• 한국기계가공학회지
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• 제4권4호
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• pp.34-38
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• 2005

This is a widespread requirement for low cost lightweight thermal imaging sensors for both military and civilian applications. Today, a large number of uncooled infrared detector developments are under progress due to the availability of silicon technology that enables realization of low cost IR sensor. System prices are continuing to drop, and swelling production volume will soon drive process substantially lower. The feasibility of micromechanical optical and infrared (IR) detection using microcantilevers is demonstrated. Microcantilevers provide a simple Structurefor developing single- and multi-element sensors for visible and infrared radiation that are smaller, more sensitive and lower in cost than quantum or thermal detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress originating from the bimetallic effect. This paper reports a micromachined silicon uncooled thermal imager intended for applications in automated process control. This paper presents the design, fabrication, and the behavior of cantilever for thermomechanical sensing.

• 한국공작기계학회논문집
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• 제14권5호
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• pp.35-40
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• 2005

An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.155-156
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• 2013

• 한국정밀공학회지
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• 제20권12호
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• pp.64-72
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• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• 센서학회지
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• 제29권4호
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• pp.261-265
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• 2020

In cantilever type piezoelectric energy harvester, the amount of power generation decreases rapidly when outside a certain frequency. The thickness and weight of the cantilever metal plate were modified to develop cantilevers that could produce high power over a wide frequency range. The thicker the cantilever, the higher the power in the higher frequency range. As the weight of the mass increased, the cantilever tended to generate higher power, and the frequency band decreased. A 0.6 mm metal plate cantilever that had a mass of 3.3 g generated power that exceeded 3 mW within the 91-102 Hz range, with average and output values of 9.484 mW and 20.748 mW, respectively, at 99 Hz.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.247-252
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• 한국소음진동공학회논문집
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• 제18권12호
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• pp.1293-1300
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.109-114
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• 2004

This paper presents a theoretical and experimental study of a non-collocated pair of piezopolymer PVDF sensor and piezoceramic PZT actuator, which are bonded on a cantilever beam, in order to suppress unwanted vibration at the tip of the beam. The PZT actuator patch was bonded near the clamped part and the PVDF sensor, which was triangularly shaped, was bonded on the other part of the beam. This is because the triangular PVDF sensor is known that it can detect the tip velocity of a cantilever beam. Because the arrangement of the sensor and actuator pair is not collocated and overlapped each other, the pair can avoid so called 'the in-plane coupling'. The test beam is made of aluminum with the dimension of $200\times20\times2mm$, and the two PZT5H actuators are both $20\times20\times1mm$ and bonded on the beam out-of-phase, and the PVDF sensor is $178mm\times6mm\times52{\mu}m$. Before control, the sensor-actuator frequency response function is confirmed to have a nice phase response without accumulation in a reasonable frequency range of up to 5000 Hz. Both the DVFB and displacement feedback strategies made the error signal from the tip velocity (or displacement) sensor is transmitted to a power amplifier to operate the PZT actuator (secondary source). Both the control methods attenuate the magnitude of the first two resonances in the error spectrum of about 6-7 dB.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2011년도 정기 학술대회
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• pp.680-683
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• 2011

This study deals with damage detection in beam structure by using modal strain energy-based technique with three different sensor types: accelerometer, lead zirconate titanate (PZT) piezoelectric sensor and electrical strain gage. First, the use of direct piezoelectric effect of PZT sensor for dynamic strain response are presented. Next, a modal strain energy-based damage detection method is outlined. For validation, forced vibration tests are carried out on lab-scale aluminum cantilever beam. The dynamic responses are measured for several damage scenarios. Based on damage localization results, the performance of three different sensor types is evaluated.

• Smart Structures and Systems
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• 제19권4호
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• pp.431-439
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• 2017

This investigation is aimed to develop a model of experimental-computation determination of a support moment of a cantilever beam loaded with concentrated force at its end including the optimal choice of coordinates of deflection data points and parameters of transformation of deflection data in case of insufficient accuracy of the assignment of initial parameters (support settlement, angle of rotation of the bearing section) and cantilever beam length. The influence of distribution and characteristics of sensors on the cantilever beam on the accuracy of determining the support moment which improves in the course of transition from the uniform distribution of sensors to optimal non-uniform distribution is shown. On the basis of the theory of inverse problems the method of transformation reduction at numerical differentiation of deflection functions has been studied. For engineering evaluation formulae of uncertainty estimate to determine a support moment of a cantilever beam at predetermined uncertainty of measurements using sensors have been obtained.