevers on which polysilicon piezoresistors are formed. The measurement of the output signal from the bridge circuit of the fabricated accelerometer is carried out with the HP 3582A spectrum analyzer. The analysis of the experimental result is showed in terms of the sensitivity and the resonant frequency. At atmospheric condition, the measurement values of the sensitivity and the resonant frequency are $11\;{\mu}V/Vg$ and 475 Hz, respectively.

• Journal of Biosystems Engineering
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• v.16 no.1
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• pp.9-17
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• 1991

A dynamometer was designed and constructed to measure three directional forces and moments of pull type implement with eliminating the interference between the forces. The dynamometer consists of a linear motion bearing, self-aligning bearings, universal joints, and cantilevers where strain gages were attached. A data acuquisition system was developed to collect data and to analyze them. The data acuquisition system consists of the dynamometer, a potentiometer to measure the implement depth, strain amplifiers, a A/D converter, and an IBM-AT compatible microcomputer. Program, written in C language, was developed to read data from tranducers with given interval, to calculate forces and moments, to display them on screen, and to store them on disk. The calibration results showed that cantilevers had good linearity and there was no interference among directional forces. When applied loads were reduced with constant rate, hysteresis was appeared on the dynamometer. It might to be reduced by using ball bearings instead of self-aligning bearings.

• Proceedings of the KIEE Conference
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• 1994.11a
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• pp.413-415
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• 1994

In this paper, a new technique for quantitative estimation of the stress profile along the depth of $p^+$ silicon films is presented. The $p^+$ silicon cantilevers with various beam thickness and a rotating beam supported by two cantilevers are used for estimating the stress profile of the films. The average of the residual stress distribution is estimated to be 50MPa. Most of $p^+$ silicon films are subjected to the tensile stress, except the region near the frontside.

• 한국초전도학회:학술대회논문집
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• 2008.08a
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• pp.51-51
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• 2008

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.144-149
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• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.7
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• pp.511-515
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• 2012

A road energy harvester was designed and fabricated to convert mechanical energy from the vehicle load to electrical energy. The road energy harvester is composed of 24 piezoelectric cantilevers and a vehicle load transfer mechanism. Applying a vehicle load transfer mechanism rather than directly installing energy harvesters under roads decreases the area of road construction and allows more energy harvesters to be installed on the side of the road. The power generation amount with respect to the vehicular velocity change was assessed by installing the vehicle load transfer mechanism and the energy harvester in the form of speed bumps and underground. The energy harvester installed in a speed bump form generated power of 7.61 mW at the vehicular velocity of 20 km/h. Also, power generation of the energy harvester installed in the underground form was 63.9 mW at the vehicular velocity of 28 km/h. Although the number of piezoelectric cantilevers was reduced by 1/3 to 24 in comparison to the previous research results with 72 piezoelectric cantilevers, similar power generation characteristic value was obtained within the vehicular velocity of 20 km/h by altering the vehicle load transfer mechanism and cantilever vibration method.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.