• Title/Summary/Keyword: cantilevers

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Micromachinng and Fabrication of Thin Filmes for MEMS-infrarad Detectors

  • Hoang, Geun-Chang;Yom, Snag-Seop;Park, Heung-Woo;Park, Yun-Kwon;Ju, Byeong-Kwon;Oh, Young-Jei;Lee, Jong-Hoon;Moonkyo Chung;Suh, Sang-Hee
    • The Korean Journal of Ceramics
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    • v.7 no.1
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    • pp.36-40
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    • 2001
  • In order to fabricate uncooled IR sensors for pyroelectric applications, multilayered thin films of Pt/PbTiO$_3$/Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si and thermally isolating membrane structures of square-shaped/cantilevers-shaped microstructures were prepared. Cavity was also fabricated via direct silicon wafer bonding and etching technique. Metallic Pt layer was deposited by ion beam sputtering while PbTiO$_3$ thin films were prepared by sol-gel technique. Micromachining technology was used to fabricate microstructured-membrane detectors. In order to avoid a difficulty of etching active layers, silicon-nitride membrane structure was fabricated through the direct bonding and etching of the silicon wafer. Although multilayered thin film deposition and device fabrications were processed independently, these could b integrated to make IR micro-sensor devices.

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Design and Electrical Properties of Piezoelectric Energy Harvester for Roadway (도로용 압전발전발판 설계 및 발전특성 평가)

  • Kim, Chang-Il;Lee, Joo-Hee;Kim, Kyung-Bum;Jeong, Young-Hun;Cho, Jeong-Ho;Paik, Jong-Hoo;Lee, Young-Jin;Nahm, Sahn
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.7
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    • pp.554-558
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    • 2011
  • Piezoelectric energy harvester (PEH) as a box type was fabricated in order to harvest mechanical energy imparted to roadways from passing vehicles and convert it into electricity. The PEH was composed of 72 piezoelectric cantilevers with 9 springs with elasticity stick to a bottom of the PEH. For the single piezoelectric cantilever, when a single push with approximately 5 mm displacement was incident to it, power of 0.355 mW was produced at $100\;k{\Omega}$. It is found that the power from the single piezoelectric cantilever increases when spring constant is high. We investigated power of PEH when the moving vehicle passes in it. Power was increased with increasing vehicle speed. When vehicle speed is 30 km/h, power is 20.6 mW.

An Analysis of the Design of Public Libraries in Culture-led Urban Regeneration (문화적 도시재생을 위한 공공도서관 계획 특성 연구)

  • Moon, Eun-Mi
    • Korean Institute of Interior Design Journal
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    • v.26 no.5
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    • pp.143-151
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    • 2017
  • This study aims to analyze the design of public libraries which act as anchors in culture-led urban regeneration. They have been built as city's symbols as well as catalysts to revitalize city centers and urban spaces since the 1990s. This study finds that the public libraries play roles in the urban development as cultural icons, multi-functional spaces, and public domain. This study examines the five examples of the libraries and finds their important design qualities as follow. First, public libraries are planned to symbolize local culture and history as cultural icons. The shapes of public libraries are expressed with sculptured cultural icons, while their facades are designed to signify cities' identities and images. Second, public libraries in culture-led urban regeneration have multi-functional spaces which provide diverse activities and experiences to visitors. The libraries often have galleries and theaters for cultural life, cafes and shops for daily uses, educational facilities, as well as public services, parking, and transport systems that connect to urban infrastructure. Third, the public libraries become the anchors of surrounding public spaces and cultural buildings. The libraries have the sequences of approach from entry plazas, transitional zones, and entrances to lobbies. Especially the transitional zones between the libraries and the cities that are covered with giant cantilevers expand the libraries' space and establish attractive urban spaces. Forth, the libraries employ nature and cityscapes in their design. The surfaces and openings of the libraries are adjusted to allow many attractive views to visitors. Fifth, the libraries have big lobby spaces which are the centers of the buildings as well as the public domain. The lobby spaces are designed as in-door spaces like out-doors with vertical and horizontal openness that allow the natural flows of light from ceilings, glass walls and vertical voids.

Seismic response of non-structural components attached to reinforced concrete structures with different eccentricity ratios

  • Aldeka, Ayad B.;Dirar, Samir;Chan, Andrew H.C.;Martinez-Vazquez, Pedro
    • Earthquakes and Structures
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    • v.8 no.5
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    • pp.1069-1089
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    • 2015
  • This paper presents average numerical results of 2128 nonlinear dynamic finite element (FE) analyses of lightweight acceleration-sensitive non-structural components (NSCs) attached to the floors of one-bay three-storey reinforced concrete (RC) primary structures (P-structures) with different eccentricity ratios. The investigated parameters include the NSC to P-structure vibration period ratio, peak ground acceleration, P-structure eccentricity ratio, and NSC damping ratio. Appropriate constitutive relationships were used to model the behaviour of the RC P-structures. The NSCs were modelled as vertical cantilevers fixed at their bases with masses on the free ends and varying lengths so as to match the vibration periods of the P-structures. Full dynamic interaction was considered between the NSCs and P-structures. A set of seven natural bi-directional ground motions were used to evaluate the seismic response of the NSCs. The numerical results show that the acceleration response of the NSCs depends on the investigated parameters. The accelerations of the NSCs attached to the flexible sides of the P-structures increased with the increase in peak ground acceleration and P-structure eccentricity ratio but decreased with the increase in NSC damping ratio. Comparison between the FE results and Eurocode 8 (EC8) predictions suggests that, under tuned conditions, EC8 provisions underestimate the seismic response of the NSCs mounted on the flexible sides of the plan-irregular RC P-structures.

Enhancing the Performance of High-Strength Concrete Corbels Using Hybrid Reinforcing Technique (하이브리드 보강기법을 활용한 고강도 콘크리트 내민받침의 성능 향상)

  • Yang, Jun-Mo;Lee, Joo-Ha;Min, Kyung-Hwan;Yoon, Young-Soo
    • Proceedings of the Korea Concrete Institute Conference
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    • 2008.11a
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    • pp.13-16
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    • 2008
  • Corbels are short cantilevers that project from the faces of a column and are a type of stress disturbed member, resisting both the ultimate shear force applied to them by the beam, and the ultimate horizontal force caused by shrinkage, temperature changes, and creep of the supported elements. Recently, as there have been an increase in the use of high-strength concrete and the concern about corrosion problems, lots of researches about hybrid reinforcing technique, applying strategically high performance reinforcements to the concrete elements, are performed. In this study, fiber reinforced high strength concrete corbels were constructed and tested for applying hybrid reinforcing technique to the corbels using steel fibers and headed bars. The results showed that the performance in terms of load carrying capacities, stiffness, ductility, and crack width was improved, as the steel fibers were added and the percentage of steel fibers was increased. In addition, the corbel specimens used headed bars as main tension ties showed superior load carrying capacities, stiffness, and ductility to the corbel specimens anchored main tension ties by welding to the transverse bars.

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Anodization Process of the YBa2Cu3O7-x Strip Lines by the Conductive Atomic Force Microscope Tip (전도성 AFM 탐침에 의한 YBa2Cu3O7-x 스트립 라인의 산화피막 형성)

  • 고석철;강형곤;임성훈;한병성;이해성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.8
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    • pp.875-881
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    • 2004
  • Fundamental results obtained from an atomic force microscope (AFM) chemically-induced direct nano-lithography process are presented, which is regarded as a simple method for fabrication nm-scale devices such as superconducting flux flow transistors (SFFTs) and single electron tunneling transistors (SETs). Si cantilevers with Pt coating and with 30 nm thick TiO coating were used as conducting AFM tips in this study. We observed the surfaces of superconducting strip lines modified by AFM anodization' process. First, superconducting strip lines with scan size 2 ${\mu}{\textrm}{m}$${\times}$2 ${\mu}{\textrm}{m}$ have been anodized by AFM technology. The surface roughness was increased with the number of AFM scanning, The roughness variation was higher in case of the AFM tip with a positive voltage than with a negative voltage in respect of the strip surface. Second, we have patterned nm-scale oxide lines on ${YBa}-2{Cu}_3{O}_{7-x}$ superconducting microstrip surfaces by AFM conductive cantilever with a negative bias voltage. The ${YBa}-2{Cu}_3{O}_{7-x}$ oxide lines could be patterned by anodization technique. This research showed that the critical characteristics of superconducting thin films were be controlled by AFM anodization process technique. The AFM technique was expected to be used as a promising anodization technique for fabrication of an SFFT with nano-channel.

Characterization of thermally driven polysilicon micro actuator (폴리실리콘 마이크로 액츄에이터의 열구동 특성분석)

  • Lee, Chang-Seung;Lee, Jae-Youl;Chung, Hoi-Hwan;Lee, Jong-Hyun;Yoo, Hyung-Joun
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.2004-2006
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    • 1996
  • A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

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Development and Evaluation of Self-powered Energy Harvester in Wireless Sensor Node for Diagnosis of Electric Power System (전력계통 구조물의 상태진단용 자가발전 무선 센서 노드 개발 및 평가)

  • Kim, Chang Il;Jeong, Young-Hun;Yun, Ji Sun;Hong, Youn Woo;Jang, Yong-Ho;Choi, Beom-Jin;Park, Shin-Seo;Son, Chun Myung;Seo, Duck Ki;Paik, Jong Hoo
    • Journal of Sensor Science and Technology
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    • v.25 no.5
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    • pp.371-376
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    • 2016
  • A self-powered piezoelectric energy harvester was developed for the application in wireless sensor node. The energy harvester was evaluated with power generation characteristics for the wireless sensor node for structural diagnosis of the electric power system. The self-powered wireless sensor node was set to measure temperature, vibration frequency of the electric power system. A piezoelectric harvester composed of 7 uni-morph cantilevers (functionalized as 6 generators and 1 vibration sensor) was connected to be an array and revealed to produce significantly high output power of approximately 10 mW at 120 Hz under 3.4 g((1 g = $9.8m/sec^2$). The wireless sensor node could work as the electric power generated by the developed piezoelectric harvester.

Fabrication of Silicon Micromechanical Structures by Stain Etching (스테인 에칭에 의한 실리콘 미세기계구조의 제조)

  • Yu, In-Sik;Sul, Jung-Hoon;Shin, Jang-Kyoo;Sim, Jun-Hwan;Lee, Jong-Hyun
    • Journal of Sensor Science and Technology
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    • v.4 no.1
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    • pp.64-71
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    • 1995
  • We have developed a silicon etching method by which highly doped layers are selectively etched using stain etching technique. Current supply to the backside contact of silicon wafer and special reactor are not required in this method. Therefore this method is much simpler than anodic reaction method and could be applied to standard VLSI process. In addition, highly doped layers of several wafer structures, including the structures where conventional anodic reaction method cannot be used, could be preferentially etched by this technique. We have also fabricated micromechanical structures such as cantilevers and air-bridges on the $n/n^{+}/n$ wafer and air-bridges on the $p/p^{+}$ wafer using this stain etching technique.

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Tuned mass dampers for human-induced vibration control of the Expo Culture Centre at the World Expo 2010 in Shanghai, China

  • Lu, Xilin;Ding, Kun;Shi, Weixing;Weng, Dagen
    • Structural Engineering and Mechanics
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    • v.43 no.5
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    • pp.607-621
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    • 2012
  • The Expo Culture Centre is one of the permanent buildings at the World Expo 2010 in Shanghai, China. The main structure has an oval shape and consists of 36 radial cantilever steel trusses with different lengths and inner frames made of concrete-filled rectangular steel tube members. Tuned mass dampers are used to reduce the excessive vibrations of the sixth floor that are caused by human-induced resonance. A three-dimensional analytical model of the system is developed, and its main characteristics are established. A series of field tests are performed on the structure, and the test results show that the vertical vibration frequencies of most structural cantilevers are between 2.5 Hz and 3.5 Hz, which falls in the range of human-induced vibration. Twelve pairs of tuned mass dampers weighing 115 tons total were installed in the structure to suppress the vibration response of the system. These mass dampers were tuned to the vertical vibration frequency of the structure, which had the highest possibility of excitation. Test data obtained after the installation of the tuned mass dampers are used to evaluate their effectiveness for the reduction of the vibration acceleration. An analytical model of the structure is calibrated according to the measured dynamic characteristics. An analysis of the modified model is performed and the results show that when people walk normally, the structural vibration was low and the tuned mass dampers have no effect, but when people run at the structural vibration frequency, the tuned mass dampers can reduce the floor vibration acceleration by approximately 15%.